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Extract from the Register of European Patents

EP About this file: EP1612851

EP1612851 - A method for the treatment of a surface of a metal-carbide substrate for use in semiconductor manufacturing processes as well as such a metal-carbide substrate [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  07.01.2011
Database last updated on 19.07.2024
Most recent event   Tooltip19.10.2012Lapse of the patent in a contracting state
New state(s): TR		published on 21.11.2012  [2012/47]
Applicant(s)For all designated states
Xycarb Ceramics B.V.
Zuiddijk 4
5705 CS Helmond / NL
[2006/01]
Inventor(s)01 / Van Munster, Marcus Gerardus
Langestraat 63
5038SC Tilburg / NL
 [2009/43]
Former [2006/01]01 / Van Munster, Marcus Gerardus
Langestraat 63
5038 SC Tilburg / NL
Representative(s)Valkonet, Rutger, et al
Algemeen Octrooi- en Merkenbureau
P.O. Box 645
5600 AP Eindhoven / NL
[N/P]
Former [2006/01]Valkonet, Rutger, et al
Algemeen Octrooi- en Merkenbureau P.O. Box 645
5600 AP Eindhoven / NL
Application number, filing date04076897.030.06.2004
[2006/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP1612851
Date:04.01.2006
Language:EN
[2006/01]
Type: B1 Patent specification 
No.:EP1612851
Date:03.03.2010
Language:EN
[2010/09]
Search report(s)(Supplementary) European search report - dispatched on:EP12.11.2004
ClassificationIPC:H01L21/04, H01L29/24
[2006/01]
CPC:
C04B41/009 (EP); H01L21/302 (KR); C04B41/5346 (EP);
C04B41/91 (EP); H01L21/673 (EP)
C-Set:
C04B41/009, C04B35/565 (EP)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2006/01]
TitleGerman:Verfahren zur Oberflächenbehandlung eines Metallcarbid-Substrates zur Verwendung in Halbleiterherstellungverfahren und ein Metallcarbid-Substrat an sich[2006/01]
English:A method for the treatment of a surface of a metal-carbide substrate for use in semiconductor manufacturing processes as well as such a metal-carbide substrate[2006/01]
French:Procédé de traitement d'une surface d'un substrat de carbure métallique pour son utilisation dans un procédé de fabrication de semiconducteurs et un carbure métallique[2006/01]
Examination procedure29.06.2006Examination requested  [2006/32]
04.12.2006Despatch of a communication from the examining division (Time limit: M04)
29.01.2007Reply to a communication from the examining division
04.05.2007Despatch of a communication from the examining division (Time limit: M06)
03.10.2007Reply to a communication from the examining division
29.09.2009Communication of intention to grant the patent
11.12.2009Fee for grant paid
11.12.2009Fee for publishing/printing paid
Opposition(s)06.12.2010No opposition filed within time limit [2011/06]
Fees paidRenewal fee
28.06.2006Renewal fee patent year 03
27.06.2007Renewal fee patent year 04
27.06.2008Renewal fee patent year 05
29.06.2009Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipBE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
TR03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
CH30.06.2010
LI30.06.2010
LU30.06.2010
MC30.06.2010
PT05.07.2010
HU04.09.2010
[2012/47]
Former [2012/43]BE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
CH30.06.2010
LI30.06.2010
LU30.06.2010
MC30.06.2010
PT05.07.2010
HU04.09.2010
Former [2012/42]BE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
CH30.06.2010
LI30.06.2010
MC30.06.2010
PT05.07.2010
HU04.09.2010
Former [2011/20]BE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
CH30.06.2010
LI30.06.2010
MC30.06.2010
PT05.07.2010
Former [2011/08]BE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
MC30.06.2010
PT05.07.2010
Former [2011/07]BE03.03.2010
CY03.03.2010
CZ03.03.2010
DK03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
MC30.06.2010
Former [2010/51]BE03.03.2010
CY03.03.2010
CZ03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
BG03.06.2010
GR04.06.2010
ES14.06.2010
Former [2010/50]BE03.03.2010
CY03.03.2010
CZ03.03.2010
EE03.03.2010
FI03.03.2010
PL03.03.2010
RO03.03.2010
SE03.03.2010
SI03.03.2010
SK03.03.2010
GR04.06.2010
ES14.06.2010
Former [2010/46]FI03.03.2010
PL03.03.2010
SI03.03.2010
GR04.06.2010
ES14.06.2010
Former [2010/38]FI03.03.2010
PL03.03.2010
SI03.03.2010
Former [2010/36]PL03.03.2010
SI03.03.2010
Documents cited:Search[A]WO0145148  (KONINKL PHILIPS ELECTRONICS NV [NL]) [A] 1-23 * abstract * * page 4 *;
 [XA]US2002033130  (HISADA YOSHIYUKI [JP], et al) [X] 12-23 * abstract * * paragraph [0005] - paragraph [0007]; claim - * [A] 1-11;
 [A]WO02086180  (UNIV ILLINOIS [US]) [A] 1-23 * page 1 - page 3 * * page 24 - page 25 *;
 [A]  - JEON I D ET AL, "Formation of carbon coatings on silicon carbide by reactions in halogen containing media", PROCEEDINGS OF THE SYMPOSIUM ON FUNDAMENTAL ASPECTS OF HIGH TEMPERATURES, XX, XX, (1997), vol. 96-26, pages 256 - 268, XP008007082 [A] 1,12 * the whole document *
 [A]  - ERSOY D A ET AL, "High temperature chlorination of SiC for preparation of tribological carbon films", PROCEEDINGS OF THE SYMPOSIUM ON HIGH TEMPERATURE CORROSION AND MATERIALS CHEMISTRY, XX, XX, (1998), pages 324 - 333, XP000981692 [A] 1,12 * the whole document *
 [A]  - GOGOTSI Y G ET AL, "CARBON COATINS ON SILICON CARBIDE BY REACTION WITH CHLORINE-CONTAINING GASES", JOURNAL OF MATERIALS CHEMISTRY, THE ROYAL SOCIETY OF CHEMISTRY, CAMBRIDGE, GB, (19970901), vol. 7, no. 9, ISSN 0959-9428, pages 1841 - 1848, XP000724179 [A] 1,12 * the whole document * [A]

DOI:   http://dx.doi.org/10.1039/a701126a
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