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Extract from the Register of European Patents

EP About this file: EP1412963

EP1412963 - Antenna arrangement and plasma processing apparatus with such an arrangement [Right-click to bookmark this link]
Former [2004/18]METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESS RATES
[2012/42]
StatusNo opposition filed within time limit
Status updated on  24.01.2014
Database last updated on 30.10.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): LU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
LAM RESEARCH CORPORATION
4650 Cushing Parkway, M/S CA-1
Fremont, CA 94538-6470 / US
[2013/12]
Former [2004/18]For all designated states
Lam Research Corporation
4650 Cushing Parkway, M/S CA-1
Fremont, CA 94538-6470 / US
Inventor(s)01 / WILCOXSON, Mark, H.
85 Ronada Avenue
Piedmont, CA 94611 / US
02 / BAILEY, III, Andrew, D.
5167 Northway Road
Pleasanton, CA 94566 / US
03 / KUTHI, Andras
717 Pamela Wood Street
Thousdand Oaks, CA 91320 / US
04 / SMITH, Michael, G.R.
11793 Castle Court
Dublin, CA 94568 / US
05 / SCHOEPP, Alan, M.
10010 Hwy. 9
Ben Lomand, CA 95005 / US
 [2004/18]
Representative(s)Kontrus, Gerhard, et al
Lam Research AG
SEZ-Strasse 1
9500 Villach / AT
[2012/43]
Former [2009/44]Browne, Robin Forsythe, et al
Leaman Browne Limited Pearl Chambers 22 East Parade
Leeds, Yorkshire LS1 5BY / GB
Former [2006/50]Browne, Robin Forsythe, et al
Leaman Browne 5 South Parade
Leeds, LS1 5QX / GB
Former [2006/31]Browne, Robin Forsythe, et al
HLBBshaw 1200 Century Way Thorpe Park Business Park, Colton
Leeds LS15 8ZA / GB
Former [2004/18]Browne, Robin Forsythe, Dr.
Urquhart-Dykes & Lord Tower North Central Merrion Way
Leeds LS2 8PA / GB
Application number, filing date02756544.918.07.2002
[2004/18]
WO2002US23092
Priority number, dateUS20010308469P27.07.2001         Original published format: US 308469 P
US2001003380718.12.2001         Original published format: US 33807
[2004/18]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO03012821
Date:13.02.2003
Language:EN
[2003/07]
Type: A2 Application without search report 
No.:EP1412963
Date:28.04.2004
Language:EN
The application published by WIPO in one of the EPO official languages on 13.02.2003 takes the place of the publication of the European patent application.
[2004/18]
Type: B1 Patent specification 
No.:EP1412963
Date:20.03.2013
Language:EN
[2013/12]
Search report(s)International search report - published on:EP24.12.2003
ClassificationIPC:H01J37/32
[2004/18]
CPC:
H01J37/321 (EP,US); H01J37/32 (KR); H01J37/32467 (EP,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   SK,   TR [2004/18]
TitleGerman:Antennenanordnung und Plasmabearbeitungsvorrichtung mit einer solchen Anordnung[2012/42]
English:Antenna arrangement and plasma processing apparatus with such an arrangement[2012/42]
French:Agencement d'antenne et appareil de traitement de plasma avec un tel agencement[2012/42]
Former [2004/18]VERFAHREN UND VORRICHTUNG ZUM ERREICHEN GLEICHMÄSSIGER BEARBEITUNGSRATEN
Former [2004/18]METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESS RATES
Former [2004/18]PROCEDE ET APPAREIL PRODUISANT DES DEGRES ELEVES D'UNIFORMITE DE TRAITEMENT
Entry into regional phase20.01.2004National basic fee paid 
20.01.2004Designation fee(s) paid 
20.01.2004Examination fee paid 
Examination procedure19.06.2003Request for preliminary examination filed
International Preliminary Examining Authority: EP
20.01.2004Examination requested  [2004/18]
24.05.2007Despatch of a communication from the examining division (Time limit: M04)
10.08.2007Reply to a communication from the examining division
15.12.2009Despatch of a communication from the examining division (Time limit: M04)
01.04.2010Reply to a communication from the examining division
24.06.2011Despatch of a communication from the examining division (Time limit: M06)
16.11.2011Reply to a communication from the examining division
11.06.2012Despatch of a communication from the examining division (Time limit: M04)
07.09.2012Reply to a communication from the examining division
09.10.2012Communication of intention to grant the patent
06.02.2013Fee for grant paid
06.02.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  24.05.2007
Opposition(s)02.01.2014No opposition filed within time limit [2014/09]
Fees paidRenewal fee
09.07.2004Renewal fee patent year 03
08.07.2005Renewal fee patent year 04
27.07.2006Renewal fee patent year 05
27.07.2007Renewal fee patent year 06
25.07.2008Renewal fee patent year 07
28.07.2009Renewal fee patent year 08
26.07.2010Renewal fee patent year 09
25.07.2011Renewal fee patent year 10
25.07.2012Renewal fee patent year 11
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
TR20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
GB18.07.2013
IE18.07.2013
LU18.07.2013
PT22.07.2013
CH31.07.2013
FR31.07.2013
LI31.07.2013
[2015/34]
Former [2015/32]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
TR20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
GB18.07.2013
IE18.07.2013
PT22.07.2013
CH31.07.2013
FR31.07.2013
LI31.07.2013
Former [2014/33]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
GB18.07.2013
IE18.07.2013
PT22.07.2013
CH31.07.2013
FR31.07.2013
LI31.07.2013
Former [2014/24]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
GB18.07.2013
PT22.07.2013
CH31.07.2013
FR31.07.2013
LI31.07.2013
Former [2014/21]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
GB18.07.2013
PT22.07.2013
CH31.07.2013
LI31.07.2013
Former [2014/20]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
CH31.07.2013
LI31.07.2013
Former [2014/14]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
MC20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2014/11]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
IT20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2014/09]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
DK20.03.2013
EE20.03.2013
FI20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2013/52]AT20.03.2013
BE20.03.2013
CY20.03.2013
CZ20.03.2013
EE20.03.2013
FI20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2013/49]AT20.03.2013
BE20.03.2013
CZ20.03.2013
EE20.03.2013
FI20.03.2013
NL20.03.2013
SE20.03.2013
SK20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2013/48]AT20.03.2013
BE20.03.2013
EE20.03.2013
FI20.03.2013
NL20.03.2013
SE20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2013/47]BE20.03.2013
FI20.03.2013
SE20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
PT22.07.2013
Former [2013/44]BE20.03.2013
FI20.03.2013
SE20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
Former [2013/37]FI20.03.2013
SE20.03.2013
BG20.06.2013
GR21.06.2013
ES01.07.2013
Former [2013/36]SE20.03.2013
BG20.06.2013
ES01.07.2013
Former [2013/34]SE20.03.2013
BG20.06.2013
Cited inInternational search[A]JPH0969399  ;
 [A]EP0813227  (LAM RES CORP [US]) [A] 1,15,16 * column 10, line 48 - column 11, line 11; figure - *;
 [A]US6028395  (HOLLAND JOHN PATRICK [US], et al) [A] 1,15,16* column A; figure - *;
 [A]WO0145134  (LAM RES CORP [US], et al) [A] 1,15,16 * page 11, line 6 - page 17, line 30; figures 2-4 *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19970731), vol. 1997, no. 07, & JP09069399 A 19970311 (TOKYO ELECTRON LTD) [A] 1,15,16 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.