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EP1465459
European procedure
Extract from the Register of European Patents
EP About this file: EP1465459
| EP1465459 - Heater inspection apparatus and semiconductor manufacturing apparatus having heater inspection apparatus mounted thereon [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 23.03.2007 Database last updated on 02.09.2024 | Most recent event Tooltip | 23.03.2007 | No opposition filed within time limit | published on 25.04.2007 [2007/17] | Applicant(s) | For all designated states Kokusai Electric Semiconductor Service Inc. 2-6-13, Shinmeidai, Hamura-shi Tokyo 205-0023 / JP | [2006/20] |
| Former [2005/05] | For all designated states Kokusai Electric Semiconductor Service Inc. 2-6-13, Shinmeidai, Hamura-shi Tokyo 205-0023 / JP | ||
| Former [2004/41] | For all designated states Kokusai Electric Semiconductor Services Inc. 2-1-9, Shinjuku, Shinjuku-ku Tokyo 160-0022 / JP | Inventor(s) | 01 /
Suzuki, Masayuki Kokusai Elect. Semicond. Srve Inc 2-6-13 Shinmeidai Hamura-shi Tokyo 205-0023 / JP | 02 /
Ishizu, Hideo Kokusai Elect. Semicond. Srve Inc 2-6-13 Shinmeidai Hamura-shi Tokyo 205-0023 / JP | [2005/49] |
| Former [2005/05] | 01 /
Suzuki, Masayuki Kokusai Elect. Semicond. Srve Inc 2-6-13 Shinmeidai Hamura-shi Tokyo 205-0023 / JP | ||
| 02 /
Ishizu, Hideo Kokusai Elec. Semicond. Service Inc 2-1-9 Shinjuku Shinjuku-ku Tokyo 160-0022 / JP | |||
| Former [2004/41] | 01 /
Suzuki, Masayuki Kokusai Elec. Semicond. Service Inc 2-1-9 Shinjuku Shinjuku-ku Tokyo 160-0022 / JP | ||
| 02 /
Ishizu, Hideo Kokusai Elec. Semicond. Service Inc 2-1-9 Shinjuku Shinjuku-ku Tokyo 160-0022 / JP | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE | [N/P] |
| Former [2004/41] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 03021865.5 | 26.09.2003 | [2004/41] | Priority number, date | JP20030097153 | 31.03.2003 Original published format: JP 2003097153 | JP20030097157 | 31.03.2003 Original published format: JP 2003097157 | JP20030322390 | 16.09.2003 Original published format: JP 2003322390 | [2004/41] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1465459 | Date: | 06.10.2004 | Language: | EN | [2004/41] | Type: | B1 Patent specification | No.: | EP1465459 | Date: | 17.05.2006 | Language: | EN | [2006/20] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.07.2004 | Classification | IPC: | H05B1/02, H01L21/00 | [2004/41] | CPC: |
H05B1/0233 (EP,US);
F27D19/00 (EP,US);
F27D21/0014 (EP,US);
H01L21/67248 (EP,US)
| Designated contracting states | DE, IE [2005/26] |
| Former [2004/41] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | Inspektionsapparat für Heizelement und Halbleiterherstellungsvorrichtung versehen mit einem solchen Inspektionsapparat | [2004/41] | English: | Heater inspection apparatus and semiconductor manufacturing apparatus having heater inspection apparatus mounted thereon | [2004/41] | French: | Appareil d'inspection d'éléments chauffants et dispositif por la fabrication de semi-conducteurs avec un appareil d'inpection d'éléments chauffants | [2004/41] | Examination procedure | 26.09.2003 | Examination requested [2004/41] | 03.05.2005 | Despatch of a communication from the examining division (Time limit: M04) | 12.09.2005 | Reply to a communication from the examining division | 08.11.2005 | Communication of intention to grant the patent | 17.03.2006 | Fee for grant paid | 17.03.2006 | Fee for publishing/printing paid | Opposition(s) | 20.02.2007 | No opposition filed within time limit [2007/17] | Fees paid | Renewal fee | 29.09.2005 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US4511791 (DESAI AVINASH J [US], et al) [A] 1-8 * column 5, line 22 - line 50; figure 2 *; | [A]US4978837 (EGGLESTON DEAN E [US]) [A] 1-8 * column 4, line 42 - line 50; figures 1,2 * * column 5, line 14 - line 38 *; | [X]US5280422 (MOE JOHN L [US], et al) [X] 1,2 * column 2, line 30 - column 3, line 58; figures 1,2 *; | [X]US5656190 (AOKI KEIICHIRO [JP]) [X] 1,2 * column 5, line 4 - line 7; figures 2,3 * * column 5, line 34 - column 6, line 5 *; | [A]US5788789 (COOPER KENNETH [US]) [A] 1-8* column 5, line 11 - line 24; figure 2 * |