EP1593151 - TRENCH ISOLATION STRUCTURE, SEMICONDUCTOR ASSEMBLY COMPRISING SUCH A TRENCH ISOLATION, AND METHOD FOR FORMING SUCH A TRENCH ISOLATION [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.08.2013 Database last updated on 02.11.2024 | Most recent event Tooltip | 18.07.2014 | Lapse of the patent in a contracting state New state(s): HU | published on 20.08.2014 [2014/34] | Applicant(s) | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | [2007/31] |
Former [2005/45] | For all designated states Koninklijke Philips Electronics, N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | Inventor(s) | 01 /
KLOOTWIJK, Johan, H. c/o Prof . Holstlaan 6 NL-5656 AA Eindhoven / NL | [2005/45] | Representative(s) | Williamson, Paul Lewis, et al NXP Semiconductors Intellectual Property and Licensing Red Central 60 High Street, Redhill Surrey RH1 1NY / GB | [N/P] |
Former [2012/39] | Williamson, Paul Lewis, et al NXP Semiconductors Intellectual Property and Licensing Red Central 60 High Street, Redhill Surrey RH1 1NY / GB | ||
Former [2009/09] | Williamson, Paul Lewis, et al NXP Semiconductors UK Ltd. Intellectual Property Department Betchworth House Station Road Redhill Surrey RH1 1DL / GB | ||
Former [2007/01] | White, Andrew Gordon, et al NXP Semiconductors Intellectual Property Department Cross Oak Lane Redhill, Surrey RH1 5HA / GB | ||
Former [2005/45] | Eleveld, Koop Jan Philips Intellectual Property & Standards, P.O. Box 220 5600 AE Eindhoven / NL | Application number, filing date | 03780529.8 | 16.12.2003 | [2005/45] | WO2003IB06321 | Priority number, date | EP20030100207 | 31.01.2003 Original published format: EP 03100207 | [2005/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2004068575 | Date: | 12.08.2004 | Language: | EN | [2004/33] | Type: | A1 Application with search report | No.: | EP1593151 | Date: | 09.11.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.08.2004 takes the place of the publication of the European patent application. | [2005/45] | Type: | B1 Patent specification | No.: | EP1593151 | Date: | 26.09.2012 | Language: | EN | [2012/39] | Search report(s) | International search report - published on: | EP | 12.08.2004 | Classification | IPC: | H01L21/762 | [2005/45] | CPC: |
H01L21/76 (KR);
H01L21/76264 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/45] | Title | German: | ISOLATIONSGRABENSTRUKTUR, HABLEITERANORDNUNG MIT SOLCHER ISOLATIONSGRABENSTRUKTUR, UND VERFAHREN ZUR HERSTELLUNG DERSELBEN | [2005/45] | English: | TRENCH ISOLATION STRUCTURE, SEMICONDUCTOR ASSEMBLY COMPRISING SUCH A TRENCH ISOLATION, AND METHOD FOR FORMING SUCH A TRENCH ISOLATION | [2005/45] | French: | STRUCTURE D'ISOLATION DE TRANCHEE, ENSEMBLE A SEMI-CONDUCTEUR CONTENANT UNE TELLE ISOLATION DE TRANCHEE, ET PROCEDE PERMETTANT DE FORMER UNE TELLE ISOLATION DE TRANCHEE | [2005/45] | Entry into regional phase | 31.08.2005 | National basic fee paid | 31.08.2005 | Designation fee(s) paid | 31.08.2005 | Examination fee paid | Examination procedure | 31.08.2005 | Examination requested [2005/45] | 25.05.2007 | Despatch of a communication from the examining division (Time limit: M04) | 05.10.2007 | Reply to a communication from the examining division | 11.12.2009 | Despatch of a communication from the examining division (Time limit: M04) | 13.04.2010 | Reply to a communication from the examining division | 14.05.2012 | Communication of intention to grant the patent | 01.08.2012 | Fee for grant paid | 01.08.2012 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 25.05.2007 | Opposition(s) | 27.06.2013 | No opposition filed within time limit [2013/36] | Request for further processing for: | 05.10.2007 | Request for further processing filed | 05.10.2007 | Full payment received (date of receipt of payment) Request granted | 12.10.2007 | Decision despatched | Fees paid | Renewal fee | 02.01.2006 | Renewal fee patent year 03 | 02.01.2007 | Renewal fee patent year 04 | 02.01.2008 | Renewal fee patent year 05 | 05.01.2009 | Renewal fee patent year 06 | 04.01.2010 | Renewal fee patent year 07 | 03.01.2011 | Renewal fee patent year 08 | 02.01.2012 | Renewal fee patent year 09 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 16.12.2003 | AT | 26.09.2012 | BE | 26.09.2012 | CY | 26.09.2012 | CZ | 26.09.2012 | DK | 26.09.2012 | EE | 26.09.2012 | FI | 26.09.2012 | IT | 26.09.2012 | NL | 26.09.2012 | RO | 26.09.2012 | SE | 26.09.2012 | SI | 26.09.2012 | SK | 26.09.2012 | TR | 26.09.2012 | IE | 16.12.2012 | LU | 16.12.2012 | BG | 26.12.2012 | GR | 27.12.2012 | CH | 31.12.2012 | LI | 31.12.2012 | MC | 31.12.2012 | ES | 06.01.2013 | PT | 28.01.2013 | [2014/34] |
Former [2014/27] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
IT | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
TR | 26.09.2012 | ||
IE | 16.12.2012 | ||
LU | 16.12.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
CH | 31.12.2012 | ||
LI | 31.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2014/21] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
IT | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
TR | 26.09.2012 | ||
IE | 16.12.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
CH | 31.12.2012 | ||
LI | 31.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/48] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
IT | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
IE | 16.12.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
CH | 31.12.2012 | ||
LI | 31.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/47] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
IT | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
IE | 16.12.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/37] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
IT | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/34] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
DK | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
BG | 26.12.2012 | ||
GR | 27.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/33] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
GR | 27.12.2012 | ||
MC | 31.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/31] | AT | 26.09.2012 | |
BE | 26.09.2012 | ||
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
GR | 27.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/28] | BE | 26.09.2012 | |
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
GR | 27.12.2012 | ||
ES | 06.01.2013 | ||
PT | 28.01.2013 | ||
Former [2013/23] | BE | 26.09.2012 | |
CY | 26.09.2012 | ||
CZ | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
RO | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
SK | 26.09.2012 | ||
GR | 27.12.2012 | ||
ES | 06.01.2013 | ||
Former [2013/22] | BE | 26.09.2012 | |
CZ | 26.09.2012 | ||
EE | 26.09.2012 | ||
FI | 26.09.2012 | ||
NL | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
GR | 27.12.2012 | ||
ES | 06.01.2013 | ||
Former [2013/20] | BE | 26.09.2012 | |
FI | 26.09.2012 | ||
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
GR | 27.12.2012 | ||
Former [2013/12] | FI | 26.09.2012 | |
SE | 26.09.2012 | ||
SI | 26.09.2012 | ||
GR | 27.12.2012 | ||
Former [2013/11] | FI | 26.09.2012 | |
SI | 26.09.2012 | ||
GR | 27.12.2012 | ||
Former [2013/09] | FI | 26.09.2012 | Cited in | International search | [X]EP0425965 (MOTOROLA INC [US]) [X] 1,2,4-6,8-10 * column 3, line 18 - column 5, line 52; figures 3-15 *; | [XA]US5581110 (RAZOUK REDA R [US], et al) [X] 1,2,5,6 * column 3, line 64 - column 6, line 5; figures 3-10 * [A] 6,8,10; | [XA]US5811315 (YINDEEPOL WIPAWAN [US], et al) [X] 1,2,5 * figures 2A-2L * [A] 6,8-10; | [A]US6333532 (DAVARI BIJAN [US], et al) |