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EP1513191

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EP About this file: EP1513191

EP1513191 - Heating apparatus having electrostatic adsorption function [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 17.05.2013 Database last updated on 05.10.2024
Most recent event Tooltip	17.05.2013	No opposition filed within time limit	published on 19.06.2013 [2013/25]
Applicant(s)	For all designated states Shin-Etsu Chemical Company, Ltd. 6-1, Ohtemachi 2-chome, Chiyoda-ku Tokyo 100-0004 / JP
	[2012/28]
Former [2005/10]	For all designated states Shin-Etsu Chemical Company, Ltd. 6-1, Ohtemachi 2-chome, Chiyoda-ku Tokyo 100-0004 / JP
Inventor(s)	01 / Kushihashi, Takuma, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
	02 / Kurosawa, Yukio, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
	03 / Seki, Masaki, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
	[2012/28]
Former [2005/10]	01 / Kushihashi, Takuma, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
	02 / Kurosawa, Yukio, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
	03 / Seki, Masaki, c/o Gunma Complex Shin-Etsu Chemical Co. Ltd. 2-13-1, Isobe Annaka-shi, Gunma-ken / JP
Representative(s)	Cooper, John, et al Murgitroyd & Company Scotland House 165-169 Scotland Street Glasgow G5 8PL / GB
	[N/P]
Former [2009/48]	Cooper, John, et al Murgitroyd & Company 165-169 Scotland Street Glasgow G5 8PL / GB
Former [2005/10]	Cooper, John, et al Murgitroyd & Company, Scotland House, 165-169 Scotland Street Glasgow G5 8PL / GB
Application number, filing date	04255100.2	25.08.2004
	[2005/10]
Priority number, date	JP20030209136	27.08.2003 Original published format: JP 2003209136
	[2005/10]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1513191
	Date:	09.03.2005
	Language:	EN
	[2005/10]
	Type:	A3 Search report
	No.:	EP1513191
	Date:	22.03.2006
	[2006/12]
	Type:	B1 Patent specification
	No.:	EP1513191
	Date:	11.07.2012
	Language:	EN
	[2012/28]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	06.02.2006
Classification	IPC:	H01L21/687, H01L21/683	[2012/12]
	CPC:	H01L21/68757 (EP,US); H01L21/67103 (EP,US); H01L21/6833 (EP,US)
	Former IPC [2005/10]	H01L21/00
Designated contracting states	DE, FR, GB [2006/48]
Former [2005/10]	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Title	German:	Heizvorrichtung mit elektrostatischer Adsorptionsfunktion	[2005/10]
	English:	Heating apparatus having electrostatic adsorption function	[2005/10]
	French:	Dispositif de chauffage comprenant une fonction d'adsorption électrostatique	[2005/10]
Examination procedure	15.05.2006	Examination requested [2006/26]
	08.08.2006	Despatch of a communication from the examining division (Time limit: M04)
	23.09.2006	Loss of particular rights, legal effect: designated state(s)
	07.12.2006	Reply to a communication from the examining division
	22.01.2007	Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
	15.03.2012	Communication of intention to grant the patent
	25.05.2012	Fee for grant paid
	25.05.2012	Fee for publishing/printing paid
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 08.08.2006
Opposition(s)	12.04.2013	No opposition filed within time limit [2013/25]
Fees paid	Renewal fee
	14.08.2006	Renewal fee patent year 03
	14.08.2007	Renewal fee patent year 04
	31.03.2008	Renewal fee patent year 05
	12.08.2009	Renewal fee patent year 06
	17.08.2010	Renewal fee patent year 07
	11.08.2011	Renewal fee patent year 08
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	02.11.2006	AT M01 Not yet paid
	02.11.2006	BE M01 Not yet paid
	02.11.2006	BG M01 Not yet paid
	02.11.2006	CH M01 Not yet paid
	02.11.2006	CY M01 Not yet paid
	02.11.2006	CZ M01 Not yet paid
	02.11.2006	DK M01 Not yet paid
	02.11.2006	EE M01 Not yet paid
	02.11.2006	ES M01 Not yet paid
	02.11.2006	FI M01 Not yet paid
	02.11.2006	GR M01 Not yet paid
	02.11.2006	HU M01 Not yet paid
	02.11.2006	IE M01 Not yet paid
	02.11.2006	IT M01 Not yet paid
	02.11.2006	LU M01 Not yet paid
	02.11.2006	MC M01 Not yet paid
	02.11.2006	NL M01 Not yet paid
	02.11.2006	PL M01 Not yet paid
	02.11.2006	PT M01 Not yet paid
	02.11.2006	RO M01 Not yet paid
	02.11.2006	SE M01 Not yet paid
	02.11.2006	SI M01 Not yet paid
	02.11.2006	SK M01 Not yet paid
	02.11.2006	TR M01 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]JPH09213774 ;
		[A]US5530616 (KITABAYASHI TETSUO [JP], et al) [A] 1-8 * abstract *;
		[A]US5591269 (ARAMI JUNICHI [JP], et al) [A] 1-8* abstract *;
		[A]US5665260 (KAWADA NOBUO [JP], et al) [A] 1-8 * abstract *;
		[A]WO9959201 (APPLIED MATERIALS INC [US]) [A] 1-8 * abstract *;
		[A]US2002044404 (KOSAKAI MAMORU [JP]) [A] 1-8 * abstract *;
		[Y]EP1220311 (ADVANCED CERAMICS INTERNAT COR [US]) [Y] 1-8 * abstract * * paragraph [0026] - paragraph [0028] *;
		[Y]US6491571 (OHNO MASASHI [JP], et al) [Y] 1-8 * abstract * * column 1, line 10 - column 5, line 35 *;
		[A]US2003107865 (MASUDA SHINSUKE [JP], et al) [A] 1-8 * abstract *
		[A] - PATENT ABSTRACTS OF JAPAN, (19971225), vol. 1997, no. 12, & JP09213774 A 19970815 (KYOCERA CORP) [A] 1-8 * abstract *

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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