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Extract from the Register of European Patents

EP About this file: EP1678352

EP1678352 - METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  24.02.2017
Database last updated on 14.11.2024
FormerExamination is in progress
Status updated on  22.11.2016
Most recent event   Tooltip24.02.2017Application deemed to be withdrawnpublished on 29.03.2017  [2017/13]
Applicant(s)For all designated states
Nexx Systems, Inc.
5 Suburban Park Drive
Billerica, MA 01821-3904 / US
[2006/28]
Inventor(s)01 / KEIGLER, Arthur
20 Pine Plain Road
Wellesley, MA 02481 / US
02 / LIU, ZHENQUI
Northboro, MA 01532 / US
03 / HARRELL, John
166 Richards Avenue
Paxton, MA01612 / US
04 / WU, Qunwei
Westford, MA 01886 / US
 [2007/28]
Former [2007/15]01 / KEIGLER, Arthur
20 Pine Plain Road
Wellesley, MA 02481 / US
02 / LIU, ZHENQUI
Northboro, MA 01532 / US
03 / * * *
04 / WU, Qunwei
Westford, MA 01886 / US
Former [2006/28]01 / KEIGLER, Arthur
20 Pine Plain Road
Wellesley, MA 02481 / US
02 / LIU, ZHENQUI
Northboro, MA 01532 / US
03 / HARRELL, John
Paxton, MA01612 / US
04 / WU, Qunwei
Westford, MA 01886 / US
Representative(s)Ipside
29, rue de Lisbonne
75008 Paris / FR
[N/P]
Former [2010/21]Marconnet, Sébastien, et al
8 place du Ponceau
95031 Cergy Pontoise Cedex / FR
Former [2008/23]Lawrence, John
Barker Brettell LLP 138 Hagley Road Edgbaston Birmingham
B16 9PW / GB
Former [2006/28]Lawrence, John
Barker Brettell 138 Hagley Road Edgbaston
Birmingham B16 9PW / GB
Application number, filing date04796198.222.10.2004
[2006/28]
WO2004US35163
Priority number, dateUS20030513761P22.10.2003         Original published format: US 513761 P
[2006/28]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2005042804
Date:12.05.2005
Language:EN
[2005/19]
Type: A2 Application without search report 
No.:EP1678352
Date:12.07.2006
Language:EN
The application published by WIPO in one of the EPO official languages on 12.05.2005 takes the place of the publication of the European patent application.
[2006/28]
Search report(s)International search report - published on:EP23.02.2006
ClassificationIPC:C25D7/12, C25D17/00, C25D21/10, C25D21/12
[2006/28]
CPC:
C25D17/001 (EP,US); C25D17/005 (EP,US); C25D17/06 (EP,US);
C25D21/10 (US); C25D21/12 (EP,US); C25D5/003 (EP);
C25D7/123 (EP,US); H01L21/67023 (EP,US); H01L21/67126 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2006/28]
Extension statesALNot yet paid
HRNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
TitleGerman:VERFAHREN UND VORRICHTUNG ZUR FLUIDVERARBEITUNG EINES WERKSTÜCKS[2006/28]
English:METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE[2006/28]
French:PROCEDE ET DISPOSITIF DESTINES AU TRAITEMENT D'UNE PIECE A L'AIDE D'UN FLUIDE[2006/28]
Entry into regional phase16.05.2006National basic fee paid 
16.05.2006Designation fee(s) paid 
16.05.2006Examination fee paid 
Examination procedure13.04.2006Amendment by applicant (claims and/or description)
16.05.2006Examination requested  [2006/28]
19.04.2011Despatch of a communication from the examining division (Time limit: M06)
20.10.2011Reply to a communication from the examining division
17.06.2016Despatch of a communication from the examining division (Time limit: M04)
28.10.2016Application deemed to be withdrawn, date of legal effect  [2017/13]
23.11.2016Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2017/13]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  19.04.2011
Fees paidRenewal fee
05.10.2006Renewal fee patent year 03
15.10.2007Renewal fee patent year 04
07.10.2008Renewal fee patent year 05
26.10.2009Renewal fee patent year 06
08.09.2010Renewal fee patent year 07
25.10.2011Renewal fee patent year 08
31.10.2012Renewal fee patent year 09
30.10.2013Renewal fee patent year 10
29.10.2014Renewal fee patent year 11
26.10.2015Renewal fee patent year 12
Penalty fee
Additional fee for renewal fee
31.10.201613   M06   Not yet paid
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Cited inInternational search[X]US5516412  (ANDRICACOS ET AL) [X] 1-31,63-91,93 * column 2, line 61 - column 5, line 49; figures 1-3 *;
 [A]WO02083995  (ARTHUR, KEIGLER) [A] 1-31,63-91,93 * page 14, line 19 - page 15, line 16 * * page 18, line 3 - page 20, line 6 *;
 [A]US6379511  (FATULA JOSEPH J ET AL) [A] 1-31,63-91,93 * column 2, line 49 - line 59; figure 1 * * column 3, line 44 - line 54; figure 2 * * column 4, line 28 - line 37; figure 6 * * column 4, line 52 - line 65 *
ExaminationUS6261426
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.