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EP1693886

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Extract from the Register of European Patents

EP About this file: EP1693886

EP1693886 - SUBSTRATE TREATMENT DEVICE CONTROL METHOD AND SUBSTRATE TREATMENT DEVICE [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 03.10.2014 Database last updated on 25.09.2024
Most recent event Tooltip	03.10.2014	Application deemed to be withdrawn	published on 05.11.2014 [2014/45]
Applicant(s)	For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku Tokyo 107-8481 / JP
	[N/P]
Former [2006/34]	For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku Tokyo 107-8481 / JP
Inventor(s)	01 / SHINOZUKA, S. Tokyo Elec.Kyushu Limited Koshi Plant 1-1, Fukuhara, Koshi-machi Kikuchi-gun, Kumamoto 861-1116 / JP
	02 / WADA, S. Tokyo Electron Kyushu Limited Koshi Plant 1-1, Fukuhara, Koshi-machi Kikuchi-gun, Kumamoto 861-1116 / JP
	03 / YAMASHITA, Masami 2655, Tsukure Kikuyo-machi, Kikuchi-gun Kumamoto 869-1197 / JP
	[2006/34]
Representative(s)	Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE
	[N/P]
Former [2006/34]	HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE
Application number, filing date	04820143.8	30.11.2004
	[2006/34]
	WO2004JP17752
Priority number, date	JP20030410105	09.12.2003 Original published format: JP 2003410105
	[2006/34]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2005057633
	Date:	23.06.2005
	Language:	EN
	[2005/25]
	Type:	A1 Application with search report
	No.:	EP1693886
	Date:	23.08.2006
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 23.06.2005 takes the place of the publication of the European patent application.
	[2006/34]
Search report(s)	International search report - published on:	JP	23.06.2005
	(Supplementary) European search report - dispatched on:	EP	20.07.2011
Classification	IPC:	H01L21/027, G03F7/16, H01L21/00, H01L21/68	[2011/33]
	CPC:	H01L21/67745 (EP,KR,US); H01L21/67276 (EP,KR,US); G03F7/162 (EP,KR,US); G03F7/3021 (EP,KR,US); H01L21/67253 (KR)
	Former IPC [2006/34]	H01L21/027, G03F7/16
Designated contracting states	DE, FR [2007/12]
Former [2006/34]	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Extension states	AL	Not yet paid
	HR	Not yet paid
	LT	Not yet paid
	LV	Not yet paid
	MK	Not yet paid
	YU	Not yet paid
Title	German:	SUBSTRATBEHANDLUNGS-EINRICHTUNGSSTEUERVERFAHREN UND SUBSTRATBEHANDLUNGSEINRICHTUNG	[2006/34]
	English:	SUBSTRATE TREATMENT DEVICE CONTROL METHOD AND SUBSTRATE TREATMENT DEVICE	[2006/34]
	French:	PROCEDE DE COMMANDE DE DISPOSITIF DE TRAITEMENT DE SURFACE ET DISPOSITIF DE TRAITEMENT DE SURFACE	[2006/34]
Entry into regional phase	08.06.2006	Translation filed
	08.06.2006	National basic fee paid
	08.06.2006	Search fee paid
	08.06.2006	Designation fee(s) paid
	08.06.2006	Examination fee paid
Examination procedure	08.06.2006	Examination requested [2006/34]
	25.02.2013	Despatch of a communication from the examining division (Time limit: M04)
	25.06.2013	Reply to a communication from the examining division
	03.06.2014	Application deemed to be withdrawn, date of legal effect [2014/45]
	30.06.2014	Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2014/45]
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 25.02.2013
Fees paid	Renewal fee
	23.11.2006	Renewal fee patent year 03
	26.11.2007	Renewal fee patent year 04
	27.03.2008	Renewal fee patent year 05
	27.11.2009	Renewal fee patent year 06
	23.11.2010	Renewal fee patent year 07
	23.11.2011	Renewal fee patent year 08
	14.11.2012	Renewal fee patent year 09
	Penalty fee
	Additional fee for renewal fee
	30.11.2013	10 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]US2002009658 (SATO NORIKATSU [JP], et al) [A] 1,8* the whole document *;
		[YA]EP1300874 (TOKYO ELECTRON LTD [JP]) [Y] 4-6,11-14 * the whole document * [A] 1,8;
		[XY]JP2003115426 (DAINIPPON SCREEN MFG) [X] 1-3,7-10,15,16 * paragraphs [0022] - [0025] - [0034] , [0035] , [0042] - [0044] - [0100] * [Y] 4-6,11-14
	International search	[X]JP2003115426 (DAINIPPON SCREEN MFG);
		[A]JP2003045776 (DAINIPPON SCREEN MFG);
		[A]JP2003037043 (DAINIPPON SCREEN MFG);
		[A]JPH10172902 (NIKON CORP)
	by applicant	JP2000223401
		JP2003115426

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