EP1524688 - Method for fabricating semiconductor devices having silicided electrodes [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 15.10.2010 Database last updated on 09.09.2024 | Most recent event Tooltip | 19.10.2012 | Lapse of the patent in a contracting state New state(s): TR | published on 21.11.2012 [2012/47] | Applicant(s) | For all designated states IMEC Kapeldreef 75 3001 Leuven / BE | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | [2009/33] |
Former [2009/11] | For all designated states INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM ( IMEC) Kapeldreef 75 3001 Leuven / BE | ||
For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | |||
Former [2005/16] | For all designated states INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM ( IMEC) Kapeldreef 75 3001 Leuven / BE | ||
For all designated states Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | Inventor(s) | 01 /
Schram, Tom Avenue des Tourterelles 25 1330 Rixensart / BE | 02 /
Hooker, Jacob Christopher Maria Theresiastraat 25/0014 3000 Leuven / BE | 03 /
Van Dal, Marcus Johannes Henricus Vlamingenstraat 80 3000 Leuven / BE | [2005/16] | Representative(s) | Bird, Ariane, et al Bird Goën & Co Wetenschapspark Arenberg Gaston Geenslaan 9 3001 Heverlee / BE | [N/P] |
Former [2005/16] | Bird, Ariane, et al Bird Goen & Co, Klein Dalenstraat 42A 3020 Winksele / BE | Application number, filing date | 04077816.9 | 13.10.2004 | [2005/16] | Priority number, date | BE20030000548 | 17.10.2003 Original published format: BE 200300548 | [2005/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1524688 | Date: | 20.04.2005 | Language: | EN | [2005/16] | Type: | B1 Patent specification | No.: | EP1524688 | Date: | 09.12.2009 | Language: | EN | [2009/50] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 17.01.2005 | Classification | IPC: | H01L21/8234 | [2005/16] | CPC: |
H01L21/28097 (EP,US);
H01L21/823418 (EP,US);
H01L21/823443 (EP,US);
H01L21/823814 (EP,US);
H01L21/823835 (EP,US);
H01L29/4975 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2005/16] | Title | German: | Herstellungsverfahren für Halbleiterbauelemente mit silizidierten Elektroden | [2005/16] | English: | Method for fabricating semiconductor devices having silicided electrodes | [2005/16] | French: | Méthode de fabrication de dispositifs semi-conducteurs comprenant des électrodes en siliciure | [2005/16] | Examination procedure | 23.09.2005 | Examination requested [2005/47] | 09.06.2008 | Despatch of a communication from the examining division (Time limit: M04) | 14.10.2008 | Reply to a communication from the examining division | 29.04.2009 | Communication of intention to grant the patent | 19.08.2009 | Fee for grant paid | 19.08.2009 | Fee for publishing/printing paid | Opposition(s) | 10.09.2010 | No opposition filed within time limit [2010/46] | Fees paid | Renewal fee | 22.09.2006 | Renewal fee patent year 03 | 19.10.2007 | Renewal fee patent year 04 | 20.10.2008 | Renewal fee patent year 05 | 28.10.2009 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 09.12.2009 | BE | 09.12.2009 | CY | 09.12.2009 | CZ | 09.12.2009 | DK | 09.12.2009 | EE | 09.12.2009 | FI | 09.12.2009 | IT | 09.12.2009 | NL | 09.12.2009 | PL | 09.12.2009 | RO | 09.12.2009 | SE | 09.12.2009 | SI | 09.12.2009 | SK | 09.12.2009 | TR | 09.12.2009 | BG | 09.03.2010 | GR | 10.03.2010 | ES | 20.03.2010 | PT | 09.04.2010 | HU | 10.06.2010 | [2012/47] |
Former [2012/42] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CY | 09.12.2009 | ||
CZ | 09.12.2009 | ||
DK | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
IT | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
SK | 09.12.2009 | ||
BG | 09.03.2010 | ||
GR | 10.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
HU | 10.06.2010 | ||
Former [2011/14] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CY | 09.12.2009 | ||
CZ | 09.12.2009 | ||
DK | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
IT | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
SK | 09.12.2009 | ||
BG | 09.03.2010 | ||
GR | 10.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2011/07] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CY | 09.12.2009 | ||
CZ | 09.12.2009 | ||
DK | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
SK | 09.12.2009 | ||
BG | 09.03.2010 | ||
GR | 10.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/50] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CY | 09.12.2009 | ||
CZ | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
SK | 09.12.2009 | ||
BG | 09.03.2010 | ||
GR | 10.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/39] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CZ | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
SK | 09.12.2009 | ||
BG | 09.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/38] | AT | 09.12.2009 | |
BE | 09.12.2009 | ||
CZ | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
BG | 09.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/36] | AT | 09.12.2009 | |
CZ | 09.12.2009 | ||
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
BG | 09.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/35] | AT | 09.12.2009 | |
EE | 09.12.2009 | ||
FI | 09.12.2009 | ||
NL | 09.12.2009 | ||
PL | 09.12.2009 | ||
RO | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
BG | 09.03.2010 | ||
ES | 20.03.2010 | ||
PT | 09.04.2010 | ||
Former [2010/32] | AT | 09.12.2009 | |
FI | 09.12.2009 | ||
PL | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
ES | 20.03.2010 | ||
Former [2010/30] | AT | 09.12.2009 | |
FI | 09.12.2009 | ||
PL | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
Former [2010/23] | FI | 09.12.2009 | |
PL | 09.12.2009 | ||
SE | 09.12.2009 | ||
SI | 09.12.2009 | ||
Former [2010/22] | FI | 09.12.2009 | |
SE | 09.12.2009 | Documents cited: | Search | [A]EP0935285 (IBM [US]) [A] 1,13* abstract *; | [A]US6200834 (BRONNER GARY B [US], et al) [A] 1,13 * abstract *; | [AD]EP1211729 (TEXAS INSTRUMENTS INC [US]) [AD] 1,13 * abstract *; | [A]US2002086491 (KIZILYALLI ISIK C [US], et al) [A] 1,13 * abstract * * paragraphs [0030] - [0034] *; | [A]US6512296 (GAUTHIER JR ROBERT J [US], et al) [A] 1,13 * abstract *; | [A]US2003143825 (MATSUO KOUJI [JP], et al) [A] 1,13 * abstract * * paragraphs [0033] - [0035] * | Examination | EP1328017 | by applicant | EP1211729 | US6440851 |