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EP1507172
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EP About this file: EP1507172
| EP1507172 - Lithographic apparatus and apparatus adjustment method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.08.2005 Database last updated on 03.09.2024 | Most recent event Tooltip | 12.08.2005 | Application deemed to be withdrawn | published on 28.09.2005 [2005/39] | Applicant(s) | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2005/07] | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | Representative(s) | Prins, Adrianus Willem, et al V.O. Johan de Wittlaan 7 2517 JR Den Haag / NL | [N/P] |
| Former [2005/07] | Prins, Adrianus Willem, Mr. Ir., et al Vereenigde, Nieuwe Parklaan 97 2587 BN Den Haag / NL | Application number, filing date | 03077530.8 | 12.08.2003 | [2005/07] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1507172 | Date: | 16.02.2005 | Language: | EN | [2005/07] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.07.2004 | Classification | IPC: | G03F7/20 | [2005/07] | CPC: |
G03F7/707 (EP,US);
G03F7/20 (KR);
G03F7/70783 (EP,US);
G03F7/70925 (EP,US);
G03F7/70975 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/07] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | Lithographischer Apparat und Verfahren zur Justierung des Apparats | [2005/07] | English: | Lithographic apparatus and apparatus adjustment method | [2005/07] | French: | Appareil lithographique et procédé d'ajustement d'un appareil | [2005/07] | Examination procedure | 15.03.2005 | Application deemed to be withdrawn, date of legal effect [2005/39] | 20.04.2005 | Despatch of communication that the application is deemed to be withdrawn, reason: A.91(5) [2005/39] |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US4213698 (FIRTION VICTOR A [US], et al) [A] 1,8 * abstract * * figures 1-3 * * column 2, line 65 - column 3, line 47 * * column 3, line 62 - column 5, line 53 *; | [A]US5643472 (ENGELSBERG AUDREY C [US], et al) [A] 1,8 * abstract * * table 1 * * figures 1,7 * * column 4, line 29 - line 44 * * column 5, line 49 - column 6, line 44 ** column 26, line 50 - column 27, line 13 *; | [A]EP1229575 (SPEEDFAM CO LTD [JP]) [A] 1,8 * abstract * * figure 1 * * paragraph [0001] * * paragraph [0016] - paragraph [0042] *; | [A]US2002117792 (LEIDY ROBERT K [US], et al) [A] 1,8 * abstract * * figure 3 * * paragraph [0001] - paragraph [0002] * * paragraph [0014] - paragraph [0016] * * paragraph [0021] - paragraph [0024] * * paragraph [0027] - paragraph [0028] * * paragraph [0030] * |