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EP1465012
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EP About this file: EP1465012
| EP1465012 - Supporting structure for use in a lithographic apparatus [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 05.03.2010 Database last updated on 31.08.2024 | Most recent event Tooltip | 05.03.2010 | Application deemed to be withdrawn | published on 07.04.2010 [2010/14] | Applicant(s) | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2004/41] | For all designated states ASML Netherlands B.V. De Run 6501 5504 DR Veldhoven / NL | Inventor(s) | 01 /
Tinnemans, Patricius Aloysius Jacobus Het Ronsel 28 5527 GR Hapert / NL | 02 /
Buis, Edwin Johan Leygraaf 186 5951 GZ Belfeld / NL | 03 /
Donders, Sjoerd Nicolaas Lambertus Achter het Stadhuis 24 5211 HN 's-Hertogenbosch / NL | 04 /
Van Elp, Jan Hovenierstraat 21 2613 RM Delft / NL | 05 /
Hoogkamp, Jan Frederik Zijlstraat 42 4811 RZ Breda / NL | 06 /
Van Meer, Aschwin Lodewijk Hendricus Johannes Lucas van Leydenstraat 61 4703 NE Rosendaal / NL | 07 /
Smulders, Patrick Johannes Cornelus Hendrik Dwarseind 9 5685 DC Best / NL | 08 /
Spanjers, Franciscus Andreas Cornelis Johannes Rijkesluisstraat 28 5688 ED Oirschot / NL | 09 /
Vermeulen, Johannes Petrus Martinus Bernardus Groenstraat 8 5551 AV Valkenswaard / NL | 10 /
Visser, Raimond Zwenkeind 8 5685 EK Best / NL | 11 /
Tegenbosch, Henricus Gerardus Schultinghstraat 8 5652 VC Eindhoven / NL | 12 /
Van den Berg, Johannes Charles Adrianus Molenstraat 72 4841 CE Prinsenbeek / NL | 13 /
Van de Sande, Henricus Johannes Adrianus Peulland 36 5663 JZ Geldrop / NL | 14 /
Vervoort, Thijs Havensingel 222 5611 VW Eindhoven / NL | [2004/41] | Representative(s) | Slenders, Petrus Johannes Waltherus, et al ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2009/23] | Slenders, Petrus J. W., et al ASML Netherlands B.V Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2009/09] | Van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2008/22] | van Westenbrugge, Andries, et al Postbus 29720 2502 LS Den Haag / NL | ||
| Former [2004/41] | van Westenbrugge, Andries, et al Nederlandsch Octrooibureau, Scheveningseweg 82, Postbus 29720 2502 LS Den Haag / NL | Application number, filing date | 04076024.1 | 30.03.2004 | [2004/41] | Priority number, date | EP20030077320 | 23.07.2003 Original published format: EP 03077320 | EP20030075929 | 31.03.2003 Original published format: EP 03075929 | [2004/41] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1465012 | Date: | 06.10.2004 | Language: | EN | [2004/41] | Type: | A3 Search report | No.: | EP1465012 | Date: | 22.12.2004 | [2004/52] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 05.11.2004 | Classification | IPC: | G03F7/20 | [2004/41] | CPC: |
G03F7/70741 (EP);
B25J13/089 (EP);
G03F7/7075 (EP);
G03F7/70925 (EP);
H01L21/6833 (EP);
H02N13/00 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [2005/37] |
| Former [2004/41] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Tragstruktur zur Verwending in einem lithographischen Gerät | [2004/41] | English: | Supporting structure for use in a lithographic apparatus | [2004/41] | French: | Structure de support à utiliser dans un appareil lithographique | [2004/41] | Examination procedure | 21.06.2005 | Examination requested [2005/33] | 01.10.2009 | Application deemed to be withdrawn, date of legal effect [2010/14] | 06.11.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/14] | Fees paid | Renewal fee | 15.03.2006 | Renewal fee patent year 03 | 14.03.2007 | Renewal fee patent year 04 | 13.03.2008 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.03.2009 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US4788577 (AKIYAMA NOBUYUKI [JP], et al) [X] 1,5,6,11,16,17 * column 3, line 26 - column 4, line 49; figures 1-4 *; | [X]US5880924 (KUMAR ANANDA H [US], et al) [X] 9,14 * column 2, line 42 - line 55 * * column 5, line 57 - column 6, line 12 *; | [A]US6041938 (SENN ANTHONY [US]) [A] 1-7 * column 3, line 66 - column 4, line 49; figure 2D * * column 5, line 21 - line 43; figure 4C *; | [Y]US6068668 (MASTROIANNI SAL [US]) [Y] 1,2,4-6,13,15 * column 3, line 57 - line 59 *; | [YA]US6155773 (EBBING PETER F [US], et al) [Y] 1,2,4-6,13,15 * column 6, line 18 - line 39; figures 1-3 * * column 10, line 10 - line 35 * [A] 3,7,12; | [X]US6184972 (MIZUTANI SHINJI [JP], et al) [X] 1,5,6,11,16,17 * column 1, line 10 - line 20 *; | [X]US2002109954 (TSURUTA HIDEYOSHI [JP]) [X] 8,18,19 * paragraph [0002] * * paragraph [0010] * * paragraph [0034] - paragraph [0035] *; | [A]US2003005948 (MATSUNO KOUSAKU [JP], et al) [A] 10,20,21 * paragraph [0022] ** paragraph [0057] *; | [PX]US6631062 (MINAMISAWA KAZUYOSHI [JP], et al) [PX] 8 * column 1, line 46 - line 52 * * column 15, line 27 - line 42 * |