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Extract from the Register of European Patents

EP About this file: EP1672093

EP1672093 - FILM-FORMING APPARATUS AND FILM-FORMING METHOD [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  16.05.2014
Database last updated on 13.09.2024
Most recent event   Tooltip18.07.2014Lapse of the patent in a contracting state
New state(s): GB		published on 20.08.2014  [2014/34]
Applicant(s)For all designated states
TOKYO ELECTRON LIMITED
3-6 Akasaka, 5-chome, Minato-ku
Tokyo 107-8481 / JP
For all designated states
SAMUKAWA, Seiji
3-52, Aza Yoshinariyama, Aoba-ku Imosawa
Sendai-shi, Miyagi 9893212 / JP
[2006/25]
Inventor(s)01 / SAMUKAWA, Seiji
3-52, Azayoshinariyama
Imosawa, Aoba-ku
Sendai-shi, Miyagi 989-3212 / JP
02 / NOZAWA, Toshihisa c/o Tokyo Electron AT Limited
1-8, Fuso-cho
Amagasaki City Hyogo 660-0891 / JP
 [2013/28]
Former [2006/25]01 / SAMUKAWA, Seiji
3-52, Azayoshinariyama Imosawa, Aoba-ku
Sendai-shi, Miyagi 989-3212 / JP
02 / NOZAWA, Toshihisa c/o Tokyo Electron AT Limited
1-8, Fuso-cho
Amagasaki City Hyogo 660-0891 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastrasse 30
81925 München / DE
[N/P]
Former [2013/28]HOFFMANN EITLE
Patent- und Rechtsanwälte
Arabellastrasse 4
81925 München / DE
Former [2008/31]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Former [2006/25]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Application number, filing date04773039.514.09.2004
[2006/25]
WO2004JP13357
Priority number, dateJP2003032500417.09.2003         Original published format: JP 2003325004
[2006/25]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2005028703
Date:31.03.2005
Language:EN
[2005/13]
Type: A1 Application with search report 
No.:EP1672093
Date:21.06.2006
Language:EN
The application published by WIPO in one of the EPO official languages on 31.03.2005 takes the place of the publication of the European patent application.
[2006/25]
Type: B1 Patent specification 
No.:EP1672093
Date:10.07.2013
Language:EN
[2013/28]
Search report(s)International search report - published on:JP31.03.2005
(Supplementary) European search report - dispatched on:EP16.03.2007
ClassificationIPC:C23C16/455, H01L21/31
[2006/25]
CPC:
H01J37/32192 (EP,US); C23C16/455 (KR); C23C16/452 (EP,US);
C23C16/5096 (EP,US); C23C16/511 (EP,US); H01J37/32357 (EP,US);
H01L21/02 (KR); H01L21/31 (KR); H01L21/02274 (EP,KR,US);
H01L21/3145 (US) (-)
Designated contracting statesDE,   FR,   GB,   IT,   NL [2006/52]
Former [2006/25]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:FILMBILDUNGSVORRICHTUNG UND FILMBILDUNGSVERFAHREN[2006/25]
English:FILM-FORMING APPARATUS AND FILM-FORMING METHOD[2006/25]
French:APPAREIL ET PROCEDE DE FORMATION DE FILMS[2006/25]
Entry into regional phase15.03.2006Translation filed 
15.03.2006National basic fee paid 
15.03.2006Search fee paid 
15.03.2006Designation fee(s) paid 
15.03.2006Examination fee paid 
Examination procedure15.03.2006Examination requested  [2006/25]
26.06.2007Despatch of a communication from the examining division (Time limit: M06)
07.01.2008Reply to a communication from the examining division
11.03.2008Despatch of a communication from the examining division (Time limit: M06)
22.09.2008Reply to a communication from the examining division
05.02.2009Despatch of a communication from the examining division (Time limit: M04)
15.06.2009Reply to a communication from the examining division
15.07.2009Despatch of a communication from the examining division (Time limit: M02)
21.09.2009Reply to a communication from the examining division
18.02.2013Communication of intention to grant the patent
24.05.2013Fee for grant paid
24.05.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  26.06.2007
Opposition(s)11.04.2014No opposition filed within time limit [2014/25]
Fees paidRenewal fee
21.09.2006Renewal fee patent year 03
24.09.2007Renewal fee patent year 04
27.03.2008Renewal fee patent year 05
25.09.2009Renewal fee patent year 06
22.09.2010Renewal fee patent year 07
27.09.2011Renewal fee patent year 08
17.09.2012Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipIT10.07.2013
NL10.07.2013
GB10.10.2013
[2014/34]
Former [2014/24]IT10.07.2013
NL10.07.2013
Former [2014/14]NL10.07.2013
Documents cited:Search[A]US4563367  (SHERMAN ARTHUR [US]) [A] 1-17 * column 4, line 49 - line 68; figures 4-7 * * column 8, line 44 - line 68 *;
 [A]US6162323  (KOSHIMIZU CHISHIO [JP]) [A] 1-17* the whole document *;
 [X]US2001042512  (XU GE [JP], et al) [X] 1-17 * paragraphs [0017] - [0022] - [0030] - [0034] - [0045] , [0046]; figures 1-3; claim 1 *;
 [X]US2002006478  (YUDA KATSUHISA [JP], et al) [X] 1-17 * paragraph [0070] - paragraph [0096]; figures 2-4 *;
 [XA]US2002068458  (CHIANG TONY P [US], et al) [X] 1,2,9-12,17 * paragraph [0025] - paragraph [0029]; figure 1 * [A] 3-8,13-16;
 [XA]US2003118748  (KUMAGAI AKIRA [JP], et al) [X] 11,13,14 * paragraph [0022] - paragraph [0025]; figures 1-3 * [A] 1-10,12,15-17
International search[X]JP2002016056  (NEC CORP, et al);
 [Y]JPH06260434  (NISSIN ELECTRIC CO LTD);
 [Y]JPH06236850  (SONY CORP);
 [X]JP2000144421  (TOKYO ELECTRON LTD);
 [X]JP2000345349  (ANELVA CORP)
ExaminationEP1300878
 EP1300875
by applicantUS2001042512
 US2002068458
 JP2002539326
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.