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EP1570522

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EP About this file: EP1570522

EP1570522 - SELF ALIGNED SHALLOW TRENCH ISOLATION WITH IMPROVED COUPLING COEFFICIENT IN FLOATING GATE DEVICES [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 18.10.2013 Database last updated on 02.11.2024
Most recent event Tooltip	17.07.2015	Lapse of the patent in a contracting state New state(s): HU	published on 19.08.2015 [2015/34]
Applicant(s)	For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL
	[2007/31]
Former [2005/36]	For all designated states Koninklijke Philips Electronics, N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL
Inventor(s)	01 / VAN SCHAIJK, Robertus, T., F. c/o Prof . Holstlaan 6 NL-5656 AA Eindhoven / NL
	02 / VAN DUUREN, Michiel, J. c/o Prof . Holstlaan 6 NL-5656 AA Eindhoven / NL
	[2005/36]
Representative(s)	Schouten, Marcus Maria, et al NXP B.V. Intellectual Property & Licensing High Tech Campus 60 5656 AG Eindhoven / NL
	[N/P]
Former [2012/50]	Schouten, Marcus Maria, et al NXP B.V. IP & Licensing Department High Tech Campus 60 5656 AG Eindhoven / NL
Former [2009/44]	Schouten, Marcus Maria, et al NXP B.V. IP & L Department High Tech Campus 32 5656 AE Eindhoven / NL
Former [2008/14]	van der Veer, Johannis Leendert, et al NXP Semiconductors Intellectual Property Department High Tech Campus 60 5656 AG Eindhoven / NL
Former [2007/01]	Pennings, Johannes, et al NXP Semiconductors Intellectual Property Department High Tech Campus 60 5656 AG Eindhoven / NL
Former [2005/36]	Eleveld, Koop Jan Philips Intellectual Property & Standards, P.O. Box 220 5600 AE Eindhoven / NL
Application number, filing date	03769739.8	31.10.2003
	[2005/36]
	WO2003IB04949
Priority number, date	EP20020080070	06.12.2002 Original published format: EP 02080070
	[2005/36]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO2004053992
	Date:	24.06.2004
	Language:	EN
	[2004/26]
	Type:	A2 Application without search report
	No.:	EP1570522
	Date:	07.09.2005
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 24.06.2004 takes the place of the publication of the European patent application.
	[2005/36]
	Type:	B1 Patent specification
	No.:	EP1570522
	Date:	12.12.2012
	Language:	EN
	[2012/50]
Search report(s)	International search report - published on:	EP	26.08.2004
Classification	IPC:	H01L27/115, H01L21/8247	[2005/36]
	CPC:	H10B69/00 (EP,US); H10B41/30 (EP,KR,US); H01L21/76838 (KR)
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/36]
Title	German:	SELBSTAUSGERICHTETE SEICHTE GRABENISOLATION MIT VERBESSERTEM KOPPELKOEFFIZIENTEN IN FLOATING-GATE-BAUELEMENTEN	[2005/36]
	English:	SELF ALIGNED SHALLOW TRENCH ISOLATION WITH IMPROVED COUPLING COEFFICIENT IN FLOATING GATE DEVICES	[2005/36]
	French:	ISOLEMENT DE TRANCHEES PEU PROFONDES A AUTOALIGNEMENT PRESENTANT UN COEFFICIENT DE COUPLAGE AMELIORE DANS DES DISPOSITIFS A GRILLE FLOTTANTE	[2005/36]
Entry into regional phase	06.07.2005	National basic fee paid
	06.07.2005	Designation fee(s) paid
	06.07.2005	Examination fee paid
Examination procedure	06.07.2005	Examination requested [2005/36]
	06.07.2009	Despatch of a communication from the examining division (Time limit: M04)
	04.11.2009	Reply to a communication from the examining division
	02.11.2010	Despatch of a communication from the examining division (Time limit: M04)
	07.02.2011	Reply to a communication from the examining division
	19.06.2012	Communication of intention to grant the patent
	15.10.2012	Fee for grant paid
	15.10.2012	Fee for publishing/printing paid
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 06.07.2009
Opposition(s)	13.09.2013	No opposition filed within time limit [2013/47]
Fees paid	Renewal fee
	31.10.2005	Renewal fee patent year 03
	31.10.2006	Renewal fee patent year 04
	31.10.2007	Renewal fee patent year 05
	31.10.2008	Renewal fee patent year 06
	02.11.2009	Renewal fee patent year 07
	02.11.2010	Renewal fee patent year 08
	31.10.2011	Renewal fee patent year 09
	31.10.2012	Renewal fee patent year 10
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	31.10.2003
	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	DK	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	IT	12.12.2012
	MC	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	TR	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
	[2015/34]
Former [2015/32]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	DK	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	IT	12.12.2012
	MC	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	TR	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
Former [2014/25]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	DK	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	IT	12.12.2012
	MC	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
Former [2014/03]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	DK	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	IT	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
Former [2013/48]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	DK	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
Former [2013/40]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
	PT	12.04.2013
Former [2013/37]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	NL	12.12.2012
	RO	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
Former [2013/36]	AT	12.12.2012
	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
Former [2013/35]	BE	12.12.2012
	CY	12.12.2012
	CZ	12.12.2012
	EE	12.12.2012
	FI	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	SK	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
Former [2013/34]	BE	12.12.2012
	FI	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	BG	12.03.2013
	GR	13.03.2013
	ES	23.03.2013
Former [2013/33]	BE	12.12.2012
	FI	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	GR	13.03.2013
	ES	23.03.2013
Former [2013/26]	FI	12.12.2012
	SE	12.12.2012
	SI	12.12.2012
	GR	13.03.2013
	ES	23.03.2013
Former [2013/24]	FI	12.12.2012
	SE	12.12.2012
	GR	13.03.2013
	ES	23.03.2013
Former [2013/22]	FI	12.12.2012
	SE	12.12.2012
	ES	23.03.2013
Former [2013/21]	SE	12.12.2012
Cited in	International search	[X]US6222225 (NAKAMURA TAKUYA [JP], et al);
		[X]US6391722 (KOH CHAO-MING [TW]);
		[X]US2002093073 (MORI SEIICHI [JP], et al)
	by applicant	US6391722
		US6403421

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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