EP1598855 - EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.02.2016 Database last updated on 02.09.2024 | Most recent event Tooltip | 17.08.2018 | Lapse of the patent in a contracting state New state(s): BG | published on 19.09.2018 [2018/38] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2015/36] |
Former [2012/18] | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
Former [2010/30] | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
Former [2005/47] | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
Nagasaka, Hiroyuki c/o Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | 02 /
Owa, Soichi c/o Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | 03 /
Nishii, Yasufumi c/o Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | [2015/17] |
Former [2005/47] | 01 /
Nagasaka, Hiroyuki Nikon Corporation, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | ||
02 /
Owa, Soichi Nikon Corporation, 2-3, Marunouchi 2-chome Chiyoda-ku, Tokyo 100-8331 / JP | |||
03 /
Nishii, Yasufumi Nikon Corporation, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2015/17] |
Former [2005/47] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 04714910.9 | 26.02.2004 | [2005/47] | WO2004JP02295 | Priority number, date | JP20030049365 | 26.02.2003 Original published format: JP 2003049365 | JP20030110748 | 15.04.2003 Original published format: JP 2003110748 | JP20030320100 | 11.09.2003 Original published format: JP 2003320100 | [2005/47] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2004086468 | Date: | 07.10.2004 | Language: | EN | [2004/41] | Type: | A1 Application with search report | No.: | EP1598855 | Date: | 23.11.2005 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.10.2004 takes the place of the publication of the European patent application. | [2005/47] | Type: | B1 Patent specification | No.: | EP1598855 | Date: | 22.04.2015 | Language: | EN | [2015/17] | Search report(s) | International search report - published on: | JP | 07.10.2004 | (Supplementary) European search report - dispatched on: | EP | 25.07.2007 | Classification | IPC: | H01L21/027, G03F7/20 | [2005/47] | CPC: |
G03F7/70341 (EP,KR,US);
G03F7/2041 (KR);
G03F7/70733 (US);
G03F7/708 (EP,KR,US);
G03F7/7095 (EP,KR,US);
H01L21/0273 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2015/17] |
Former [2005/47] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | BELICHTUNGSVORRICHTUNG UND VERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG | [2005/47] | English: | EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS | [2005/47] | French: | APPAREIL ET PROCEDE D'EXPOSITION, PROCEDE DE PRODUCTION DE L'APPAREIL | [2005/47] | Entry into regional phase | 28.08.2005 | Translation filed | 25.08.2005 | National basic fee paid | 25.08.2005 | Search fee paid | 25.08.2005 | Designation fee(s) paid | 25.08.2005 | Examination fee paid | Examination procedure | 25.08.2005 | Examination requested [2005/47] | 04.03.2010 | Despatch of a communication from the examining division (Time limit: M06) | 06.09.2010 | Reply to a communication from the examining division | 18.10.2012 | Despatch of a communication from the examining division (Time limit: M06) | 29.04.2013 | Reply to a communication from the examining division | 11.04.2014 | Despatch of a communication from the examining division (Time limit: M04) | 21.08.2014 | Reply to a communication from the examining division | 12.11.2014 | Communication of intention to grant the patent | 12.03.2015 | Fee for grant paid | 12.03.2015 | Fee for publishing/printing paid | 12.03.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | EP12159205.9 / EP2466621 | EP12159206.7 / EP2466622 | EP12159207.5 / EP2466623 | EP12159208.3 / EP2466624 | EP12159209.1 / EP2466625 | EP15158780.5 / EP2945184 | EP15158782.1 / EP2945016 | EP17185716.2 / EP3301511 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.03.2010 | Opposition(s) | 25.01.2016 | No opposition filed within time limit [2016/13] | Fees paid | Renewal fee | 22.02.2006 | Renewal fee patent year 03 | 23.02.2007 | Renewal fee patent year 04 | 21.02.2008 | Renewal fee patent year 05 | 27.03.2008 | Renewal fee patent year 06 | 23.02.2010 | Renewal fee patent year 07 | 23.02.2011 | Renewal fee patent year 08 | 27.02.2012 | Renewal fee patent year 09 | 20.02.2013 | Renewal fee patent year 10 | 18.02.2014 | Renewal fee patent year 11 | 18.02.2015 | Renewal fee patent year 12 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 26.02.2004 | AT | 22.04.2015 | BE | 22.04.2015 | BG | 22.04.2015 | CY | 22.04.2015 | CZ | 22.04.2015 | DK | 22.04.2015 | EE | 22.04.2015 | ES | 22.04.2015 | FI | 22.04.2015 | IT | 22.04.2015 | MC | 22.04.2015 | RO | 22.04.2015 | SE | 22.04.2015 | SI | 22.04.2015 | SK | 22.04.2015 | TR | 22.04.2015 | GR | 23.07.2015 | PT | 24.08.2015 | [2018/38] |
Former [2018/33] | HU | 26.02.2004 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
TR | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2018/28] | HU | 26.02.2004 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2017/40] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/42] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/37] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/24] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/21] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/10] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
RO | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/09] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/07] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2015/51] | AT | 22.04.2015 | |
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2015/49] | ES | 22.04.2015 | |
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | Documents cited: | Search | [X]DD221563 (MIKROELEKTRONIK ZT FORSCH TECH [DD]) [X] 1,9,48,52 * pages 10-14; figure 1 *; | [X]WO9949504 (NIKON CORP [JP], et al) [X] 1,9,48,52 * the whole document *; | [X]WO0213194 (KONINKL PHILIPS ELECTRONICS NV [NL]) [X] 37,43* page 11, line 10 - page 12, line 15; figures 3,4 *; | [E]WO2004055803 (KONINKL PHILIPS ELECTRONICS NV [NL], et al) [E] 1,9,14,24,30,34,37,43 * pages 6-12; figures 2,3; claim 1 *; | [PX] - OWA S ET AL, "Immersion lithography", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (20030228), vol. 5040, no. 1, ISSN 0277-786X, pages 724 - 733, XP002294500 [PX] 1,9 * the whole document * DOI: http://dx.doi.org/10.1117/12.504599 | International search | [A]JP2000058436 (NIKON CORP); | [A]WO9949504 (NIKON CORP [JP], et al); | [A]JPH11176727 (NIKON CORP); | [A]JPH10340846 (NIKON CORP); | [A]JPH10303114 (NIKON CORP); | [A]JPH10255319 (HITACHI MAXELL); | [A]JPH07220990 (HITACHI LTD); | [A]JPH06124873 (CANON KK); | [A]JPS6265326 (HITACHI LTD); | [A]JPS57153433 (HITACHI LTD) |