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Extract from the Register of European Patents

EP About this file: EP1598855

EP1598855 - EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  26.02.2016
Database last updated on 02.09.2024
Most recent event   Tooltip17.08.2018Lapse of the patent in a contracting state
New state(s): BG		published on 19.09.2018  [2018/38]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2015/36]
Former [2012/18]For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Former [2010/30]For all designated states
NIKON CORPORATION
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Former [2005/47]For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / Nagasaka, Hiroyuki
c/o Nikon Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo 100-8331 / JP
02 / Owa, Soichi
c/o Nikon Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo 100-8331 / JP
03 / Nishii, Yasufumi
c/o Nikon Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo 100-8331 / JP
 [2015/17]
Former [2005/47]01 / Nagasaka, Hiroyuki
Nikon Corporation, 2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo 100-8331 / JP
02 / Owa, Soichi
Nikon Corporation, 2-3, Marunouchi 2-chome
Chiyoda-ku, Tokyo 100-8331 / JP
03 / Nishii, Yasufumi
Nikon Corporation, 2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo 100-8331 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2015/17]
Former [2005/47]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Application number, filing date04714910.926.02.2004
[2005/47]
WO2004JP02295
Priority number, dateJP2003004936526.02.2003         Original published format: JP 2003049365
JP2003011074815.04.2003         Original published format: JP 2003110748
JP2003032010011.09.2003         Original published format: JP 2003320100
[2005/47]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2004086468
Date:07.10.2004
Language:EN
[2004/41]
Type: A1 Application with search report 
No.:EP1598855
Date:23.11.2005
Language:EN
The application published by WIPO in one of the EPO official languages on 07.10.2004 takes the place of the publication of the European patent application.
[2005/47]
Type: B1 Patent specification 
No.:EP1598855
Date:22.04.2015
Language:EN
[2015/17]
Search report(s)International search report - published on:JP07.10.2004
(Supplementary) European search report - dispatched on:EP25.07.2007
ClassificationIPC:H01L21/027, G03F7/20
[2005/47]
CPC:
G03F7/70341 (EP,KR,US); G03F7/2041 (KR); G03F7/70733 (US);
G03F7/708 (EP,KR,US); G03F7/7095 (EP,KR,US); H01L21/0273 (KR)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   RO,   SE,   SI,   SK,   TR [2015/17]
Former [2005/47]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:BELICHTUNGSVORRICHTUNG UND VERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG[2005/47]
English:EXPOSURE APPARATUS AND METHOD, AND METHOD OF PRODUCING APPARATUS[2005/47]
French:APPAREIL ET PROCEDE D'EXPOSITION, PROCEDE DE PRODUCTION DE L'APPAREIL[2005/47]
Entry into regional phase28.08.2005Translation filed 
25.08.2005National basic fee paid 
25.08.2005Search fee paid 
25.08.2005Designation fee(s) paid 
25.08.2005Examination fee paid 
Examination procedure25.08.2005Examination requested  [2005/47]
04.03.2010Despatch of a communication from the examining division (Time limit: M06)
06.09.2010Reply to a communication from the examining division
18.10.2012Despatch of a communication from the examining division (Time limit: M06)
29.04.2013Reply to a communication from the examining division
11.04.2014Despatch of a communication from the examining division (Time limit: M04)
21.08.2014Reply to a communication from the examining division
12.11.2014Communication of intention to grant the patent
12.03.2015Fee for grant paid
12.03.2015Fee for publishing/printing paid
12.03.2015Receipt of the translation of the claim(s)
Divisional application(s)EP12159205.9  / EP2466621
EP12159206.7  / EP2466622
EP12159207.5  / EP2466623
EP12159208.3  / EP2466624
EP12159209.1  / EP2466625
EP15158780.5  / EP2945184
EP15158782.1  / EP2945016
EP17185716.2  / EP3301511
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  04.03.2010
Opposition(s)25.01.2016No opposition filed within time limit [2016/13]
Fees paidRenewal fee
22.02.2006Renewal fee patent year 03
23.02.2007Renewal fee patent year 04
21.02.2008Renewal fee patent year 05
27.03.2008Renewal fee patent year 06
23.02.2010Renewal fee patent year 07
23.02.2011Renewal fee patent year 08
27.02.2012Renewal fee patent year 09
20.02.2013Renewal fee patent year 10
18.02.2014Renewal fee patent year 11
18.02.2015Renewal fee patent year 12
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU26.02.2004
AT22.04.2015
BE22.04.2015
BG22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
TR22.04.2015
GR23.07.2015
PT24.08.2015
[2018/38]
Former [2018/33]HU26.02.2004
AT22.04.2015
BE22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
TR22.04.2015
GR23.07.2015
PT24.08.2015
Former [2018/28]HU26.02.2004
AT22.04.2015
BE22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2017/40]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/42]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/37]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/24]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/21]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/10]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
RO22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/09]AT22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/07]AT22.04.2015
DK22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2015/51]AT22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2015/49]ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Documents cited:Search[X]DD221563  (MIKROELEKTRONIK ZT FORSCH TECH [DD]) [X] 1,9,48,52 * pages 10-14; figure 1 *;
 [X]WO9949504  (NIKON CORP [JP], et al) [X] 1,9,48,52 * the whole document *;
 [X]WO0213194  (KONINKL PHILIPS ELECTRONICS NV [NL]) [X] 37,43* page 11, line 10 - page 12, line 15; figures 3,4 *;
 [E]WO2004055803  (KONINKL PHILIPS ELECTRONICS NV [NL], et al) [E] 1,9,14,24,30,34,37,43 * pages 6-12; figures 2,3; claim 1 *;
 [PX]  - OWA S ET AL, "Immersion lithography", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (20030228), vol. 5040, no. 1, ISSN 0277-786X, pages 724 - 733, XP002294500 [PX] 1,9 * the whole document *

DOI:   http://dx.doi.org/10.1117/12.504599
International search[A]JP2000058436  (NIKON CORP);
 [A]WO9949504  (NIKON CORP [JP], et al);
 [A]JPH11176727  (NIKON CORP);
 [A]JPH10340846  (NIKON CORP);
 [A]JPH10303114  (NIKON CORP);
 [A]JPH10255319  (HITACHI MAXELL);
 [A]JPH07220990  (HITACHI LTD);
 [A]JPH06124873  (CANON KK);
 [A]JPS6265326  (HITACHI LTD);
 [A]JPS57153433  (HITACHI LTD)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.