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EP1725344
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EP About this file: EP1725344
| EP1725344 - SYSTEM, METHOD AND APPARATUS FOR SELF-CLEANING DRY ETCH [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.12.2011 Database last updated on 18.11.2024 | Most recent event Tooltip | 02.12.2011 | Application deemed to be withdrawn | published on 04.01.2012 [2012/01] | Applicant(s) | For all designated states LAM RESEARCH CORPORATION 4650 Cushing Parkway Fremont, CA 94538 / US | [2006/48] | Inventor(s) | 01 /
BAILEY, Andrew, D., III 5167 Northway Road Pleasanton, CA 94566 / US | 02 /
LOHOKARE, Shrikant, P. 35141 Woodbridge Place Fremont, CA 94536 / US | 03 /
HOWALD, Arthur, M. 4233 Cabernet Court Pleasanton, CA 94566 / US | 04 /
KIM, Yunsang 4650 Cushing Parkway Fremont -CA 94538 / US | [2007/11] |
| Former [2006/48] | 01 /
BAILEY, Andrew, D., III 5167 Northway Road Pleasanton, CA 94566 / US | ||
| 02 /
LOHOKARE, Shrikant, P. 35141 Woodbridge Place Fremont, CA 94536 / US | |||
| 03 /
HOWALD, Arthur, M. 4233 Cabernet Court Pleasanton, CA 94566 / US | |||
| 04 /
KIM, Yunsang 3648 Gleason Avenue San Jose, CA 95130 / US | Representative(s) | Wombwell, Francis, et al Forresters 15, Hamilton Square Birkenhead Merseyside CH41 6BR / GB | [N/P] |
| Former [2006/48] | Wombwell, Francis, et al Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside CH41 6BR / GB | Application number, filing date | 04815901.6 | 30.12.2004 | [2006/48] | WO2004US43911 | Priority number, date | US20040802460 | 16.03.2004 Original published format: US 802460 | [2006/48] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2005094244 | Date: | 13.10.2005 | Language: | EN | [2005/41] | Type: | A2 Application without search report | No.: | EP1725344 | Date: | 29.11.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 13.10.2005 takes the place of the publication of the European patent application. | [2006/48] | Search report(s) | International search report - published on: | US | 30.03.2006 | Classification | IPC: | B08B6/00, B08B9/00, H01L21/302, B44C1/22 | [2006/48] | CPC: |
B08B7/00 (EP,US);
B08B9/00 (KR);
B08B7/0035 (EP,US);
B08B7/0071 (EP,US);
B44C1/22 (KR);
H01J37/3244 (EP,US);
H01J37/32522 (EP,US);
H01J37/32862 (EP,US);
H01L21/302 (KR);
H01L21/32115 (EP,US);
H01L21/32136 (EP,US);
H01L21/67034 (EP,US);
H01L21/67051 (EP,US);
H01L21/67069 (EP,US);
H01L21/6708 (EP,US);
H01L21/7684 (EP,US);
H01J2237/022 (EP,US);
H01L21/3065 (EP,US);
Y10S438/905 (EP,US)
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| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/48] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | SYSTEM, VERFAHREN UND VORRICHTUNG FÜR TROCKENÄTZUNG MIT SELBSTREINIGUNG | [2006/48] | English: | SYSTEM, METHOD AND APPARATUS FOR SELF-CLEANING DRY ETCH | [2006/48] | French: | SYSTEME, PROCEDE ET APPAREIL DE GRAVURE A SEC AUTONETTOYANTE | [2006/48] | Entry into regional phase | 29.09.2006 | National basic fee paid | 29.09.2006 | Search fee paid | 29.09.2006 | Designation fee(s) paid | 29.09.2006 | Examination fee paid | Examination procedure | 29.09.2006 | Examination requested [2006/48] | 22.11.2006 | Amendment by applicant (claims and/or description) | 01.07.2011 | Application deemed to be withdrawn, date of legal effect [2012/01] | 17.08.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2012/01] | Fees paid | Renewal fee | 27.12.2006 | Renewal fee patent year 03 | 24.12.2007 | Renewal fee patent year 04 | 24.12.2008 | Renewal fee patent year 05 | 28.12.2009 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.12.2010 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]US6352081 (LU DANNY CHIEN [US], et al); | [Y]US2003029473 (SUN SHENG [US]); | [X]US6699399 (QIAN XUE-YU [US], et al) |