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Extract from the Register of European Patents

EP Citations: EP1561234

Cited inInternational search
Type:Patent literature
Publication No.:WO0111650  [XYA]
 (ADVANCED ENERGY IND INC [US], et al) [X] 1,6-15,19-30 * page 10, line 30 - page 14, line 15 * * page 17, line 27 - page 18, line 12; figures 2,3,6,9 * [Y] 42 [A] 31;
Type:Patent literature
Publication No.:WO0215650  [AY]
 (APPLIED MATERIALS INC [US]) [A] 1,15,31 * page 23, line 15 - page 25, line 34; figures 15-20 * [Y] 42;
Type:Patent literature
Publication No.:US2002108713  [A]
 (HANAWA HIROJI [US], et al) [A] 1,15,31,42 * paragraphs [0073] , [0074]; figure 6c *
Cited inExamination
Type:Patent literature
Publication No.:US2002125225