EP1561234 - SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS [Right-click to bookmark this link] | |||
Former [2005/32] | METHOD TO DRIVE SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS | ||
[2008/23] | Status | No opposition filed within time limit Status updated on 02.10.2009 Database last updated on 29.10.2024 | Most recent event Tooltip | 02.10.2009 | No opposition filed within time limit | published on 04.11.2009 [2009/45] | Applicant(s) | For all designated states Applied Materials, Inc. P.O. Box 450-A Santa Clara, CA 95035 / US | [N/P] |
Former [2008/48] | For all designated states APPLIED MATERIALS, INC. P.O. Box 450-A Santa Clara, CA 95035 / US | ||
Former [2005/32] | For all designated states Applied Materials, Inc. P.O. Box 450-A Santa Clara, CA 95035 / US | Inventor(s) | 01 /
HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US | 02 /
RAMASWAMY, Katik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US | 03 /
COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US | 04 /
NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US | 05 /
MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US | 06 /
TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US | 07 /
YE, Yan 13271 Via Arriba Drive Saratoga, CA 95070 / US | [2005/48] |
Former [2005/45] | 01 /
HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US | ||
02 /
RAMASWAMY, Kartik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US | |||
03 /
COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US | |||
04 /
NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US | |||
05 /
MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US | |||
06 /
TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US | |||
07 /
YE, Yan 13271 Via Arriba Drive Saratoga, CA 95070 / US | |||
Former [2005/37] | 01 /
HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US | ||
02 /
RAMASWAMY, Kartik 3282 St. Ignatius Place, 322 Santa Clara, CA 95051 / US | |||
03 /
COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US | |||
04 /
NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US | |||
05 /
MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US | |||
06 /
TANAKA, Tsutomu 744 Nicholson Avenue Santa Clara, CA 95051 / US | |||
07 /
YE, Yan 13271 Via Arriba Drive Campbell, CA 950008 / US | |||
Former [2005/32] | 01 /
HANAWA, Hiroji 696 Spruce Drive Sunnyvale, CA 94086 / US | ||
02 /
RAMASWAMY, Kartik 3282 St. Ignatius Place, 323 Santa Clara, CA 95051 / US | |||
03 /
COLLINS, Kenneth, S. 7214 Glenview Drive San Jose, CA 95120 / US | |||
04 /
NGUYEN, Andrew 3148 Hostetter Road San Jose, CA 95132 / US | |||
05 /
MONROY, Gonzalo, Antonio 3288 21st Street 120 San Francisco, CA 94110 / US | Representative(s) | Bayliss, Geoffrey Cyril BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
Former [2005/32] | Bayliss, Geoffrey Cyril BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 03810777.7 | 10.10.2003 | [2005/32] | WO2003US32384 | Priority number, date | US20020285092 | 30.10.2002 Original published format: US 285092 | [2005/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2004042773 | Date: | 21.05.2004 | Language: | EN | [2004/21] | Type: | A2 Application without search report | No.: | EP1561234 | Date: | 10.08.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 21.05.2004 takes the place of the publication of the European patent application. | [2005/32] | Type: | B1 Patent specification | No.: | EP1561234 | Date: | 26.11.2008 | Language: | EN | [2008/48] | Search report(s) | International search report - published on: | EP | 29.07.2004 | Classification | IPC: | H01J37/32 | [2005/32] | CPC: |
H01J37/32082 (EP,KR,US);
H01J37/321 (EP,KR,US);
H01J37/32174 (EP,KR,US);
H01J37/32431 (KR)
| Designated contracting states | DE, FR, GB, IT, NL [2006/08] |
Former [2005/32] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | RESONANZSTRUKTUR MIT RÄUMLICH GETRENNTEN PLASMA-SEKUNDÄRSCHLEIFEN UNTER ANWENDUNG EINES EINZIGEN GENERATORS UND SCHALTELEMENTEN | [2008/23] | English: | SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS | [2008/23] | French: | STRUCTURES RESONANTES SPATIALEMENT SEPAREES PAR DES PLASMAS SECONDAIRES SPATIALEMENT DISTINCTS AU MOYEN D'UN GENERATEUR UNIQUE ET D'ELEMENTS DE COMMUTATION | [2008/23] |
Former [2005/32] | RESONANZSTRUKTUR MIT RAÜMLISCH GETRENNTE PLASMA-SEKUNDÄRSCHLEIFEN UNTER ANWENDUNG EINES EINZIGEN GENERATORS UND SCHALTELEMENTEN | ||
Former [2005/32] | METHOD TO DRIVE SPATIALLY SEPARATE RESONANT STRUCTURE WITH SPATIALLY DISTINCT PLASMA SECONDARIES USING A SINGLE GENERATOR AND SWITCHING ELEMENTS | ||
Former [2005/32] | PROCEDE D'ENTRAINEMENT DE STRUCTURES RESONANTES SPATIALEMENT SEPAREES PAR DES PLASMAS SECONDAIRES SPATIALEMENT DISTINCTS AU MOYEN D'UN GENERATEUR UNIQUE ET D'ELEMENTS DE COMMUTATION | Entry into regional phase | 26.05.2005 | National basic fee paid | 26.05.2005 | Designation fee(s) paid | 26.05.2005 | Examination fee paid | Examination procedure | 26.05.2005 | Examination requested [2005/32] | 20.10.2006 | Despatch of a communication from the examining division (Time limit: M06) | 20.03.2007 | Reply to a communication from the examining division | 16.05.2008 | Communication of intention to grant the patent | 26.09.2008 | Fee for grant paid | 26.09.2008 | Fee for publishing/printing paid | Opposition(s) | 27.08.2009 | No opposition filed within time limit [2009/45] | Fees paid | Renewal fee | 07.10.2005 | Renewal fee patent year 03 | 05.10.2006 | Renewal fee patent year 04 | 15.10.2007 | Renewal fee patent year 05 | 07.10.2008 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XYA]WO0111650 (ADVANCED ENERGY IND INC [US], et al) [X] 1,6-15,19-30 * page 10, line 30 - page 14, line 15 * * page 17, line 27 - page 18, line 12; figures 2,3,6,9 * [Y] 42 [A] 31; | [AY]WO0215650 (APPLIED MATERIALS INC [US]) [A] 1,15,31 * page 23, line 15 - page 25, line 34; figures 15-20 * [Y] 42; | [A]US2002108713 (HANAWA HIROJI [US], et al) [A] 1,15,31,42 * paragraphs [0073] , [0074]; figure 6c * | Examination | US2002125225 |