EP1518275 - METHOD FOR PRODUCING A COMPONENT COMPRISING A CONDUCTOR STRUCTURE THAT IS SUITABLE FOR USE AT HIGH FREQUENCIES AND CORRESPONDING COMPONENT [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 11.03.2016 Database last updated on 16.07.2024 | Most recent event Tooltip | 08.12.2017 | Lapse of the patent in a contracting state New state(s): LU | published on 10.01.2018 [2018/02] | Applicant(s) | For all designated states Schott AG Hattenbergstrasse 10 55122 Mainz / DE | [2015/19] |
Former [2005/13] | For all designated states SCHOTT AG Hattenbergstrasse 10 55122 Mainz / DE | Inventor(s) | 01 /
LEIB, Jürgen Philipp-Dirr-Strasse 14 85345 Freising / DE | 02 /
MUND, Dietrich Buchenstrasse 9 84101 Obersüssbach / DE | [2005/13] | Representative(s) | Herden, Andreas F. Blumbach - Zinngrebe Patentanwälte PartG mbB Alexandrastraße 5 65187 Wiesbaden / DE | [N/P] |
Former [2015/19] | Herden, Andreas F. Blumbach - Zinngrebe PatentConsult Patentanwälte Alexandrastrasse 5 65187 Wiesbaden / DE | ||
Former [2005/13] | Herden, Andreas, Dipl.-Ing. Blumbach - Zinngrebe Patentanwälte Alexandrastrasse 5 65187 Wiesbaden / DE | Application number, filing date | 03735449.5 | 23.05.2003 | [2005/13] | WO2003EP05415 | Priority number, date | DE20021022609 | 23.05.2002 Original published format: DE 10222609 | WO2003EP03907 | 15.04.2003 Original published format: PCT/EP0303/907 | [2005/13] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO03100859 | Date: | 04.12.2003 | Language: | DE | [2003/49] | Type: | A2 Application without search report | No.: | EP1518275 | Date: | 30.03.2005 | Language: | DE | The application published by WIPO in one of the EPO official languages on 04.12.2003 takes the place of the publication of the European patent application. | [2005/13] | Type: | B1 Patent specification | No.: | EP1518275 | Date: | 06.05.2015 | Language: | DE | [2015/19] | Search report(s) | International search report - published on: | EP | 20.01.2005 | Classification | IPC: | H01L23/66, H01L21/768 | [2015/01] | CPC: |
C03B19/00 (EP,US);
C03C14/006 (EP,US);
C03C15/00 (EP,US);
C03C17/02 (EP,US);
C03C17/34 (EP,US);
C03C3/083 (EP,US);
C03C3/089 (EP,US);
C03C4/12 (EP,US);
C23C14/10 (EP,US);
H01L21/02129 (EP,US);
H01L21/02145 (EP,US);
H01L21/02161 (EP,US);
H01L21/02263 (EP,US);
H01L21/31616 (US);
H01L21/31625 (US);
H01L21/50 (EP,US);
H01L21/56 (EP,US);
H01L21/76801 (US);
H01L21/76802 (US);
H01L21/76885 (US);
H01L23/10 (EP,US);
H01L23/291 (EP,US);
H01L23/3114 (EP,US);
H01L23/481 (EP,US);
H01L23/5329 (EP);
H01L23/66 (EP,US);
H01L24/97 (EP,US);
H01P11/003 (EP,US);
H01P3/003 (EP,US);
H05K3/467 (EP,US);
H10K50/84 (US);
C03C2214/16 (EP,US);
C03C2217/21 (EP,US);
C03C2217/77 (EP,US);
C03C2218/15 (EP,US);
C03C2218/32 (EP,US);
C03C2218/328 (EP,US);
C03C2218/33 (EP,US);
C03C2218/355 (EP,US);
H01L2223/6627 (EP,US);
H01L2224/97 (EP,US);
H01L23/49894 (EP,US);
H01L2924/01005 (EP,US);
H01L2924/01006 (EP,US);
H01L2924/0101 (EP,US);
H01L2924/01011 (EP,US);
H01L2924/01013 (EP,US);
H01L2924/01015 (EP,US);
H01L2924/01019 (EP,US);
H01L2924/01027 (EP,US);
H01L2924/01033 (EP,US);
H01L2924/01038 (EP,US);
H01L2924/01047 (EP,US);
H01L2924/01058 (EP,US);
H01L2924/0106 (EP,US);
H01L2924/01061 (EP,US);
H01L2924/01068 (EP,US);
H01L2924/01072 (EP,US);
H01L2924/01078 (EP,US);
H01L2924/01082 (EP,US);
H01L2924/04953 (EP,US);
H01L2924/09701 (EP,US);
H01L2924/10329 (EP,US);
H01L2924/12041 (EP,US);
H01L2924/12044 (EP,US);
H01L2924/14 (EP,US);
H01L2924/15311 (EP,US);
H01L2924/1903 (EP,US);
H01L2924/19033 (EP,US);
H01L2924/19041 (EP,US);
H01L2924/19042 (EP,US);
H01L2924/19043 (EP,US);
H01L2924/351 (EP,US);
H05K2201/0179 (EP,US);
H05K3/28 (EP,US);
| C-Set: |
H01L2224/97, H01L2924/15311 (EP,US);
H01L2924/14, H01L2924/00 (US,EP);
H01L2924/351, H01L2924/00 (US,EP)
|
Former IPC [2005/13] | H01L23/66 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2015/19] |
Former [2005/13] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES BAUELEMENTS MIT HOCHFREQUENZTAUGLICHER LEITERANORNDNUNG UND ENTSPRECHENDES BAUELEMENT | [2005/13] | English: | METHOD FOR PRODUCING A COMPONENT COMPRISING A CONDUCTOR STRUCTURE THAT IS SUITABLE FOR USE AT HIGH FREQUENCIES AND CORRESPONDING COMPONENT | [2005/13] | French: | PROCEDE DE PRODUCTION D'UN DISPOSITIF COMPRENANT UN ENSEMBLE DE CONDUCTEURS ADAPTES AUX HAUTES FREQUENCES ET DISPOSITIF CORRESPONDANT | [2005/13] | Entry into regional phase | 03.11.2004 | National basic fee paid | 03.11.2004 | Designation fee(s) paid | 03.11.2004 | Examination fee paid | Examination procedure | 08.10.2003 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 03.11.2004 | Examination requested [2005/13] | 16.01.2006 | Despatch of a communication from the examining division (Time limit: M04) | 16.05.2006 | Reply to a communication from the examining division | 11.09.2008 | Despatch of a communication from the examining division (Time limit: M04) | 11.09.2008 | Invitation to provide information on prior art | 06.11.2008 | Reply to the invitation to provide information on prior art | 06.01.2009 | Reply to a communication from the examining division | 28.09.2010 | Despatch of a communication from the examining division (Time limit: M06) | 08.03.2011 | Reply to a communication from the examining division | 16.08.2012 | Despatch of a communication from the examining division (Time limit: M04) | 07.12.2012 | Reply to a communication from the examining division | 19.11.2014 | Cancellation of oral proceeding that was planned for 21.11.2014 | 21.11.2014 | Date of oral proceedings (cancelled) | 23.12.2014 | Communication of intention to grant the patent | 25.03.2015 | Fee for grant paid | 25.03.2015 | Fee for publishing/printing paid | 25.03.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 16.01.2006 | Opposition(s) | 09.02.2016 | No opposition filed within time limit [2016/15] | Fees paid | Renewal fee | 13.05.2005 | Renewal fee patent year 03 | 12.05.2006 | Renewal fee patent year 04 | 14.05.2007 | Renewal fee patent year 05 | 13.05.2008 | Renewal fee patent year 06 | 25.05.2009 | Renewal fee patent year 07 | 28.05.2010 | Renewal fee patent year 08 | 24.05.2011 | Renewal fee patent year 09 | 22.05.2012 | Renewal fee patent year 10 | 27.05.2013 | Renewal fee patent year 11 | 27.03.2014 | Renewal fee patent year 12 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 23.05.2003 | CY | 06.05.2015 | CZ | 06.05.2015 | DK | 06.05.2015 | EE | 06.05.2015 | ES | 06.05.2015 | FI | 06.05.2015 | IT | 06.05.2015 | MC | 06.05.2015 | NL | 06.05.2015 | RO | 06.05.2015 | SE | 06.05.2015 | SI | 06.05.2015 | SK | 06.05.2015 | TR | 06.05.2015 | AT | 23.05.2015 | IE | 23.05.2015 | LU | 23.05.2015 | BE | 31.05.2015 | CH | 31.05.2015 | LI | 31.05.2015 | BG | 06.08.2015 | GB | 06.08.2015 | GR | 07.08.2015 | PT | 07.09.2015 | [2018/02] |
Former [2017/40] | HU | 23.05.2003 | |
CY | 06.05.2015 | ||
CZ | 06.05.2015 | ||
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
NL | 06.05.2015 | ||
RO | 06.05.2015 | ||
SE | 06.05.2015 | ||
SI | 06.05.2015 | ||
SK | 06.05.2015 | ||
TR | 06.05.2015 | ||
AT | 23.05.2015 | ||
IE | 23.05.2015 | ||
BE | 31.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GB | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/36] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
RO | 06.05.2015 | ||
SI | 06.05.2015 | ||
SK | 06.05.2015 | ||
AT | 23.05.2015 | ||
IE | 23.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GB | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/34] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
RO | 06.05.2015 | ||
SI | 06.05.2015 | ||
SK | 06.05.2015 | ||
IE | 23.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GB | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/24] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
RO | 06.05.2015 | ||
SI | 06.05.2015 | ||
SK | 06.05.2015 | ||
IE | 23.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/20] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
RO | 06.05.2015 | ||
SK | 06.05.2015 | ||
IE | 23.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/13] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
MC | 06.05.2015 | ||
RO | 06.05.2015 | ||
SK | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/10] | CZ | 06.05.2015 | |
DK | 06.05.2015 | ||
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
RO | 06.05.2015 | ||
SK | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/09] | DK | 06.05.2015 | |
EE | 06.05.2015 | ||
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/08] | DK | 06.05.2015 | |
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
IT | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/07] | DK | 06.05.2015 | |
ES | 06.05.2015 | ||
FI | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2016/06] | ES | 06.05.2015 | |
FI | 06.05.2015 | ||
CH | 31.05.2015 | ||
LI | 31.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2015/50] | ES | 06.05.2015 | |
FI | 06.05.2015 | ||
BG | 06.08.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | ||
Former [2015/49] | ES | 06.05.2015 | |
FI | 06.05.2015 | ||
GR | 07.08.2015 | ||
PT | 07.09.2015 | Cited in | International search | [Y]US4564997 (MATSUO SEITARO [JP], et al) [Y] 1-23,28,33 * column 5, line 55 - column 9, line 10; figures 6,7 * * column 18, line 28 - line 53 * * column 2, line 40 - line 43 *; | [XY]US5929510 (GELLER BERNARD DOV [US], et al) [X] 24-27,29,30,32 * column 1, line 52 - column 5, line 28; figures 1,3 * [Y] 1-23,28,31,33,34; | [Y]DE10042653 (BOSCH GMBH ROBERT [DE]) [Y] 16,17,31,34* column 1, line 22 - column 2, line 27; figure 1 * | Examination | US3417393 | US4492717 | US5710082 | DE19846691 | EP1168609 | - "Dünnschichttechnologie", DE.WIKIPEDIA.ORG, URL: http://de.wikipedia.org/wiki/D%C3%BCnnschichttechnologie | - SASSEN S ET AL, "Anodic bonding of evaporated glass structured with lift-off technology for hermetical sealing", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH LNKD- DOI:10.1016/S0924-4247(00)00300-9, (20000501), vol. 83, no. 1-3, ISSN 0924-4247, pages 150 - 155, XP004198307 DOI: http://dx.doi.org/10.1016/S0924-4247(00)00300-9 | - BHATTACHARYYA A. ET AL., "Lift-Off Insulator Process", IBM TECHNICAL DISCLOSURE BULLETIN, New York, US, (197902), vol. 21, no. 9, pages 3577 - 3578 | by applicant | US3417393 | US4492717 | US4564997 | US5710082 | US5929510 | DE19846691 | EP1168609 | DE10042653 | WO03100846 |