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EP1419853
European procedure
Extract from the Register of European Patents
EP About this file: EP1419853
| EP1419853 - Method for forming an apparatus for in-situ endpoint detection and monitoring for chemical mechanical polishing operations [Right-click to bookmark this link] | |||
| Former [2004/21] | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations | ||
| [2005/36] | Status | No opposition filed within time limit Status updated on 22.12.2006 Database last updated on 24.08.2024 | Most recent event Tooltip | 07.09.2007 | Lapse of the patent in a contracting state New state(s): IT | published on 10.10.2007 [2007/41] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2006/07] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara, California 95054 / US | ||
| Former [2004/21] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
Birang, Manoocher 18836 Favre Ridge Road Los Gatos California 95030 / US | 02 /
Johansson, Nils 16450 Kennedy Road Los Gatos California 95032 / US | 03 /
Gleason, Allan 617 North 15th Street San Jose California 95112 / US | 04 /
Pyatigorsky, Grigory 1000 Kiely Boulevard Apt. 50 Santa Clara California 95051 / US | [2005/36] |
| Former [2004/21] | 01 /
Birang, Manoocher 18836 Favre Ridge Road Los Gatos California 95030 / US | ||
| 02 /
Johansson, Nils 16450 Keenedy Road Los Gatos California 95032 / US | |||
| 03 /
Gleason, Allan 617 North 15th Street San Jose California 95112 / US | |||
| 04 /
Pyatigorsky, Grigory 1000 Kiely Boulevard 50 Santa Clara 95051 / US | Representative(s) | Draper, Martyn John, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2004/21] | Draper, Martyn John, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 04001783.2 | 28.03.1996 | [2004/21] | Priority number, date | US19950413982 | 28.03.1995 Original published format: US 413982 | US19960605769 | 22.02.1996 Original published format: US 605769 | [2004/21] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1419853 | Date: | 19.05.2004 | Language: | EN | [2004/21] | Type: | B1 Patent specification | No.: | EP1419853 | Date: | 15.02.2006 | Language: | EN | [2006/07] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 30.03.2004 | Classification | IPC: | B24B37/04, B24B47/12, B24D7/12, G01B11/06 | [2004/21] | CPC: |
B24B37/205 (EP,US);
H01L21/304 (KR);
B24B37/013 (EP,US);
B24B47/12 (EP,US);
B24B49/04 (EP,US);
B24B49/12 (EP,US);
| Designated contracting states | DE, FR, GB, IT, NL [2004/21] | Title | German: | Verfahren zum Herstellen einer Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen | [2005/36] | English: | Method for forming an apparatus for in-situ endpoint detection and monitoring for chemical mechanical polishing operations | [2005/36] | French: | Procédé pour la manufacture d'un dispositif pour le contrôle et la détection in-situ de la fin d'une opération de polissage mécano-chimique | [2005/36] |
| Former [2004/21] | Verfahren und Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen | ||
| Former [2004/21] | Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations | ||
| Former [2004/21] | Procédé et dispositif pour le contrôle et la détection in-situ de la fin d'une opération de polissage mécano-chimique | Examination procedure | 28.01.2004 | Examination requested [2004/21] | 15.12.2004 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 29.12.2004 | Despatch of a communication from the examining division (Time limit: M04) | 21.03.2005 | Reply to a communication from the examining division | 12.04.2005 | Despatch of a communication from the examining division (Time limit: M04) | 06.07.2005 | Reply to a communication from the examining division | 29.07.2005 | Communication of intention to grant the patent | 30.11.2005 | Fee for grant paid | 30.11.2005 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP01100501.4 / EP1108501 | EP96302176.1 / EP0738561 | Opposition(s) | 16.11.2006 | No opposition filed within time limit [2007/04] | Request for further processing for: | 20.12.2004 | Request for further processing filed | 20.12.2004 | Full payment received (date of receipt of payment) Request granted | 31.01.2005 | Decision despatched | Fees paid | Renewal fee | 28.01.2004 | Renewal fee patent year 03 | 28.01.2004 | Renewal fee patent year 04 | 28.01.2004 | Renewal fee patent year 05 | 28.01.2004 | Renewal fee patent year 06 | 28.01.2004 | Renewal fee patent year 07 | 28.01.2004 | Renewal fee patent year 08 | 28.01.2004 | Renewal fee patent year 09 | 04.03.2005 | Renewal fee patent year 10 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 15.02.2006 | NL | 15.02.2006 | [2007/41] |
| Former [2006/45] | NL | 15.02.2006 | Documents cited: | Search | [A]US5081796 (SCHULTZ LAURENCE D [US]) [A] 1,11* column A *; | [PXA]EP0663265 (IBM [US]) [PX] 1 * the whole document * [PA] 11 |