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EP1465245
European procedure
Extract from the Register of European Patents
EP About this file: EP1465245
| EP1465245 - Vapor Deposition of Benzotriazole (BTA) for protecting Copper Interconnects [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 28.07.2017 Database last updated on 10.05.2025 | Most recent event Tooltip | 28.07.2017 | No opposition filed within time limit | published on 30.08.2017 [2017/35] | Applicant(s) | For all designated states TEXAS INSTRUMENTS INC. P.O. Box 655474 13500 North Central Expressway Dallas, Texas 75265 / US | [2016/38] |
| Former [2004/41] | For all designated states Texas Instruments Inc. P.O. Box 655474 13500 North Central Expressway Dallas, Texas 75265 / US | Inventor(s) | 01 /
Xia, Changfeng 2505 Cima Hill Drive 75025, Plano / US | 02 /
Sivasothy, Arunthathi 749 Player Drive 75025, Plano / US | 03 /
Jackson, Ricky A. 3303 Foxcreek Drive 75082, Richardson / US | 04 /
Haider, Asad M. 9209 Longview Drive 75025, Plano / US | [2016/38] |
| Former [2004/41] | 01 /
Xia, Changfeng 2505 Cima Hill Drive 75025, Plano / US | ||
| 02 /
Sivasothy, Arunthathi 749 Player Drive 75025, Plano / US | |||
| 03 /
Jackson, Ricky A. 3303 Foxcreek Drive 75082, Richardson / US | |||
| 04 /
Haider, Asad M. 9209 Longview Drive 75025, Plano / US | Representative(s) | Zeller, Andreas, et al Texas Instruments Deutschland GmbH Haggertystraße 1 85356 Freising / DE | [2016/38] |
| Former [2013/18] | Holt, Michael, et al Texas Instruments Limited 3rd Floor 401 Grafton Gate Milton Keynes MK91AQ / GB | ||
| Former [2008/33] | Holt, Michael, et al Texas Instruments Limited European Patents Department 800 Pavilion Drive Northampton NN4 7YL / GB | ||
| Former [2004/41] | Holt, Michael, et al Texas Instruments Ltd., PO Box 5069 Northampton, Northamptonshire NN4 7ZE / GB | Application number, filing date | 04101319.4 | 31.03.2004 | [2004/41] | Priority number, date | US20030405590 | 01.04.2003 Original published format: US 405590 | [2004/41] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1465245 | Date: | 06.10.2004 | Language: | EN | [2004/41] | Type: | A3 Search report | No.: | EP1465245 | Date: | 25.08.2010 | [2010/34] | Type: | B1 Patent specification | No.: | EP1465245 | Date: | 21.09.2016 | Language: | EN | [2016/38] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 26.07.2010 | Classification | IPC: | H01L21/768, C23C14/12 | [2016/13] | CPC: |
C23C14/12 (EP,US);
H01L21/76838 (EP,US)
|
| Former IPC [2004/41] | H01L21/768 | Designated contracting states | DE, FR, GB [2016/38] |
| Former [2011/18] | DE, FR, GB | ||
| Former [2004/41] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Dampfabscheidung von Benzotriazol (BTA) zum Schutz von Kupferinterkonnekts | [2004/41] | English: | Vapor Deposition of Benzotriazole (BTA) for protecting Copper Interconnects | [2004/41] | French: | Depôt en phase vapeur de benzotriazole pour proteger des interconnexions en cuivre | [2004/41] | Examination procedure | 25.02.2011 | Examination requested [2011/14] | 26.02.2011 | Loss of particular rights, legal effect: designated state(s) | 06.04.2011 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | 27.05.2011 | Despatch of a communication from the examining division (Time limit: M06) | 16.01.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 21.03.2012 | Reply to a communication from the examining division | 29.03.2016 | Communication of intention to grant the patent | 04.08.2016 | Receipt of the translation of the claim(s) | 08.08.2016 | Fee for grant paid | 08.08.2016 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 27.05.2011 | Opposition(s) | 22.06.2017 | No opposition filed within time limit [2017/35] | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the examination report | 21.03.2012 | Request for further processing filed | 21.03.2012 | Full payment received (date of receipt of payment) Request granted | 30.03.2012 | Decision despatched | Fees paid | Renewal fee | 31.03.2006 | Renewal fee patent year 03 | 02.04.2007 | Renewal fee patent year 04 | 31.03.2008 | Renewal fee patent year 05 | 31.03.2009 | Renewal fee patent year 06 | 31.03.2010 | Renewal fee patent year 07 | 31.03.2011 | Renewal fee patent year 08 | 31.03.2012 | Renewal fee patent year 09 | 02.04.2013 | Renewal fee patent year 10 | 31.03.2014 | Renewal fee patent year 11 | 31.03.2015 | Renewal fee patent year 12 | 31.03.2016 | Renewal fee patent year 13 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPS5212636 (DAIWA KASEI KENKYUSHO) [A] 1-10* abstract *; | [XAI]JPH02125447 (HITACHI LTD, et al) [X] 1,9 * abstract * [A] 2-8 [I] 10 | by applicant | JPH02125447 |