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EP1401614
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EP About this file: EP1401614
| EP1401614 - CONTROL OF CHEMICAL MECHANICAL POLISHING PAD CONDITIONER DIRECTIONAL VELOCITY TO IMPROVE PAD LIFE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.04.2010 Database last updated on 28.03.2026 | Most recent event Tooltip | 02.04.2010 | Application deemed to be withdrawn | published on 05.05.2010 [2010/18] | Applicant(s) | For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US | [N/P] |
| Former [2004/14] | For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US | Inventor(s) | 01 /
PAIK, Young, Joseph 4151 Acapulco Drive Campbell, CA 95008 / US | [2004/14] | Representative(s) | Blatchford, William Michael, et al Withers & Rogers LLP 4 More London Riverside London SE1 2AU / GB | [N/P] |
| Former [2004/14] | Blatchford, William Michael, et al Withers & Rogers Goldings House, 2 Hays Lane London SE1 2HW / GB | Application number, filing date | 02739901.3 | 17.06.2002 | [2004/14] | WO2002US19061 | Priority number, date | US20010298878P | 19.06.2001 Original published format: US 298878 P | US20010305798P | 16.07.2001 Original published format: US 305798 P | US20010318743P | 12.09.2001 Original published format: US 318743 P | US20010998372 | 30.11.2001 Original published format: US 998372 | [2004/14] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO02102548 | Date: | 27.12.2002 | Language: | EN | [2002/52] | Type: | A1 Application with search report | No.: | EP1401614 | Date: | 31.03.2004 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.12.2002 takes the place of the publication of the European patent application. | [2004/14] | Search report(s) | International search report - published on: | EP | 27.12.2002 | Classification | IPC: | B24B37/04, B24B49/18, B24B53/007 | [2004/14] | CPC: |
B24B37/013 (EP,US);
B24B53/017 (EP,KR,US);
B24B37/005 (KR);
B24B37/04 (KR);
B24B37/042 (EP,US);
B24B49/03 (EP,US);
B24B49/18 (EP,US);
G05B19/00 (EP,US);
G05B19/19 (EP,US);
G05B19/41865 (EP,US);
H10P52/00 (KR);
H10P72/0604 (EP,US);
H10P72/0612 (EP,US);
H10P74/23 (EP,US);
G05B2219/32053 (EP,US);
G05B2219/32065 (EP,US);
G05B2219/45031 (EP,US);
H10P95/062 (EP,US);
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2004/14] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | REGELUNG DER LINEAREN GESCHWINDIGKEIT EINES ABRICHTWERKZEUGS FÜR EIN CHEMISCH-MECHANISCHES POLIERKISSEN ZUR ERHÖHUNG DESSEN LEBENSDAUER | [2004/14] | English: | CONTROL OF CHEMICAL MECHANICAL POLISHING PAD CONDITIONER DIRECTIONAL VELOCITY TO IMPROVE PAD LIFE | [2004/14] | French: | REGLAGE DE LA VITESSE DIRECTIONNELLE DU DISPOSITIF DE CONDITIONNEMENT DU TAMPON DE POLISSAGE CHIMIQUE MECANIQUE | [2004/14] | Entry into regional phase | 15.01.2004 | National basic fee paid | 15.01.2004 | Designation fee(s) paid | 15.01.2004 | Examination fee paid | Examination procedure | 16.01.2003 | Request for preliminary examination filed International Preliminary Examining Authority: US | 15.01.2004 | Examination requested [2004/14] | 13.02.2007 | Despatch of a communication from the examining division (Time limit: M06) | 20.08.2007 | Reply to a communication from the examining division | 29.06.2009 | Despatch of a communication from the examining division (Time limit: M04) | 10.11.2009 | Application deemed to be withdrawn, date of legal effect [2010/18] | 16.12.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2010/18] | Fees paid | Renewal fee | 04.06.2004 | Renewal fee patent year 03 | 06.06.2005 | Renewal fee patent year 04 | 27.03.2006 | Renewal fee patent year 05 | 08.06.2007 | Renewal fee patent year 06 | 18.03.2008 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 30.06.2009 | 08 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | by applicant | DE4031450 | DE3625894 |