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EP1598855
European procedure
Extract from the Register of European Patents
EP Citations: EP1598855
| Cited in | Search | Type: | Patent literature | Publication No.: | DD221563
[X] (MIKROELEKTRONIK ZT FORSCH TECH [DD]) [X] 1,9,48,52 * pages 10-14; figure 1 *; | Type: | Patent literature | Publication No.: | WO9949504
[X] (NIKON CORP [JP], et al) [X] 1,9,48,52 * the whole document *; | Type: | Patent literature | Publication No.: | WO0213194
[X] (KONINKL PHILIPS ELECTRONICS NV [NL]) [X] 37,43* page 11, line 10 - page 12, line 15; figures 3,4 *; | Type: | Patent literature | Publication No.: | WO2004055803
[E] (KONINKL PHILIPS ELECTRONICS NV [NL], et al) [E] 1,9,14,24,30,34,37,43 * pages 6-12; figures 2,3; claim 1 *; | Type: | Non-patent literature | Publication information: | [PX] - OWA S ET AL, "Immersion lithography", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (20030228), vol. 5040, no. 1, ISSN 0277-786X, pages 724 - 733, XP002294500 [PX] 1,9 * the whole document * | DOI: | http://dx.doi.org/10.1117/12.504599 | Cited in | International search | Type: | Patent literature | Publication No.: | JP2000058436
[A] (NIKON CORP); | Type: | Patent literature | Publication No.: | WO9949504
[A] (NIKON CORP [JP], et al); | Type: | Patent literature | Publication No.: | JPH11176727
[A] (NIKON CORP); | Type: | Patent literature | Publication No.: | JPH10340846
[A] (NIKON CORP); | Type: | Patent literature | Publication No.: | JPH10303114
[A] (NIKON CORP); | Type: | Patent literature | Publication No.: | JPH10255319
[A] (HITACHI MAXELL); | Type: | Patent literature | Publication No.: | JPH07220990
[A] (HITACHI LTD); | Type: | Patent literature | Publication No.: | JPH06124873
[A] (CANON KK); | Type: | Patent literature | Publication No.: | JPS6265326
[A] (HITACHI LTD); | Type: | Patent literature | Publication No.: | JPS57153433
[A] (HITACHI LTD) |