| Designated contracting states | DE | | FR | | GB | | Examination procedure | 31.08.2006 | Fee for publishing/printing paid | Fees paid | Renewal fee | 22.03.2005 | Renewal fee patent year 03 | 29.03.2006 | Renewal fee patent year 04 | 28.03.2007 | Renewal fee patent year 05 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 07.04.2005 | AT M01
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Not yet paid | European patent granted | 04.07.2007 | Opposition procedure | 07.04.2008 | No opposition filed within time limit | published on 11.06.2008 | INPADOC data Tooltip | The EPO does not accept any responsibility for the accuracy of legal status data relating to the post-grant phase, including but not limited to their completeness and fitness for specific purposes, nor can it guarantee that such data are up to date. For authoritative information, please refer to the relevant national patent authority. | Event date: | 15.10.2003 | | Event description: | DESIGNATED CONTRACTING STATES | Kind Code of Ref Document: | A2 | Designated State(s): | AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR | | Event date: | 15.10.2003 | | Event description: | REQUEST FOR EXTENSION OF THE EUROPEAN PATENT | Countries concerned: | AL LT LV MK RO | | Event date: | 01.09.2004 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | 7H 01L 23/10 A | | Event date: | 01.09.2004 | | Event description: | INFORMATION PROVIDED ON IPC CODE ASSIGNED BEFORE GRANT | IPC CLASSIFICATION: | 7H 01L 21/50 B | | Event date: | 01.09.2004 | | Event description: | DESIGNATED CONTRACTING STATES | Kind Code of Ref Document: | A3 | Designated State(s): | AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR | | Event date: | 01.09.2004 | | Event 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