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Extract from the Register of European Patents

EP About this file: EP1484429

EP1484429 - SEMICONDUCTOR OR LIQUID CRYSTAL PRODUCING DEVICE [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  20.03.2009
Database last updated on 14.09.2024
Most recent event   Tooltip20.11.2009Change - representativepublished on 23.12.2009  [2009/52]
Applicant(s)For all designated states
Sumitomo Electric Industries, Ltd.
5-33 Kitahama 4-chome, Chuo-ku
Osaka-shi, Osaka 541-0041 / JP
[N/P]
Former [2004/50]For all designated states
SUMITOMO ELECTRIC INDUSTRIES, Ltd
5-33 Kitahama 4-chome, Chuo-ku
Osaka-shi, Osaka 541-0041 / JP
Inventor(s)01 / KUIBIRA, A, Itami Works Sumitomo Elec. Indus Ltd
1-1, Koyakita 1-chome
Itami-shi, Hyogo 664-0016 / JP
02 / NATSUHARA, M, Itami Works Sumitomo Elec. Indus Ltd
1-1, Koyakita 1-chome
Itami-shi, Hyogo 664-0016 / JP
03 / NAKATA, H, Itami Works Sumitomo Elec. Indus Ltd
1-1, Koyakita 1-chome
Itami-shi, Hyogo 664-0016 / JP
 [2004/50]
Representative(s)Cross, Rupert Edward Blount, et al
Boult Wade Tennant
Verulam Gardens
70 Gray's Inn Road
London WC1X 8BT / GB
[N/P]
Former [2009/52]Cross, Rupert Edward Blount, et al
Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT / GB
Former [2004/50]Cross, Rupert Edward Blount, et al
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT / GB
Application number, filing date03743036.026.02.2003
[2004/50]
WO2003JP02138
Priority number, dateJP2002005062927.02.2002         Original published format: JP 2002050629
[2004/50]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO03072850
Date:04.09.2003
Language:EN
[2003/36]
Type: A1 Application with search report 
No.:EP1484429
Date:08.12.2004
Language:EN
The application published by WIPO in one of the EPO official languages on 04.09.2003 takes the place of the publication of the European patent application.
[2004/50]
Search report(s)International search report - published on:JP04.09.2003
ClassificationIPC:C23C16/458, H01L21/31, H01L21/3065, H01L21/285
[2004/50]
CPC:
C23C16/45521 (EP,US); C23C16/4412 (EP,KR,US); C23C16/4581 (EP,KR,US);
C23C16/4586 (EP,KR,US); G02F1/1303 (KR); H01L21/68792 (EP,KR,US)
Designated contracting statesDE,   FR,   GB,   IT,   NL,   SE [2004/50]
TitleGerman:VORRICHTUNG ZUR HERSTELLUNG VON HALBLEITERN ODER FLÜSSIGKRISTALLEN[2004/50]
English:SEMICONDUCTOR OR LIQUID CRYSTAL PRODUCING DEVICE[2004/50]
French:DISPOSITIF DE PRODUCTION DE SEMI-CONDUCTEURS OU DE CRISTAUX LIQUIDES[2004/50]
Entry into regional phase15.12.2003Translation filed 
15.12.2003National basic fee paid 
15.12.2003Search fee paid 
15.12.2003Designation fee(s) paid 
15.12.2003Examination fee paid 
Examination procedure15.12.2003Examination requested  [2004/50]
17.03.2009Application withdrawn by applicant  [2009/17]
Fees paidRenewal fee
14.02.2005Renewal fee patent year 03
14.02.2006Renewal fee patent year 04
21.02.2007Renewal fee patent year 05
22.02.2008Renewal fee patent year 06
23.02.2009Renewal fee patent year 07
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Cited inInternational search[Y]JPH0334540  (MITSUBISHI ELECTRIC CORP);
 [Y]EP0628644  (APPLIED MATERIALS INC [US]);
 [X]US5462603  (MURAKAMI SEISHI [JP])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.