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EP1452920
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EP About this file: EP1452920
| EP1452920 - Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 22.01.2010 Database last updated on 19.07.2024 | Most recent event Tooltip | 22.01.2010 | Application deemed to be withdrawn | published on 24.02.2010 [2010/08] | Applicant(s) | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2004/39] | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | ||
| Former [2004/36] | For all designated states ASML Netherlands B.V. De Run 1110 5503 LA Veldhoven / NL | Inventor(s) | 01 /
van der Sande, Joris Jan Mensinge 45 5655 HV Eindhoven / NL | [2004/36] | Representative(s) | Maas, Abraham Johannes, et al ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2009/23] | Maas, Abraham Johannes, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2009/09] | Van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2004/36] | Prins, Adrianus Willem, Mr. Ir., et al Vereenigde, Nieuwe Parklaan 97 2587 BN Den Haag / NL | Application number, filing date | 04075556.3 | 20.02.2004 | [2004/36] | Priority number, date | EP20030075575 | 25.02.2003 Original published format: EP 03075575 | [2004/36] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1452920 | Date: | 01.09.2004 | Language: | EN | [2004/36] | Type: | A3 Search report | No.: | EP1452920 | Date: | 21.06.2006 | [2006/25] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 24.05.2006 | Classification | IPC: | G03F7/20 | [2004/36] | CPC: |
G03F7/70725 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [2007/09] |
| Former [2004/36] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | Verfahren zur Herstellung eines Artikels, dabei hergestellter Artikel, Computerprogramm zur Durchführung des Verfahrens und Robotiksystem | [2004/36] | English: | Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system | [2004/36] | French: | Méthode pour la fabrication d'un dispositif, dispositif fabriqué par le méthode,programme d'ordinateur pour réaliser la méthode et système de robotique | [2004/36] | Examination procedure | 24.10.2006 | Examination requested [2006/49] | 22.12.2006 | Loss of particular rights, legal effect: designated state(s) | 12.04.2007 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, LU, MC, PT, RO, SE, SI, SK, TR | 15.11.2007 | Despatch of a communication from the examining division (Time limit: M04) | 13.03.2008 | Reply to a communication from the examining division | 01.09.2009 | Application deemed to be withdrawn, date of legal effect [2010/08] | 07.10.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/08] | Fees paid | Renewal fee | 15.02.2006 | Renewal fee patent year 03 | 13.02.2007 | Renewal fee patent year 04 | 14.02.2008 | Renewal fee patent year 05 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 25.01.2007 | AT M01 Not yet paid | 25.01.2007 | BE M01 Not yet paid | 25.01.2007 | BG M01 Not yet paid | 25.01.2007 | CH M01 Not yet paid | 25.01.2007 | CY M01 Not yet paid | 25.01.2007 | CZ M01 Not yet paid | 25.01.2007 | DK M01 Not yet paid | 25.01.2007 | EE M01 Not yet paid | 25.01.2007 | ES M01 Not yet paid | 25.01.2007 | FI M01 Not yet paid | 25.01.2007 | GR M01 Not yet paid | 25.01.2007 | HU M01 Not yet paid | 25.01.2007 | IE M01 Not yet paid | 25.01.2007 | LU M01 Not yet paid | 25.01.2007 | MC M01 Not yet paid | 25.01.2007 | PT M01 Not yet paid | 25.01.2007 | RO M01 Not yet paid | 25.01.2007 | SE M01 Not yet paid | 25.01.2007 | SI M01 Not yet paid | 25.01.2007 | SK M01 Not yet paid | 25.01.2007 | TR M01 Not yet paid | Additional fee for renewal fee | 28.02.2009 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPH09246360 ; | [YA]JP2000040658 (NIKON CORP) [Y] 1,16,17 * paragraphs [0047] - [0059] * [A] 2-15,18; | [A]US6260282 (YUAN BAUSAN [US], et al) [A] 1-18 * the whole document *; | [YA]US2001021009 (YUAN BAUSAN [US], et al) [Y] 1,16,17 * paragraphs [0030] - [0032]; claims 1-3 * [A] 2-15,18; | [A]US6320345 (YUAN BAUSAN [US], et al) [A] 1-18 * the whole document *; | [A]WO0188638 (GEN SCANNING INC [US], et al) [A] 1-18 * the whole document *; | [E]EP1422569 (ASML HOLDING NV [NL]) [E] 1-18 * paragraphs [0044] - [0053]; figures 1,2,10-12; claims 1,3,16 *; | [E]EP1596425 (NIKON CORP [JP]) [E] 1-18* figures 6-8; claims 1,17 * | [A] - PATENT ABSTRACTS OF JAPAN, (19980130), vol. 1998, no. 01, & JP09246360 A 19970919 (CANON INC) [A] 1-18 * abstract * |