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EP1534873
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Extract from the Register of European Patents
EP Citations: EP1534873
| Cited in | Search | Type: | Patent literature | Publication No.: | US6322935
[XY] (SMITH ERYN [US]) [X] 1-10,14-24,4,5,9,18,19,24 * column 5, line 61 - column 6, line 28; figure 12 * * column 1, lines 6-10 * * column 6, lines 29-51 * * column 7, lines 19-61 * [Y] 11-13; | Type: | Patent literature | Publication No.: | US6322672
[Y] (SHUMAN RICHARD F [US], et al) [Y] 11-13* the whole document * | Cited in | International search | Type: | Patent literature | Publication No.: | US5116782
[Y] (YAMAGUCHI HIROSHI [JP], et al); | Type: | Patent literature | Publication No.: | US5569392
[Y] (MIYOSHI MOTOSUKE [JP], et al); | Type: | Patent literature | Publication No.: | US6042738
[Y] (CASEY JR J DAVID [US], et al); | Type: | Patent literature | Publication No.: | US6322672
[Y] (SHUMAN RICHARD F [US], et al); | Type: | Patent literature | Publication No.: | US6322935
[X] (SMITH ERYN [US]); | Type: | Patent literature | Publication No.: | US2003047691
[YP] (MUSIL CHRISTIAN R [US], et al); | Type: | Patent literature | Publication No.: | US6703626
[XP] (TAKAOKA OSAMU [JP], et al); | Type: | Non-patent literature | Publication information: | [Y] - MORGAN ET AL., "Progress for characterization and advanced reticle repair", SOLID STATE TECHNOLOGY, (200007), XP000936450 | Type: | Non-patent literature | Publication information: | [Y] - NAGASHIGE ET AL., "Detection and repair of multiphase defects on alternating phase-shreft mask for DUV lithography", 19TH ANNUAL BACUS, (199909), vol. 3873, pages 127 - 136, XP008042436 | DOI: | http://dx.doi.org/10.1117/12.373308 |