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EP1540693
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EP About this file: EP1540693
| EP1540693 - CHARGED PARTICLE BEAM SYSTEM [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.12.2011 Database last updated on 13.07.2024 | Most recent event Tooltip | 02.12.2011 | Application deemed to be withdrawn | published on 04.01.2012 [2012/01] | Applicant(s) | For all designated states FEI COMPANY 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 / US | [N/P] |
| Former [2005/24] | For all designated states FEI Company 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 / US | Inventor(s) | 01 /
STEWART, Diane, K. 4 Adeline Drive Ipswich, MA 01939 / US | 02 /
KNOWLES, Ralph, W. 8 Silver Ledge Road Newbury, MA 01951 / US | 03 /
KIMBALL, Brian, T. 2 Philips Avenue Georgetown, MA 01883 / US | [2005/24] | Representative(s) | Bakker, Hendrik, et al FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | [N/P] |
| Former [2008/17] | Bakker, Hendrik, et al FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | ||
| Former [2006/42] | Bakker, Hendrik, et al FEI Company Patent Department P.O. Box 80066 5600 KA Eindhoven / NL | ||
| Former [2005/24] | Bakker, Hendrik FEI Company, Patent Department, Postbus 80066 5600 KA Eindhoven / NL | Application number, filing date | 03797915.0 | 18.09.2003 | [2005/24] | WO2003US29447 | Priority number, date | US20020411699P | 18.09.2002 Original published format: US 411699 P | US20020330691 | 27.12.2002 Original published format: US 330691 | [2005/24] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2004027809 | Date: | 01.04.2004 | Language: | EN | [2004/14] | Type: | A2 Application without search report | No.: | EP1540693 | Date: | 15.06.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 01.04.2004 takes the place of the publication of the European patent application. | [2005/24] | Search report(s) | International search report - published on: | US | 29.07.2004 | (Supplementary) European search report - dispatched on: | EP | 07.05.2010 | Classification | IPC: | H01J37/00, H01J37/244 | [2005/24] | CPC: |
H01J37/26 (EP,KR,US);
H01J37/244 (EP,KR,US);
H01J37/28 (KR);
H01J2237/0045 (EP,KR,US);
H01J2237/2448 (EP,KR,US);
H01J2237/2605 (EP,KR,US)
| Designated contracting states | DE, FR, GB [2006/02] |
| Former [2005/24] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | SYSTEM FÜR GELADENE TEILCHENSTRAHLEN | [2005/24] | English: | CHARGED PARTICLE BEAM SYSTEM | [2005/24] | French: | SYSTEME DE FAISCEAU DE PARTICULES CHARGEES | [2005/24] | Entry into regional phase | 11.03.2005 | National basic fee paid | 11.03.2005 | Search fee paid | 11.03.2005 | Designation fee(s) paid | 11.03.2005 | Examination fee paid | Examination procedure | 11.03.2005 | Examination requested [2005/24] | 05.01.2011 | Despatch of a communication from the examining division (Time limit: M06) | 16.07.2011 | Application deemed to be withdrawn, date of legal effect [2012/01] | 19.08.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2012/01] | Divisional application(s) | EP11172096.7 / EP2372743 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 05.01.2011 | Fees paid | Renewal fee | 21.09.2005 | Renewal fee patent year 03 | 27.09.2006 | Renewal fee patent year 04 | 26.09.2007 | Renewal fee patent year 05 | 25.09.2008 | Renewal fee patent year 06 | 25.09.2009 | Renewal fee patent year 07 | 27.09.2010 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 30.09.2011 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPH04192246 (NIKON CORP) [X] 1,2,5 * abstract *; | [A]US6184525 (VAN DER MAST KAREL D [NL]) [A] 1-5* abstract *; | [X]WO0141180 (LEO ELEKTRONENMIKROSKOPIE GMBH [DE], et al) [X] 1-4 * abstract * * page 13, line 14 - page 23, line 11; figures 1-4 * * page 7, lines 26-37 *; | [X]WO0205309 (LEO ELEKTRONENMIKROSKOPIE GMBH [DE], et al) [X] 1,2 * abstract * * page 5, line 17 - page 14, line 5; figures 1-4 * * page 9, line 25 - page 10, line 2 * * page 10, lines 26-32 * * page 14, lines 1-5 * | International search | [Y]US4249077 (CRAWFORD CHARLES K); | [Y]US6525317 (YANG BAORUI [US]); | [Y]US6538254 (TOMIMATSU SATOSHI [JP], et al) |