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Extract from the Register of European Patents

EP About this file: EP1382063

EP1382063 - METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES [Right-click to bookmark this link]
Former [2004/04]METHOD AND DEVICE FOR THE PRODUCTION OF PROCESS GASES
[2007/16]
StatusThe application is deemed to be withdrawn
Status updated on  23.03.2007
Database last updated on 22.08.2024
Most recent event   Tooltip23.03.2007Application deemed to be withdrawnpublished on 25.04.2007  [2007/17]
Applicant(s)For all designated states
Mattson Thermal Products GmbH
Daimlerstrasse 10
89160 Dornstadt / DE
[N/P]
Former [2004/04]For all designated states
Mattson Thermal Products GmbH
Daimlerstrasse 10
89160 Dornstadt / DE
Inventor(s)01 / ROTERS, Georg
Weseler Strasse 37
48249 Dülmen / DE
02 / MADER, Roland
Ursulers 2
87452 Altusried / DE
03 / SOMMER, Helmut
Haldenweg 9
73326 Deggingen / DE
04 / ERLIKH, Genrih
377 Michelle Lane
Daly City, CA 94015 / US
05 / PASHUT, Yehuda
570 Crystalberry Terrace
San Jose, CA 95129 / US
 [2004/04]
Representative(s)Wagner & Geyer
Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5
80538 München / DE
[N/P]
Former [2004/04]Wagner & Geyer
Gewürzmühlstrasse 5
D-80538 München / DE
Application number, filing date02764065.519.04.2002
[2004/04]
WO2002EP04345
Priority number, dateDE2001101974123.04.2001         Original published format: DE 10119741
[2004/04]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO02086958
Date:31.10.2002
Language:DE
[2002/44]
Type: A1 Application with search report 
No.:EP1382063
Date:21.01.2004
Language:DE
The application published by WIPO in one of the EPO official languages on 31.10.2002 takes the place of the publication of the European patent application.
[2004/04]
Search report(s)International search report - published on:EP31.10.2002
ClassificationIPC:H01L21/316
[2004/04]
CPC:
F22B1/003 (EP,US); H01L21/02 (KR); H01L21/02236 (EP);
H01L21/31658 (US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   TR [2004/04]
TitleGerman:VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN VON PROZESSGASEN[2004/04]
English:METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES[2007/16]
French:PROCEDE ET DISPOSITIF PERMETTANT DE PRODUIRE UN GAZ DE TRAVAIL[2004/04]
Former [2004/04]METHOD AND DEVICE FOR THE PRODUCTION OF PROCESS GASES
Entry into regional phase24.07.2003National basic fee paid 
24.07.2003Designation fee(s) paid 
24.07.2003Examination fee paid 
Examination procedure20.11.2002Request for preliminary examination filed
International Preliminary Examining Authority: EP
24.07.2003Examination requested  [2004/04]
02.01.2004Amendment by applicant (claims and/or description)
01.11.2006Application deemed to be withdrawn, date of legal effect  [2007/17]
05.12.2006Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2007/17]
Fees paidRenewal fee
18.06.2004Renewal fee patent year 03
20.04.2005Renewal fee patent year 04
Penalty fee
Additional fee for renewal fee
30.04.200403   M06   Fee paid on   18.06.2004
30.04.200605   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[A]JPS57194522  ;
 [X]US5082606  (ROTMAN FREDERIC [JP], et al) [X] 1,22 * column 4, line 50 - column 5, line 63; figure - *;
 [X]EP0469157  (TOSHIBA KK [JP]) [X] 1,7,19-22,27 * column 5, line 50 - column 6, line 43; figure - *;
 [A]US5257926  (DRIMER GIDEON [IL], et al) [A] 1,22 * abstract * * column 7, paragraph 2; figure - *;
 [X]EP0922905  (FUJIKIN KK [JP], et al) [X] 1,6,18,22,28 * column 8, line 1 - line 28 * * column 2, line 45 - line 50; figure -; claim 1 *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19830223), vol. 007, no. 045, Database accession no. (E - 160), & JP57194522 A 19821130 (OKI DENKI KOGYO KK) [A] 1,22 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.