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EP1502289

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Extract from the Register of European Patents

EP About this file: EP1502289

EP1502289 - INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 18.04.2014 Database last updated on 21.09.2024
Most recent event Tooltip	18.04.2014	Application deemed to be withdrawn	published on 21.05.2014 [2014/21]
Applicant(s)	For all designated states ADVANCED TECHNOLOGY MATERIALS, INC. 7 Commerce Drive Danbury, CT 06810 / US
	[2005/05]
Inventor(s)	01 / ARNO, Jose 13 Twilight Lane Brookfield, CT 06804 / US
	[2005/05]
Representative(s)	Schüssler, Andrea Kanzlei Huber & Schüssler Truderinger Strasse 246 81825 München / DE
	[N/P]
Former [2005/05]	Schüssler, Andrea, Dr. Kanzlei Huber & Schüssler Truderinger Strasse 246 81825 München / DE
Application number, filing date	03765426.6	05.05.2003
	[2005/05]
	WO2003US13937
Priority number, date	US20020140848	08.05.2002 Original published format: US 140848
	[2005/05]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO2004010462
	Date:	29.01.2004
	Language:	EN
	[2004/05]
	Type:	A2 Application without search report
	No.:	EP1502289
	Date:	02.02.2005
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 29.01.2004 takes the place of the publication of the European patent application.
	[2005/05]
Search report(s)	International search report - published on:	US	25.11.2004
	(Supplementary) European search report - dispatched on:	EP	22.12.2009
Classification	IPC:	G01N21/35, H01L21/66, G01J3/42	[2010/02]
	CPC:	G01N21/3504 (EP,US); H01L22/00 (KR); G01J5/0014 (EP,US); G01J5/12 (EP,US); H01L21/67253 (EP,US); G01J5/0007 (EP,US); (+) G01J5/025 (EP,US); Y10T483/16 (EP) (-)
	Former IPC [2005/05]	H01L21/00
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/05]
Extension states	AL	Not yet paid
	LT	Not yet paid
	LV	Not yet paid
	MK	Not yet paid
Title	German:	INFRAROT-THERMOPILE-DETEKTORSYSTEM FÜR DIE HALBLEITERPROZESSÜBERWACHUNG UND -REGELUNG	[2005/05]
	English:	INFRARED THERMOPILE DETECTOR SYSTEM FOR SEMICONDUCTOR PROCESS MONITORING AND CONTROL	[2005/05]
	French:	SYSTEME CAPTEUR INFRAROUGE A THERMOPILES POUR LE CONTROLE ET LA REGULATION DE PROCESSUS FAISANT INTERVENIR DES SEMI-CONDUCTEURS	[2005/05]
Entry into regional phase	09.11.2004	National basic fee paid
	09.11.2004	Search fee paid
	09.11.2004	Designation fee(s) paid
	09.11.2004	Examination fee paid
Examination procedure	04.12.2003	Request for preliminary examination filed International Preliminary Examining Authority: US
	09.11.2004	Examination requested [2005/05]
	20.01.2011	Despatch of a communication from the examining division (Time limit: M06)
	22.07.2011	Reply to a communication from the examining division
	03.12.2013	Application deemed to be withdrawn, date of legal effect [2014/21]
	13.01.2014	Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2014/21]
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 20.01.2011
Fees paid	Renewal fee
	27.05.2005	Renewal fee patent year 03
	31.05.2006	Renewal fee patent year 04
	31.05.2007	Renewal fee patent year 05
	28.03.2008	Renewal fee patent year 06
	25.05.2009	Renewal fee patent year 07
	28.05.2010	Renewal fee patent year 08
	24.05.2011	Renewal fee patent year 09
	29.03.2012	Renewal fee patent year 10
	Penalty fee
	Additional fee for renewal fee
	31.05.2013	11 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]US5100479 (WISE KENSALL D [US], et al) [Y] 1-40 * column 1, line 14 - line 22 * * column 3, line 5 - line 11 * * figure 1 *;
		[A]US5716428 (IMAMURA HIROSHI [JP]) [A] 1-40* column 3, line 29 - line 64 *;
		[Y]EP1195450 (AIR LIQUIDE [FR]) [Y] 1-40 * paragraph [0010] - paragraph [0014] * * paragraph [0050] - paragraph [0054] *;
		[XI]US6370950 (LAMMERINK THEODORUS SIMON JOSE [NL]) [X] 30 * claims 1-3,11,14 * [I] 1-29,31-40;
		[XI] - Schilz Jürgen, "Applications of thermoelectric infrared sensors (Thermopiles): Gas detection by infrared absorption", (20000822), pages 1 - 11, URL: http://optoelectronics.perkinelmer.com/content/applicationnotes/app_gasdetection.pdf, (20091210), XP002559531 [X] 1 * paragraphs [02.1] , [ 2.2]; figure 1 * * paragraphs [03.5] , [ 4.1] * [I] 2-40
	International search	[A]US6348650 (ENDO HARUYUKI [JP], et al);
		[A]US5834777 (WONG JACOB Y [US]);
		[A]US6469303 (SUN HONG T [US], et al);
		[A]US4935345 (GUILBEAU ERIC J [US], et al);
		[A]US5589689 (KOSKINEN YRJOE [FI]);
		[A]US5047352 (STETTER JOSEPH R [US], et al);
		[A]US5650624 (WONG JACOB Y [US]);
		[A]US5721430 (WONG JACOB Y [US])
	by applicant	US6370950
		- JURGEN SCHILZ, Applications of Thermoelectric Infrared Sensors (Thermopiles): Gas Detection by Infrared Absorption; NDIR, PERKINELMER OPTOELECTRONICS GMBH, (20000822), pages 1 - 11

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