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EP1436829

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Extract from the Register of European Patents

EP About this file: EP1436829

EP1436829 - SUBSTRATE SUPPORT [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 15.05.2009 Database last updated on 11.09.2024
Most recent event Tooltip	15.05.2009	Application deemed to be withdrawn	published on 17.06.2009 [2009/25]
Applicant(s)	For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US
	[N/P]
Former [2004/29]	For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US
Inventor(s)	01 / WHITE, John, M. 2811 Colony View Place Hayward, CA 94541 / US
	02 / HOSOKAWA, Akihiro 10264 Danube Drive Cupertino, CA 95014 / US
	[2004/29]
Representative(s)	Zimmermann, Gerd Heinrich, et al Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE
	[N/P]
Former [2004/29]	Zimmermann, Gerd Heinrich, et al Zimmermann & Partner, P.O. Box 33 09 20 80069 München / DE
Application number, filing date	02801637.6	24.09.2002
	[2004/29]
	WO2002US30268
Priority number, date	US20010982406	17.10.2001 Original published format: US 982406
	[2004/29]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO03034473
	Date:	24.04.2003
	Language:	EN
	[2003/17]
	Type:	A2 Application without search report
	No.:	EP1436829
	Date:	14.07.2004
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 24.04.2003 takes the place of the publication of the European patent application.
	[2004/29]
Search report(s)	International search report - published on:	EP	31.07.2003
Classification	IPC:	H01L21/00	[2004/29]
	CPC:	H01L21/6875 (EP,US); H01L21/68 (KR); H01L21/67309 (EP,US)
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, SK, TR [2004/29]
Title	German:	SUBSTRATHALTERUNG	[2004/29]
	English:	SUBSTRATE SUPPORT	[2004/29]
	French:	SUPPORT DE SUBSTRAT	[2004/29]
Entry into regional phase	16.04.2004	National basic fee paid
	16.04.2004	Designation fee(s) paid
	16.04.2004	Examination fee paid
Examination procedure	16.04.2004	Examination requested [2004/29]
	27.08.2004	Despatch of a communication from the examining division (Time limit: M06)
	23.02.2005	Reply to a communication from the examining division
	04.05.2005	Despatch of a communication from the examining division (Time limit: M06)
	02.11.2005	Reply to a communication from the examining division
	23.08.2006	Despatch of a communication from the examining division (Time limit: M04)
	20.12.2006	Reply to a communication from the examining division
	14.07.2008	Despatch of a communication from the examining division (Time limit: M04)
	25.11.2008	Application deemed to be withdrawn, date of legal effect [2009/25]
	13.01.2009	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/25]
Fees paid	Renewal fee
	06.09.2004	Renewal fee patent year 03
	05.09.2005	Renewal fee patent year 04
	08.09.2006	Renewal fee patent year 05
	05.09.2007	Renewal fee patent year 06
	05.09.2008	Renewal fee patent year 07
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[XY]JPH02121347 ;
		[XAY]JPH09293684 ;
		[XAY]US6222337 (KROEKER TONY [US], et al) [X] 8,20,21 * column 8, lines 13-21 * [A] 1,23,40,44 [Y] 2,3,33,34;
		[XA]JP2000353737 ;
		[XA]JP2000183146 ;
		[XA]JPS62193139 ;
		[XA]JPH0424943 ;
		[YA]US6082950 (ALTWOOD ALLEN [US], et al) [Y] 44-46 * abstract * [A] 1,8,23,40
		[XY] - PATENT ABSTRACTS OF JAPAN, (19900727), vol. 014, no. 348, Database accession no. (E - 0957), & JP02121347 A 19900509 (TOKYO ELECTRON LTD) [X] 1,4,6-9,15,17-19,22,23,29,31,38 * abstract * [Y] 2,3,5,10,11,13,24-27,33-35,39,40,42-46
		[XAY] - PATENT ABSTRACTS OF JAPAN, (19980227), vol. 1998, no. 03, & JP09293684 A 19971111 (TOSHIBA CORP) [X] 8 * abstract * [A] 1,23,44 [Y] 5,10,11,13,24-27,35,39,40,42,43
		[XA] - PATENT ABSTRACTS OF JAPAN, (20010406), vol. 2000, no. 15, & JP2000353737 A 20001219 (TORAY IND INC) [X] 1,5,8-10,12,13,15,16,23,24,26,27,29,30 * abstract * [A] 40,44
		[XA] - PATENT ABSTRACTS OF JAPAN, (20001013), vol. 2000, no. 09, & JP2000183146 A 20000630 (IBIDEN CO LTD) [X] 8,17,18 * abstract * [A] 1,23,40,44
		[XA] - PATENT ABSTRACTS OF JAPAN, (19880204), vol. 012, no. 038, Database accession no. (E - 580), & JP62193139 A 19870825 (CANON INC) [X] 8,17,18 * abstract * [A] 1,23,40,44
		[XA] - PATENT ABSTRACTS OF JAPAN, (19920507), vol. 016, no. 188, Database accession no. (E - 1198), & JP04024943 A 19920128 (MITSUBISHI ELECTRIC CORP) [X] 8,18 * abstract * [A] 1,23,40,44

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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