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Extract from the Register of European Patents

EP About this file: EP1458066

EP1458066 - Line selected F2 two chamber laser system [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  27.11.2009
Database last updated on 26.04.2025
Most recent event   Tooltip07.10.2011Lapse of the patent in a contracting state
New state(s): CY, TR		published on 09.11.2011  [2011/45]
Applicant(s)For all designated states
Cymer, Inc.
17075 Thornmint Court
San Diego, CA 92127 / US
[2004/38]
Inventor(s)01 / Knowles, David S.
3696 Landfair Court
San Diego, CA 92130 / US
02 / Brown, Daniel J., W.
11981 Brewster Court
San Diego, CA 92128 / US
03 / Sandstrom, Richard, L.
410 Bridoon Terrace
Encinitas, CA 92024 / US
04 / Rylov, German E.
24098 Orleans Lane
Murrieta, CA 92562 / US
05 / Onkels, Eckehard, D.
12008 Caminito Ryone
San Diego, CA 92128 / US
06 / Besaucele, Herve A.
3583 Utah Street
San Diego, CA 92104 / US
07 / Myers, David, W.
15227 Crestview Court
Poway, CA 92064 / US
08 / Ershov, Alexander, I.
11312 Meadow Flower Place
San Diego, CA 92127 / US
09 / Partlo, William N.
12634 Pedriza Drive
Poway, CA 92064 / US
10 / Fomenkov, Igor, V.
14390 Janal Way
San Diego, CA 92129 / US
11 / Ujazdowski, Richard, C.
14540 Twin Peaks Road
Poway, CA 92064 / US
12 / Ness, Richard, M.
9248 Citrus View Court
San Diego, CA 92126 / US
13 / Smith, Scot, T.
15124 Calle Juanito
San Diego, CA 92129 / US
14 / Hulburd, William, G.
11351 Calle Dario
San Diego, CA 92126 / US
 [2004/42]
Former [2004/38]01 / Knowles, David S.
12535 Montellano Terrace
San Diego, CA 92130 / US
02 / Brown, Daniel J., W.
14020 Chicarita Creek Road
San Diego, CA 92128 / US
03 / Sandstrom, Richard, L.
410 Bridoon Terrace
Encinitas, CA 92024 / US
04 / Rylov, German E.
24098 Orleans Lane
Murrieta, CA 92562 / US
05 / Onkels, Eckehard, D.
12008 Caminito Ryone
San Diego, CA 92128 / US
06 / Besaucele, Herve A.
3583 Utah Street
San Diego, CA 92104 / US
07 / Myers, David, W.
15227 Crestview Court
Poway, CA 92064 / US
08 / Ershov, Alexander, I.
11312 Meadow Flower Place
San Diego, CA 92127 / US
09 / Partlo, William N.
12634 Pedriza Drive
Poway, CA 92064 / US
10 / Fomenkov, Igor, V.
14390 Janal Way
San Diego, CA 92129 / US
11 / Ujazdowski, Richard, C.
14540 Twin Peaks Road
Poway, CA 92064 / US
12 / Ness, Richard, M.
9248 Citrus View Court
San Diego, CA 92126 / US
13 / Smith, Scot, T.
15124 Calle Juanito
San Diego, CA 92129 / US
14 / Hulburd, William, G.
11351 Calle Dario
San Diego, CA 92126 / US
Representative(s)Grünecker Patent- und Rechtsanwälte PartG mbB
Leopoldstraße 4
80802 München / DE
[N/P]
Former [2004/38]Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
Maximilianstrasse 58
80538 München / DE
Application number, filing date04011567.719.08.2002
[2004/38]
Priority number, dateUS2001094334329.08.2001         Original published format: US 943343
US2001097050303.10.2001         Original published format: US 970503
US2001000099114.11.2001         Original published format: US 991
US2001000691329.11.2001         Original published format: US 6913
US2001001200230.11.2001         Original published format: US 12002
US2001003672721.12.2001         Original published format: US 36727
US2001003667621.12.2001         Original published format: US 36676
US2002005661923.01.2002         Original published format: US 56619
[2004/38]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1458066
Date:15.09.2004
Language:EN
[2004/38]
Type: A3 Search report 
No.:EP1458066
Date:19.04.2006
[2006/16]
Type: B1 Patent specification 
No.:EP1458066
Date:21.01.2009
Language:EN
[2009/04]
Search report(s)(Supplementary) European search report - dispatched on:EP08.03.2006
ClassificationIPC:H01S3/225, H01S3/23
[2006/16]
CPC:
H01S3/2366 (EP,US); H01S3/10 (KR); G01J9/00 (EP,US);
G03F7/70025 (EP,US); G03F7/70041 (EP,US); G03F7/70575 (EP,US);
G03F7/70933 (EP,US); H01S3/03 (EP,US); H01S3/036 (EP,US);
H01S3/038 (EP,US); H01S3/0385 (EP,US); H01S3/08 (EP,US);
H01S3/08004 (EP,US); H01S3/09705 (EP,US); H01S3/0971 (EP,US);
H01S3/104 (EP,US); H01S3/105 (EP,US); H01S3/223 (EP,US);
H01S3/225 (EP,US); H01S3/2333 (EP,US); H01S3/0057 (EP,US);
H01S3/0071 (EP,US); H01S3/02 (EP,US); H01S3/0387 (EP,US);
H01S3/0404 (EP,US); H01S3/041 (EP,US); H01S3/08009 (EP,US);
H01S3/08036 (EP,US); H01S3/0943 (EP,US); H01S3/097 (EP,US);
H01S3/09702 (EP,US); H01S3/0975 (EP,US); H01S3/1305 (EP,US);
H01S3/134 (EP,US); H01S3/139 (EP,US); H01S3/22 (EP,US);
H01S3/2207 (EP,US); H01S3/2251 (EP,US); H01S3/2256 (EP,US);
H01S3/2258 (EP,US) (-)
Former IPC [2006/01]H01S3/038, H01S3/225, H01S3/223, H01S3/23, H01S3/036
Former IPC [2004/38]H01S3/223, H01S3/23, H01S3/036, H01S3/038
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   SK,   TR [2009/04]
Former [2004/38]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE,  SK,  TR 
TitleGerman:F2-Zweikammerlasersystem mit Linienauswahl[2004/38]
English:Line selected F2 two chamber laser system[2004/38]
French:Système laser F2 à deux chambres et avec selection de ligne[2008/23]
Former [2004/38]Système de laser F2 a raie selectionnée, a deux enceintes
Examination procedure14.05.2004Examination requested  [2004/38]
09.06.2006Despatch of a communication from the examining division (Time limit: M06)
15.12.2006Reply to a communication from the examining division
28.06.2007Despatch of a communication from the examining division (Time limit: M04)
31.10.2007Reply to a communication from the examining division
23.07.2008Communication of intention to grant the patent
26.11.2008Fee for grant paid
26.11.2008Fee for publishing/printing paid
Parent application(s)   TooltipEP02773221.3  / EP1438772
Opposition(s)22.10.2009No opposition filed within time limit [2009/53]
Fees paidRenewal fee
14.05.2004Renewal fee patent year 03
19.08.2005Renewal fee patent year 04
29.08.2006Renewal fee patent year 05
29.08.2007Renewal fee patent year 06
25.08.2008Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT21.01.2009
BE21.01.2009
CY21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
FI21.01.2009
IT21.01.2009
SK21.01.2009
TR21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
GB19.08.2009
IE19.08.2009
LU19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
[2011/44]
Former [2011/21]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
FI21.01.2009
IT21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
GB19.08.2009
IE19.08.2009
LU19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2011/14]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
FI21.01.2009
IT21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
GB19.08.2009
IE19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2011/13]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
FI21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
GB19.08.2009
IE19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2011/01]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
GB19.08.2009
IE19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2010/49]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
GR22.04.2009
ES02.05.2009
PT22.06.2009
IE19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2010/35]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
IE19.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
Former [2010/22]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
CH31.08.2009
LI31.08.2009
MC31.08.2009
Former [2010/16]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
MC31.08.2009
Former [2010/08]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
BG21.04.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
Former [2009/50]AT21.01.2009
BE21.01.2009
CZ21.01.2009
DK21.01.2009
EE21.01.2009
SK21.01.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
Former [2009/46]AT21.01.2009
BE21.01.2009
DK21.01.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
Former [2009/44]AT21.01.2009
BE21.01.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
Former [2009/40]AT21.01.2009
SE21.04.2009
ES02.05.2009
PT22.06.2009
Former [2009/35]ES02.05.2009
Documents cited:Search[YA]JP2000223408  ;
 [Y]JPH05167136  ;
 [Y]GB1197123  (LASER SCIENCES INC [US]) [Y] 25-27 * abstract * * page 4, line 108 - page 5, line 102 *;
 [Y]US5377215  (DAS PALASH P [US], et al) [Y] 45,46 * the whole document *;
 [Y]US6034978  (UJAZDOWSKI RICHARD C [US], et al) [Y] 45,46 * the whole document *;
 [Y]US6067311  (MORTON RICHARD G [US], et al) [Y] 67-76 * abstract *;
 [Y]WO0038286  (CYMER INC [US], et al) [Y] 1 * abstract *;
 [XY]WO0124327  (CYMER INC [US], et al) [X] 1-11,13-24,28,34-36,38,39,44,47-55,58-66 * pages 3-5 * * pages 12-14,22 * * pages 31-33 * * pages 43-46 * * figures 3,5a-6b,7b,14a,14c,22c * * abstract * [Y] 1,12,25-27,37,40-42,45,46,56,57,67-76;
 [PXY]WO0231932  (CYMER INC [US], et al) [PX] 1-11,13-24,28-33,36,45,46,56,57,60,61 * pages 3-12 * * pages 30,45 * * claims 7-17 * * figures 1-4b,21,21a * * claims 5,18-23 * [PY] 12,25-27,37,40-42,67-76;
 [PY]DE10102143  (LAMBDA PHYSIK AG [DE]) [PY] 40 * paragraphs [0001] - [0013]; figure 1 *
 [YA]  - PATENT ABSTRACTS OF JAPAN, (20010103), vol. 2000, no. 11, & JP2000223408 A 20000811 (HITACHI LTD) [Y] 12,37,41,42 * abstract * [A] 43
 [Y]  - PATENT ABSTRACTS OF JAPAN, (19931015), vol. 017, no. 570, Database accession no. (E - 1448), & JP05167136 A 19930702 (KOMATSU LTD) [Y] 56,57 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.