EP1532661 - DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.04.2010 Database last updated on 13.07.2024 | Most recent event Tooltip | 07.10.2011 | Lapse of the patent in a contracting state New state(s): CY, TR | published on 09.11.2011 [2011/45] | Applicant(s) | For all designated states SEZ AG SEZ-Strasse 1 9500 Villach / AT | [2007/10] |
Former [2005/21] | For all designated states SEZ AG Draubodenweg 29 9500 Villach / AT | Inventor(s) | 01 /
HOHENWARTER, Karl-Heinz Leifling 1 A-9635 Dellach/Gail / AT | [2005/21] | Representative(s) | Kontrus, Gerhard SEZ-Strasse 1 9500 Villach / AT | [2007/10] |
Former [2005/21] | Kontrus, Gerhard SEZ AG Draubodenweg 29 9500 Villach / AT | Application number, filing date | 03760646.4 | 18.06.2003 | [2005/21] | WO2003EP06441 | Priority number, date | AT20020000954 | 25.06.2002 Original published format: AT 9542002 | [2005/21] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2004001812 | Date: | 31.12.2003 | Language: | EN | [2004/01] | Type: | A1 Application with search report | No.: | EP1532661 | Date: | 25.05.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.12.2003 takes the place of the publication of the European patent application. | [2005/21] | Type: | B1 Patent specification | No.: | EP1532661 | Date: | 27.05.2009 | Language: | EN | [2009/22] | Search report(s) | International search report - published on: | EP | 31.12.2003 | Classification | IPC: | H01L21/00 | [2005/21] | CPC: |
H01L21/67028 (EP,US);
H01L21/02 (KR);
H01L21/67023 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/21] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | VORRICHTUNG ZURBEHANDLUNG VON SCHEIBENFÖRMIGEN OBJEKTEN MIT FLÜSSIGKEITEN | [2005/21] | English: | DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS | [2005/21] | French: | DISPOSITIF DE TRAITEMENT LIQUIDE D'OBJETS EN FORME DE DISQUE | [2005/21] | Entry into regional phase | 25.01.2005 | National basic fee paid | 25.01.2005 | Designation fee(s) paid | 25.01.2005 | Examination fee paid | Examination procedure | 17.01.2004 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 25.01.2005 | Examination requested [2005/21] | 09.10.2006 | Despatch of a communication from the examining division (Time limit: M04) | 05.02.2007 | Reply to a communication from the examining division | 07.09.2007 | Despatch of a communication from the examining division (Time limit: M04) | 13.09.2007 | Reply to a communication from the examining division | 23.12.2008 | Communication of intention to grant the patent | 02.04.2009 | Fee for grant paid | 02.04.2009 | Fee for publishing/printing paid | Opposition(s) | 02.03.2010 | No opposition filed within time limit [2010/18] | Fees paid | Renewal fee | 30.06.2005 | Renewal fee patent year 03 | 30.06.2006 | Renewal fee patent year 04 | 02.07.2007 | Renewal fee patent year 05 | 30.06.2008 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 27.05.2009 | BE | 27.05.2009 | CY | 27.05.2009 | CZ | 27.05.2009 | DK | 27.05.2009 | EE | 27.05.2009 | FI | 27.05.2009 | IT | 27.05.2009 | NL | 27.05.2009 | RO | 27.05.2009 | SI | 27.05.2009 | SK | 27.05.2009 | TR | 27.05.2009 | IE | 18.06.2009 | LU | 18.06.2009 | CH | 30.06.2009 | LI | 30.06.2009 | MC | 30.06.2009 | BG | 27.08.2009 | SE | 27.08.2009 | GR | 28.08.2009 | ES | 07.09.2009 | PT | 27.09.2009 | HU | 28.11.2009 | [2011/44] |
Former [2011/31] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
IT | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
IE | 18.06.2009 | ||
LU | 18.06.2009 | ||
CH | 30.06.2009 | ||
LI | 30.06.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
GR | 28.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
HU | 28.11.2009 | ||
Former [2011/21] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
IT | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
IE | 18.06.2009 | ||
LU | 18.06.2009 | ||
CH | 30.06.2009 | ||
LI | 30.06.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
GR | 28.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2011/14] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
IT | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
IE | 18.06.2009 | ||
CH | 30.06.2009 | ||
LI | 30.06.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
GR | 28.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/48] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
IE | 18.06.2009 | ||
CH | 30.06.2009 | ||
LI | 30.06.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
GR | 28.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/21] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
IE | 18.06.2009 | ||
CH | 30.06.2009 | ||
LI | 30.06.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/18] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
MC | 30.06.2009 | ||
BG | 27.08.2009 | ||
SE | 27.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/10] | AT | 27.05.2009 | |
BE | 27.05.2009 | ||
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
SK | 27.05.2009 | ||
MC | 30.06.2009 | ||
SE | 27.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/09] | AT | 27.05.2009 | |
CZ | 27.05.2009 | ||
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
RO | 27.05.2009 | ||
SI | 27.05.2009 | ||
MC | 30.06.2009 | ||
SE | 27.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/08] | AT | 27.05.2009 | |
DK | 27.05.2009 | ||
EE | 27.05.2009 | ||
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
SI | 27.05.2009 | ||
MC | 30.06.2009 | ||
SE | 27.08.2009 | ||
ES | 07.09.2009 | ||
PT | 27.09.2009 | ||
Former [2010/07] | AT | 27.05.2009 | |
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
SI | 27.05.2009 | ||
MC | 30.06.2009 | ||
SE | 27.08.2009 | ||
PT | 27.09.2009 | ||
Former [2009/51] | AT | 27.05.2009 | |
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
SI | 27.05.2009 | ||
SE | 27.08.2009 | ||
PT | 27.09.2009 | ||
Former [2009/50] | AT | 27.05.2009 | |
FI | 27.05.2009 | ||
NL | 27.05.2009 | ||
PT | 27.09.2009 | Cited in | International search | [D]US4903717 (SUMNITSCH FRANZ [AT]); | [A]EP0444714 (SEZ SEMICONDUCT EQUIP ZUBEHOER [AT]) [A] 1-13 * abstract *; | [X]US6027602 (HUNG CHING-CHANG ALEX [SG], et al) [X] 1-13 * abstract * * column 3, line 29 - line 64 * * column 4, line 33 - line 63 * * column 5, line 17 - line 37 *; | [X]US6220771 (TUNG FU-CHING [TW], et al) [X] 1-13 * column 3, line 26 - line 34; figures 3,4 * * abstract * * column 3, line 40 - line 60 * | Examination | US5211753 | US5906860 |