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EP1408326
European procedure
Extract from the Register of European Patents
EP About this file: EP1408326
| EP1408326 - Surface inspection method and apparatus [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 20.06.2008 Database last updated on 28.06.2024 | Most recent event Tooltip | 20.06.2008 | No opposition filed within time limit | published on 23.07.2008 [2008/30] | Applicant(s) | For all designated states Kabushiki Kaisha TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo 174-8580 / JP | [N/P] |
| Former [2007/33] | For all designated states Kabushiki Kaisha TOPCON 75-1, Hasunuma-cho, Itabashi-ku Tokyo 174-8580 / JP | ||
| Former [2004/16] | For all designated states Kabushiki Kaisha TOPCON 75-1, Hasunuma-cho, Itabashi-ku Tokyo 174-8580 / JP | Inventor(s) | 01 /
Isozaki, Hisashi c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | 02 /
Yamazaki, Michihiro c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | 03 /
Yoshikawa, Hiroshi c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | 04 /
Takase, Takehiro c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | 05 /
Shida, Yutaka c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | 06 /
Iwa, Yoichiro c/o K.K. TOPCON 75-1, Hasunuma-cho Itabashi-ku Tokyo / JP | [2004/16] | Representative(s) | Duhme, Torsten, et al Witte, Weller & Partner Patentanwälte mbB Postfach 10 54 62 70047 Stuttgart / DE | [N/P] |
| Former [2004/16] | Duhme, Torsten, et al Witte, Weller & Partner, Patentanwälte, Postfach 10 54 62 70047 Stuttgart / DE | Application number, filing date | 03022460.4 | 08.10.2003 | [2004/16] | Priority number, date | JP20020295613 | 09.10.2002 Original published format: JP 2002295613 | [2004/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1408326 | Date: | 14.04.2004 | Language: | EN | [2004/16] | Type: | A3 Search report | No.: | EP1408326 | Date: | 16.06.2004 | [2004/25] | Type: | B1 Patent specification | No.: | EP1408326 | Date: | 15.08.2007 | Language: | EN | [2007/33] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.05.2004 | Classification | IPC: | G01N21/95 | [2004/16] | CPC: |
G01N21/9501 (EP,US);
H01L22/00 (KR)
| Designated contracting states | BE, DE, FR [2005/13] |
| Former [2005/10] | BE, DE | ||
| Former [2004/16] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | Verfahren und Vorrichtung zur Untersuchung von Oberflächen | [2004/16] | English: | Surface inspection method and apparatus | [2004/16] | French: | Procédé et dispositif pour l'inspection de surfaces | [2004/16] | Examination procedure | 18.11.2004 | Examination requested [2005/03] | 21.04.2005 | Despatch of a communication from the examining division (Time limit: M08) | 21.10.2005 | Reply to a communication from the examining division | 20.12.2005 | Despatch of a communication from the examining division (Time limit: M06) | 13.06.2006 | Reply to a communication from the examining division | 20.02.2007 | Communication of intention to grant the patent | 27.06.2007 | Fee for grant paid | 27.06.2007 | Fee for publishing/printing paid | Opposition(s) | 16.05.2008 | No opposition filed within time limit [2008/30] | Fees paid | Renewal fee | 22.10.2005 | Renewal fee patent year 03 | 25.10.2006 | Renewal fee patent year 04 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 20.01.2005 | FR M01 Fee paid on 27.01.2005 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]EP0291276 (THERMA WAVE INC [US]) [X] 1-4 * abstract * * column 6, line 24 - line 49 * * column 7, line 52 - line 54 * * column 8, line 38 - line 43 * * column 9, line 12 - line 16 * * figure 1 *; | [A]US5416594 (GROSS KENNETH P [US], et al) [A] 1-4 * column 2, line 38 - line 49 * * column 3, line 50 - line 55 * * column 7, line 6 - line 9 ** figure 1 * | Examination | US4966457 |