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Extract from the Register of European Patents

EP About this file: EP1561234

EP1561234 - SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS [Right-click to bookmark this link]
Former [2005/32]	METHOD TO DRIVE SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS
	[2008/23]
Status	No opposition filed within time limit Status updated on 02.10.2009 Database last updated on 29.10.2024
Most recent event Tooltip	02.10.2009	No opposition filed within time limit	published on 04.11.2009 [2009/45]
Applicant(s)	For all designated states Applied Materials, Inc. P.O. Box 450-A Santa Clara, CA 95035 / US
	[N/P]
Former [2008/48]	For all designated states APPLIED MATERIALS, INC. P.O. Box 450-A Santa Clara, CA 95035 / US
Former [2005/32]	For all designated states Applied Materials, Inc. P.O. Box 450-A Santa Clara, CA 95035 / US
Inventor(s)	01 / HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US
	02 / RAMASWAMY, Katik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US
	03 / COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US
	04 / NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US
	05 / MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US
	06 / TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US
	07 / YE, Yan 13271 Via Arriba Drive Saratoga, CA 95070 / US
	[2005/48]
Former [2005/45]	01 / HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US
	02 / RAMASWAMY, Kartik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US
	03 / COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US
	04 / NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US
	05 / MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US
	06 / TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US
	07 / YE, Yan 13271 Via Arriba Drive Saratoga, CA 95070 / US
Former [2005/37]	01 / HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US
	02 / RAMASWAMY, Kartik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US
	03 / COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US
	04 / NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US
	05 / MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US
	06 / TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US
	07 / YE, Yan 13271 Via Arriba Drive Campbell, CA 950008 / US
Former [2005/32]	01 / HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US
	02 / RAMASWAMY, Kartik 3282 St. Ignatius Place, 323 Santa Clara, CA 95051 / US
	03 / COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US
	04 / NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US
	05 / MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US
Representative(s)	Bayliss, Geoffrey Cyril BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
	[N/P]
Former [2005/32]	Bayliss, Geoffrey Cyril BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
Application number, filing date	03810777.7	10.10.2003
	[2005/32]
	WO2003US32384
Priority number, date	US20020285092	30.10.2002 Original published format: US 285092
	[2005/32]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO2004042773
	Date:	21.05.2004
	Language:	EN
	[2004/21]
	Type:	A2 Application without search report
	No.:	EP1561234
	Date:	10.08.2005
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 21.05.2004 takes the place of the publication of the European patent application.
	[2005/32]
	Type:	B1 Patent specification
	No.:	EP1561234
	Date:	26.11.2008
	Language:	EN
	[2008/48]
Search report(s)	International search report - published on:	EP	29.07.2004
Classification	IPC:	H01J37/32	[2005/32]
	CPC:	H01J37/32082 (EP,KR,US); H01J37/321 (EP,KR,US); H01J37/32174 (EP,KR,US); H01J37/32431 (KR)
Designated contracting states	DE, FR, GB, IT, NL [2006/08]
Former [2005/32]	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR
Title	German:	RESONANZSTRUKTUR MIT RÄUMLICH GETRENNTEN PLASMA-SEKUNDÄRSCHLEIFEN UNTER ANWENDUNG EINES EINZIGEN GENERATORS UND SCHALTELEMENTEN	[2008/23]
	English:	SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS	[2008/23]
	French:	STRUCTURES RESONANTES SPATIALEMENT SEPAREES PAR DES PLASMAS SECONDAIRES SPATIALEMENT DISTINCTS AU MOYEN D'UN GENERATEUR UNIQUE ET D'ELEMENTS DE COMMUTATION	[2008/23]
	Former [2005/32]	RESONANZSTRUKTUR MIT RAÜMLISCH GETRENNTE PLASMA-SEKUNDÄRSCHLEIFEN UNTER ANWENDUNG EINES EINZIGEN GENERATORS UND SCHALTELEMENTEN
	Former [2005/32]	METHOD TO DRIVE SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS
	Former [2005/32]	PROCEDE D'ENTRAINEMENT DE STRUCTURES RESONANTES SPATIALEMENT SEPAREES PAR DES PLASMAS SECONDAIRES SPATIALEMENT DISTINCTS AU MOYEN D'UN GENERATEUR UNIQUE ET D'ELEMENTS DE COMMUTATION
Entry into regional phase	26.05.2005	National basic fee paid
	26.05.2005	Designation fee(s) paid
	26.05.2005	Examination fee paid
Examination procedure	26.05.2005	Examination requested [2005/32]
	20.10.2006	Despatch of a communication from the examining division (Time limit: M06)
	20.03.2007	Reply to a communication from the examining division
	16.05.2008	Communication of intention to grant the patent
	26.09.2008	Fee for grant paid
	26.09.2008	Fee for publishing/printing paid
Opposition(s)	27.08.2009	No opposition filed within time limit [2009/45]
Fees paid	Renewal fee
	07.10.2005	Renewal fee patent year 03
	05.10.2006	Renewal fee patent year 04
	15.10.2007	Renewal fee patent year 05
	07.10.2008	Renewal fee patent year 06
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[XYA]WO0111650 (ADVANCED ENERGY IND INC [US], et al) [X] 1,6-15,19-30 * page 10, line 30 - page 14, line 15 * * page 17, line 27 - page 18, line 12; figures 2,3,6,9 * [Y] 42 [A] 31;
		[AY]WO0215650 (APPLIED MATERIALS INC [US]) [A] 1,15,31 * page 23, line 15 - page 25, line 34; figures 15-20 * [Y] 42;
		[A]US2002108713 (HANAWA HIROJI [US], et al) [A] 1,15,31,42 * paragraphs [0073] , [0074]; figure 6c *
	Examination	US2002125225

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