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Extract from the Register of European Patents

EP About this file: EP1633904

EP1633904 - METHODS FOR FORMING ALUMINUM CONTAINING FILMS UTILIZING AMINO ALUMINUM PRECURSORS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.12.2009
Database last updated on 20.09.2024
Most recent event   Tooltip07.10.2011Lapse of the patent in a contracting state
New state(s): CY, TR		published on 09.11.2011  [2011/45]
Applicant(s)For all designated states
L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
75, Quai d'Orsay
75007 Paris / FR
[N/P]
Former [2007/26]For all designated states
L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
75, quai d'Orsay
75007 Paris / FR
Former [2007/17]For all designated states
L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
75, Quai d'Orsay
75321 Paris Cedex 07 / FR
Former [2006/11]For all designated states
L'air liquide, Société anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procédés G. Claude
75 quai d'Orsay
75321 Paris Cedex 07 / FR
Inventor(s)01 / JURSICH, Gregory, M.
112 Tuttle Avenue
Clarendon Hills, IL 60514 / US
02 / INMAN, Ronald, S.
4540 Warsaw Avenue
Lyons, IL 60534 / US
 [2006/11]
Representative(s)Vesin, Jacques
L'Air Liquide S.A. Service Propriété Industrielle, 75 Quai d'Orsay
75321 Paris Cedex 07 / FR
[2008/32]
Former [2006/11]Vesin, Jacques
L'Air Liquide, Service Propriété Intellectuelle, 75 Quai d'Orsay
75321 Paris Cedex 07 / FR
Application number, filing date04733869.419.05.2004
[2006/11]
WO2004IB01642
Priority number, dateUS20030476273P05.06.2003         Original published format: US 476273 P
US20030514757P27.10.2003         Original published format: US 514757 P
US2004084457913.05.2004         Original published format: US 844579
[2006/11]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2004108985
Date:16.12.2004
Language:EN
[2004/51]
Type: A2 Application without search report 
No.:EP1633904
Date:15.03.2006
Language:EN
The application published by WIPO in one of the EPO official languages on 16.12.2004 takes the place of the publication of the European patent application.
[2006/11]
Type: B1 Patent specification 
No.:EP1633904
Date:11.02.2009
Language:EN
[2009/07]
Search report(s)International search report - published on:EP30.06.2005
ClassificationIPC:C23C16/40, C23C16/34, C23C16/30, H01L21/316
[2006/11]
CPC:
C23C16/45553 (EP,KR,US); H01L21/31 (KR); C23C16/403 (EP,KR,US);
H01L21/02178 (EP,KR,US); H01L21/02181 (EP,KR,US); H01L21/02194 (EP,KR,US);
H01L21/02205 (EP,KR,US); H01L21/0228 (EP,KR,US); H01L21/3145 (US);
H01L21/31616 (US); H01L21/31645 (US); H01L21/318 (US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2006/11]
Extension statesALNot yet paid
HRNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG ALUMINIUMHALTIGER FILME MITTELS AMINO-ALUMINIUM PRECURSOREN[2006/11]
English:METHODS FOR FORMING ALUMINUM CONTAINING FILMS UTILIZING AMINO ALUMINUM PRECURSORS[2006/11]
French:PROCEDES DE FORMATION DE COUCHES A BASE D'ALUMINIUM A L'AIDE DE PRECURSEURS AMINO-ALUMINES[2006/11]
Entry into regional phase05.01.2006National basic fee paid 
05.01.2006Designation fee(s) paid 
05.01.2006Examination fee paid 
Examination procedure05.01.2006Examination requested  [2006/11]
21.12.2007Despatch of a communication from the examining division (Time limit: M04)
27.03.2008Reply to a communication from the examining division
11.09.2008Communication of intention to grant the patent
12.12.2008Fee for grant paid
12.12.2008Fee for publishing/printing paid
Opposition(s)12.11.2009No opposition filed within time limit [2010/03]
Fees paidRenewal fee
13.04.2006Renewal fee patent year 03
16.04.2007Renewal fee patent year 04
17.04.2008Renewal fee patent year 05
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT11.02.2009
CY11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
IT11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
TR11.02.2009
BG11.05.2009
SE11.05.2009
GR12.05.2009
IE19.05.2009
LU19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
HU12.08.2009
[2011/44]
Former [2011/32]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
IT11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
GR12.05.2009
IE19.05.2009
LU19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
HU12.08.2009
Former [2011/21]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
IT11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
GR12.05.2009
IE19.05.2009
LU19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
Former [2011/15]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
IT11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
GR12.05.2009
IE19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
Former [2010/50]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
GR12.05.2009
IE19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
Former [2010/21]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
IE19.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
Former [2010/09]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
BG11.05.2009
SE11.05.2009
ES22.05.2009
CH31.05.2009
LI31.05.2009
MC31.05.2009
PT13.07.2009
Former [2010/04]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
SE11.05.2009
ES22.05.2009
MC31.05.2009
PT13.07.2009
Former [2009/50]AT11.02.2009
CZ11.02.2009
DK11.02.2009
EE11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
RO11.02.2009
SI11.02.2009
SK11.02.2009
SE11.05.2009
ES22.05.2009
PT13.07.2009
Former [2009/46]AT11.02.2009
DK11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
SI11.02.2009
SE11.05.2009
ES22.05.2009
Former [2009/41]AT11.02.2009
FI11.02.2009
NL11.02.2009
PL11.02.2009
SI11.02.2009
SE11.05.2009
ES22.05.2009
Former [2009/36]FI11.02.2009
NL11.02.2009
SI11.02.2009
ES22.05.2009
Former [2009/35]NL11.02.2009
ES22.05.2009
Cited inInternational search[YA]JPS62276832  ;
 [XY]WO0227063  (HARVARD COLLEGE [US], et al) [X] 1-8,12,13 * examples 12,14,19,21; claims 1,31,32; tables 1,2 * [Y] 9-11;
 [YA]  - PATENT ABSTRACTS OF JAPAN, (19880519), vol. 0121, no. 67, Database accession no. (E - 610), & JP62276832 A 19871201 (HITACHI LTD) [Y] 9-11 * abstract * [A] 1-4
 [A]  - RIE K -T ET AL, "Plasma-CVD of TiCN and ZrCN films on light metals", SURFACE AND COATINGS TECHNOLOGY ELSEVIER SWITZERLAND, (19990201), vol. 112, no. 1-3, ISSN 0257-8972, pages 226 - 229, XP002305367 [A] 1-4 * paragraph [0002]; figure 1; table 1 *
 [A]  - TAKAHASHI Y ET AL, "Low temperature deposition of a refractory aluminium compound by the thermal decomposition of aluminium dialkylamides", SURFACE SCIENCE NETHERLANDS, (19790702), vol. 86, no. 2, ISSN 0039-6028, pages 238 - 245, XP008038340 [A] 1-13 * page 238 - page 240 *

DOI:   http://dx.doi.org/10.1016/0039-6028(79)90400-X
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.