Designated contracting states | DE | | FR | | Examination procedure | 21.08.2008 | Fee for publishing/printing paid | Fees paid | Renewal fee | 25.05.2005 | Renewal fee patent year 03 | 22.05.2006 | Renewal fee patent year 04 | 23.05.2007 | Renewal fee patent year 05 | 26.05.2008 | Renewal fee patent year 06 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 09.08.2004 | AT   M01  
Not yet paid | 09.08.2004 | BE   M01  
Not yet paid | 09.08.2004 | BG   M01  
Not yet paid | 09.08.2004 | CH   M01  
Not yet paid | 09.08.2004 | CY   M01  
Not yet paid | 09.08.2004 | CZ   M01  
Not yet paid | 09.08.2004 | DK   M01  
Not yet paid | 09.08.2004 | EE   M01  
Not yet paid | 09.08.2004 | ES   M01  
Not yet paid | 09.08.2004 | FI   M01  
Not yet paid | 09.08.2004 | GB   M01  
Not yet paid | 09.08.2004 | GR   M01  
Not yet paid | 09.08.2004 | HU   M01  
Not yet paid | 09.08.2004 | IE   M01  
Not yet paid | 09.08.2004 | IT   M01  
Not yet paid | 09.08.2004 | LU   M01  
Not yet paid | 09.08.2004 | MC   M01  
Not yet paid | 09.08.2004 | NL   M01  
Not yet paid | 09.08.2004 | PT   M01  
Not yet paid | 09.08.2004 | RO   M01  
Not yet paid | 09.08.2004 | SE   M01  
Not yet paid | 09.08.2004 | SI   M01  
Not yet paid | 09.08.2004 | SK   M01  
Not yet paid | 09.08.2004 | TR   M01  
Not yet paid | European patent granted | 01.04.2009 | Opposition procedure | 05.01.2010 | No opposition filed within time limit | published on 03.03.2010 | INPADOC data Tooltip | The EPO does not accept any responsibility for the accuracy of legal status data relating to the post-grant phase, including but not limited to their completeness and fitness for specific purposes, nor can it guarantee that such data are up to date. For authoritative information, please refer to the relevant national patent authority. | Event date: | 02.01.2004 | | Event description: | DESIGNATED CONTRACTING STATES | Kind Code of Ref Document: | A1 | Designated State(s): | AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR | | Event date: | 02.01.2004 | | Event description: | REQUEST FOR EXTENSION OF THE EUROPEAN PATENT | Countries concerned: | AL LT LV MK | | Event date: | 03.03.2004 | | Event description: | REQUEST FOR EXAMINATION FILED | Effective DATE: | 20031222 | | Event date: | 07.04.2004 | | Event description: | INFORMATION ON INVENTOR PROVIDED BEFORE GRANT (CORRECTED) | INVENTOR: | NUNOMURA, MASATAKA,YAMAZAKI R&D CENTER | | Event date: | 07.04.2004 | | Event description: | INFORMATION ON INVENTOR PROVIDED BEFORE GRANT (CORRECTED) | INVENTOR: | OOE, MASAYUKI,YAMAZAKI R&D CENTER | | Event date: | 07.04.2004 | | Event description: | INFORMATION ON INVENTOR PROVIDED BEFORE GRANT (CORRECTED) | INVENTOR: | NAKANO, HAJIME,YAMAZAKI R&D CENTER | | Event date: | 07.04.2004 | | Event description: | INFORMATION ON INVENTOR PROVIDED BEFORE GRANT (CORRECTED) | INVENTOR: | TSUMARU, YOSHIKO,YAMAZAKI R&D CENTER | | Event date: | 07.04.2004 | | Event description: | INFORMATION ON INVENTOR PROVIDED BEFORE GRANT (CORRECTED) | INVENTOR: | UENO, TAKUMI,YAMAZAKI R&D CENTER | | Event date: | 26.05.2004 | | Event description: | FIRST EXAMINATION REPORT DESPATCHED | Effective DATE: | 20040413 | | Event date: | 22.09.2004 | | Event description: | DESIGNATION FEES PAID | Designated State(s): | DE FR | | Event date: | 27.08.2008 | | Event description: | PARTY DATA CHANGED (APPLICANT DATA CHANGED OR RIGHTS OF AN APPLICATION TRANSFERRED) | OWNER: | HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. | | Event date: | 01.04.2009 | | Event description: | DESIGNATED CONTRACTING STATES | Kind Code of Ref Document: | B1 | Designated State(s): | DE FR | | Event date: | 14.05.2009 | | Event description: | CORRESPONDS TO: | Ref Document Number: | 60326907 | Country of Ref Document: | DE | DATE OF REF DOCUMENT: | 20090514 | Kind Code of Ref Document: | P | | Event date: | 10.03.2010 | | Event description: | NO OPPOSITION FILED | Effective DATE: | 20100105 | | Event date: | 31.07.2013 | | Event description: | ANNUAL FEE PAID TO NATIONAL OFFICE [ANNOUNCED VIA POSTGRANT INFORMATION FROM NATIONAL OFFICE TO EPO] | Ref Country Code: | DE | Payment DATE: | 20130522 | Year of Fee Payment: | 11 | | Event date: | 30.08.2013 | | Event description: | ANNUAL FEE PAID TO NATIONAL OFFICE [ANNOUNCED VIA POSTGRANT INFORMATION FROM NATIONAL OFFICE TO EPO] | Ref Country Code: | FR | Payment DATE: | 20130603 | Year of Fee Payment: | 11 | | Event date: | 02.12.2014 | | Event description: | REFERENCE TO A NATIONAL CODE | Event code: | REG DE R119 60326907 DE | Code Expl.: | -APPLICATION DEEMED WITHDRAWN, OR IP RIGHT LAPSED, DUE TO NON-PAYMENT OF RENEWAL FEE | | Event date: | 26.02.2015 | | Event description: | REFERENCE TO A NATIONAL CODE | Event code: | REG DE R119 60326907 DE | Code Expl.: | -APPLICATION DEEMED WITHDRAWN, OR IP RIGHT LAPSED, DUE TO NON-PAYMENT OF RENEWAL FEE | Effective DATE: | 20141202 | | Event date: | 27.02.2015 | | Event description: | REFERENCE TO A NATIONAL CODE | Event code: | REG FR ST | Code Expl.: | -NOTIFICATION OF LAPSE | Effective DATE: | 20150130 | | Event date: | 30.04.2015 | | Event description: | LAPSED IN A CONTRACTING STATE [ANNOUNCED VIA POSTGRANT INFORMATION FROM NATIONAL OFFICE TO EPO] | Ref Country Code: | DE | Free Format Text: | LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES | Effective DATE: | 20141202 | | Event date: | 29.05.2015 | | Event description: | LAPSED IN A CONTRACTING STATE [ANNOUNCED VIA POSTGRANT INFORMATION FROM NATIONAL OFFICE TO EPO] | Ref Country Code: | FR | Free Format Text: | LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES | Effective DATE: | 20140602 | | Event date: | 27.02.2009 | | Event description: | (EXPECTED) GRANT | Free Format Text: | ORIGINAL CODE: 0009210 | | Event date: | 02.09.2008 | | Event description: | GRANT FEE PAID | Free Format Text: | ORIGINAL CODE: EPIDOSNIGR3 | | Event date: | 12.04.2008 | | Event description: | DESPATCH OF COMMUNICATION OF INTENTION TO GRANT A PATENT | Free Format Text: | ORIGINAL CODE: EPIDOSNIGR1 | | Event date: | 14.11.2003 | | Event description: | PUBLIC REFERENCE MADE UNDER ARTICLE 153(3) EPC TO A PUBLISHED INTERNATIONAL APPLICATION THAT HAS ENTERED THE EUROPEAN PHASE | Free Format Text: | ORIGINAL CODE: 0009012 | | Event date: | 05.02.2010 | | Event description: | INFORMATION ON THE STATUS OF AN EP PATENT APPLICATION OR GRANTED EP PATENT | Free Format Text: | STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT | | Event date: | 05.02.2010 | | Event description: | NO OPPOSITION FILED WITHIN TIME LIMIT | Free Format Text: | ORIGINAL CODE: 0009261 | |