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EP1729332
European procedure
Extract from the Register of European Patents
EP About this file: EP1729332
| EP1729332 - SCHEDULE CONTROL METHOD IN SPIN ETCHING [Right-click to bookmark this link] | |||
| Former [2006/49] | SCHEDULE CONTROL METHOD IN SPIN ETCHING AND SPIN ETCHING SYSTEM | ||
| [2016/20] | Status | No opposition filed within time limit Status updated on 18.08.2017 Database last updated on 09.04.2026 | Most recent event Tooltip | 18.08.2017 | No opposition filed within time limit | published on 20.09.2017 [2017/38] | Applicant(s) | For all designated states Mimasu Semiconductor Industry Co., Ltd. 2174-1, Hodota-machi Takasaki-shi, Gunma 370-3533 / JP | [2016/41] |
| Former [2006/49] | For all designated states Mimasu Semiconductor Industry Co., Ltd. 2174-1, Hodota-machi Takasaki-shi, Gunma 370-3533 / JP | Inventor(s) | 01 /
TSUCHIYA, Masato MIMASU SEMICONDUCTOR Eng. Div. 1909-1, Munataka Gunma-machi, Gunma-gun, Gunma 3703521 / JP | 02 /
OGASAWARA, Syunichi MIMASU SEMICONDUCTOR Eng. Div. 1909-1, Munataka Gunma-machi, Gunma-gun, Gunma 3703521 / JP | [2016/41] |
| Former [2006/49] | 01 /
TSUCHIYA, Masato MIMASU SEMICONDUCTOR Eng. Div., 1909-1, Munataka Gunma-machi, Gunma-gun, Gunma 3703521 / JP | ||
| 02 /
OGASAWARA, Syunichi MIMASU SEMICONDUCTOR Eng. Div., 1909-1, Munataka Gunma-machi, Gunma-gun, Gunma 3703521 / JP | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstraße 4 80802 München / DE | [2016/41] |
| Former [2006/49] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 04722390.4 | 22.03.2004 | [2006/49] | WO2004JP03817 | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2005091346 | Date: | 29.09.2005 | Language: | EN | [2005/39] | Type: | A1 Application with search report | No.: | EP1729332 | Date: | 06.12.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 29.09.2005 takes the place of the publication of the European patent application. | [2006/49] | Type: | B1 Patent specification | No.: | EP1729332 | Date: | 12.10.2016 | Language: | EN | [2016/41] | Search report(s) | International search report - published on: | JP | 29.09.2005 | (Supplementary) European search report - dispatched on: | EP | 16.08.2010 | Classification | IPC: | H01L21/66, H01L21/306 | [2016/20] | CPC: |
H10P74/23 (EP,US);
H10P50/242 (KR);
H10P50/642 (EP,US)
|
| Former IPC [2006/49] | H01L21/306 | Designated contracting states | DE, FR, GB [2016/41] |
| Former [2007/26] | DE, FR, GB | ||
| Former [2006/49] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | ABLAUFPLANUNGS-STEUERVERFAHREN BEIM SPIN-ÄTZEN | [2016/20] | English: | SCHEDULE CONTROL METHOD IN SPIN ETCHING | [2016/20] | French: | PROCEDE DE CONTROLE DE PROGRAMME LORS D'UNE GRAVURE SPIN | [2016/20] |
| Former [2006/49] | ABLAUFPLANUNGS-STEUERVERFAHREN BEIM SPIN-ÄTZEN UND SPIN-ÄTZSYSTEM | ||
| Former [2006/49] | SCHEDULE CONTROL METHOD IN SPIN ETCHING AND SPIN ETCHING SYSTEM | ||
| Former [2006/49] | PROCEDE DE CONTROLE DE PROGRAMME DANS UN SYSTEME DE GRAVURE SPIN ET GRAVURE SPIN | Entry into regional phase | 29.08.2006 | Translation filed | 29.08.2006 | National basic fee paid | 29.08.2006 | Search fee paid | 29.08.2006 | Designation fee(s) paid | 29.08.2006 | Examination fee paid | Examination procedure | 29.08.2006 | Examination requested [2006/49] | 04.11.2010 | Despatch of a communication from the examining division (Time limit: M04) | 11.03.2011 | Reply to a communication from the examining division | 21.12.2011 | Despatch of a communication from the examining division (Time limit: M04) | 12.04.2012 | Reply to a communication from the examining division | 04.06.2012 | Despatch of a communication from the examining division (Time limit: M04) | 09.10.2012 | Reply to a communication from the examining division | 08.01.2013 | Despatch of a communication from the examining division (Time limit: M04) | 13.05.2013 | Reply to a communication from the examining division | 30.01.2014 | Despatch of a communication from the examining division (Time limit: M04) | 23.04.2014 | Reply to a communication from the examining division | 06.10.2015 | Despatch of a communication from the examining division (Time limit: M04) | 05.02.2016 | Reply to a communication from the examining division | 11.05.2016 | Communication of intention to grant the patent | 29.08.2016 | Fee for grant paid | 29.08.2016 | Fee for publishing/printing paid | 29.08.2016 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.11.2010 | Opposition(s) | 13.07.2017 | No opposition filed within time limit [2017/38] | Fees paid | Renewal fee | 29.08.2006 | Renewal fee patent year 03 | 14.03.2007 | Renewal fee patent year 04 | 13.03.2008 | Renewal fee patent year 05 | 13.03.2009 | Renewal fee patent year 06 | 26.03.2010 | Renewal fee patent year 07 | 24.03.2011 | Renewal fee patent year 08 | 23.03.2012 | Renewal fee patent year 09 | 26.03.2013 | Renewal fee patent year 10 | 21.03.2014 | Renewal fee patent year 11 | 24.03.2015 | Renewal fee patent year 12 | 25.03.2016 | Renewal fee patent year 13 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y] JPH01309332 (TOYO ELECTRIC MFG CO LTD et al.) [Y] 1-5 * abstract * | [Y] US2002072235 (HAGA SADAO et al.) [Y] 1-4 * paragraphs [0044] , [0045] * | [Y] JPH01236633 (ROHM CO LTD et al.) [Y] 5 * abstract * | [Y] DE19641070 (WACKER SILTRONIC HALBLEITERMAT et al.) [Y] 1-5 * column 3, line 1 - line 17 * * column 4, line 52 - line 62 * | [Y] US4903717 (SUMNITSCH FRANZ et al.) [Y] 1-5 * column 1, line 17 - line 22; figure 3 * | [A] US5788871 (HUH YUN JUN et al.) [A] 1,2,5 * abstract * | Examination | US2003121889 | US2002142619 |