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Extract from the Register of European Patents

EP About this file: EP1704585

EP1704585 - METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.01.2018
Database last updated on 09.04.2026
FormerThe patent has been granted
Status updated on  10.02.2017
FormerGrant of patent is intended
Status updated on  31.01.2017
Most recent event   Tooltip06.03.2020Lapse of the patent in a contracting state
New state(s): TR		published on 08.04.2020  [2020/15]
Applicant(s)For all designated states
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
308 Bynum Hall, Campus Box 4105
Chapel Hill, NC 27599-4105 / US
[2017/11]
Former [2012/49]For all designated states
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
308 Bynum Hall, Campus Box 4105
Chapel Hill, NC 27599-4105 / US
Former [2006/39]For all designated states
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
308 Bynum Hall, Campus Box 4105
Chapel Hill, NC 27599-4105 / US
For all designated states
NORTH CAROLINA STATE UNIVERSITY
2401 Research Drive, Suite 1122, Campus Box 8210
Raleigh, NC 27695-8210 / US
Inventor(s)01 / DESIMONE, Joseph, M.
7315 Crescent Ridge Drive
Chapel Hill, NC 27516 / US
02 / ROLLAND, Jason, P.
102 Hollow Oak Drive
Durham, NC 27713 / US
03 / EXNER, Ansley, E.
1300 Warren Hites Drive-Apt.C107
Augusta, Georgia 30901 / US
04 / SAMULSKI, Edward, T.
413 Deming Road
Chapel Hill, NC 27514 / US
05 / SAMULSKI, R., Jude
102 Darlin Circle
Chapel Hill, NC 27514 / US
06 / MAYNOR, Benjamin, W.
2723 University Drive
Durham, NC 27707 / US
07 / EULISS, Larken, E.
8104 Spring Meadow Drive
Chapel Hill, NC 27517 / US
08 / DENISON, Ginger, M.
5 Meetinghouse Lane
Durham, NC 27707 / US
 [2006/51]
Former [2006/39]01 / DESIMONE, Joseph, M.
7315 Crescent Ridge Drive
Chapel Hill, NC 27516 / US
02 / ROLLAND, Jason, P.
102 Hollow Oak Drive
Durham, NC 27713 / US
03 / EXNER, Ansley, E.
5126 Copper Ridge drive
Durham, NC 27707 / US
04 / SAMULSKI, Edward, T.
413 Deming Road
Chapel Hill, NC 27514 / US
05 / SAMULSKI, R., Jude
102 Darlin Circle
Chapel Hill, NC 27514 / US
06 / MAYNOR, Benjamin, W.
2723 University Drive
Durham, NC 27707 / US
07 / EULISS, Larken, E.
8104 Spring Meadow Drive
Chapel Hill, NC 27517 / US
08 / DENISON, Ginger, M.
5 Meetinghouse Lane
Durham, NC 27707 / US
Representative(s)Johnson, Yvonne Catherine
Barker Brettell LLP
100 Hagley Road
Edgbaston
Birmingham
B16 8QQ / GB
[2013/50]
Former [2012/18]Isarpatent
Patent- und Rechtsanwälte
Postfach 44 01 51
80750 München / DE
Former [2008/33]Behnisch, Werner
Reinhard-Skuhra-Weise & Partner GbR Patentanwälte Friedrichstrasse 31
80801 München / DE
Former [2006/39]Behnisch, Werner
Reinhard-Skuhra-Weise Friedrichstrasse 31
80801 München / DE
Application number, filing date04821787.120.12.2004
[2006/39]
WO2004US42706
Priority number, dateUS20030531531P19.12.2003         Original published format: US 531531 P
US20040583170P25.06.2004         Original published format: US 583170 P
US20040604970P27.08.2004         Original published format: US 604970 P
[2006/39]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2005101466
Date:27.10.2005
Language:EN
[2005/43]
Type: A2 Application without search report 
No.:EP1704585
Date:27.09.2006
Language:EN
The application published by WIPO in one of the EPO official languages on 27.10.2005 takes the place of the publication of the European patent application.
[2006/39]
Type: B1 Patent specification 
No.:EP1704585
Date:15.03.2017
Language:EN
[2017/11]
Search report(s)International search report - published on:US05.04.2007
(Supplementary) European search report - dispatched on:EP20.07.2010
ClassificationIPC:H01L21/302, // G03F7/00, A61K9/51
[2010/33]
CPC:
A61K9/0097 (EP,KR,US); G03F7/0002 (EP,KR,US); A61K9/14 (US);
A61K47/34 (US); A61K9/5138 (EP,KR,US); A61K9/5153 (EP,KR,US);
A61K9/5192 (EP,KR,US); B81C99/0085 (EP,KR,US); B82Y10/00 (EP,KR,US);
B82Y40/00 (EP,KR,US); G03F7/00 (KR); H10K71/13 (EP,KR,US);
H10K71/60 (EP,US); Y02E10/549 (EP); Y02P70/50 (EP);
Y10T428/24273 (EP,US); Y10T428/24479 (EP,US); Y10T428/3154 (EP,US) (-)
Former IPC [2007/24]H01L21/302
Former IPC [2006/39]H01L21/02
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2017/11]
Former [2006/39]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesAL05.07.2006
BA05.07.2006
HR05.07.2006
LV05.07.2006
MK05.07.2006
YU05.07.2006
TitleGerman:VERFAHREN ZUR HERSTELLUNG ISOLIERTER MIKRO- UND NANOSTRUKTUREN UNTER VERWENDUNG VON SOFT- ODER DRUCK-LITHOGRAPHIE[2006/39]
English:METHODS FOR FABRICATING ISOLATED MICRO- AND NANO- STRUCTURES USING SOFT OR IMPRINT LITHOGRAPHY[2006/39]
French:PROCEDE DE FABRICATION DE MICROSTRUCTURES ET DE NANOSTRUCTURES AU MOYEN DE LA LITHOGRAPHIE MOLLE OU D'IMPRESSION[2006/39]
Entry into regional phase05.07.2006National basic fee paid 
05.07.2006Search fee paid 
05.07.2006Designation fee(s) paid 
05.07.2006Examination fee paid 
Examination procedure26.05.2005Request for preliminary examination filed
International Preliminary Examining Authority: US
05.07.2006Examination requested  [2006/39]
28.06.2007Amendment by applicant (claims and/or description)
28.12.2011Despatch of a communication from the examining division (Time limit: M06)
06.07.2012Reply to a communication from the examining division
06.02.2015Despatch of a communication from the examining division (Time limit: M06)
17.08.2015Reply to a communication from the examining division
24.08.2016Cancellation of oral proceeding that was planned for 14.09.2016
14.09.2016Date of oral proceedings (cancelled)
22.09.2016Communication of intention to grant the patent
29.01.2017Receipt of the translation of the claim(s)
30.01.2017Fee for grant paid
30.01.2017Fee for publishing/printing paid
Divisional application(s)EP17156921.3  / EP3242318
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  28.12.2011
Opposition(s)18.12.2017No opposition filed within time limit [2018/08]
Fees paidRenewal fee
29.12.2006Renewal fee patent year 03
28.12.2007Renewal fee patent year 04
15.12.2008Renewal fee patent year 05
11.12.2009Renewal fee patent year 06
15.12.2010Renewal fee patent year 07
12.12.2011Renewal fee patent year 08
11.12.2012Renewal fee patent year 09
12.12.2013Renewal fee patent year 10
11.12.2014Renewal fee patent year 11
10.12.2015Renewal fee patent year 12
13.12.2016Renewal fee patent year 13
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU20.12.2004
AT15.03.2017
CY15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
MC15.03.2017
PL15.03.2017
RO15.03.2017
SI15.03.2017
SK15.03.2017
TR15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
[2020/15]
Former [2019/46]HU20.12.2004
AT15.03.2017
CY15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
MC15.03.2017
PL15.03.2017
RO15.03.2017
SI15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2019/31]HU20.12.2004
AT15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
MC15.03.2017
PL15.03.2017
RO15.03.2017
SI15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2019/30]AT15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
MC15.03.2017
PL15.03.2017
RO15.03.2017
SI15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2018/14]AT15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
PL15.03.2017
RO15.03.2017
SI15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2017/50]AT15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
PL15.03.2017
RO15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2017/49]AT15.03.2017
CZ15.03.2017
EE15.03.2017
LT15.03.2017
RO15.03.2017
SK15.03.2017
BG15.06.2017
GR16.06.2017
IS15.07.2017
Former [2017/48]CZ15.03.2017
LT15.03.2017
BG15.06.2017
GR16.06.2017
Former [2017/41]LT15.03.2017
BG15.06.2017
GR16.06.2017
Documents cited:Search[Y] US2003071016  (SHIH WU-SHENG et al.) [Y] 27-31,44,45,47,49,51,55,69-71 * paragraph [0015] - paragraph [0016] *
 [A] US2002172895  (BREEN TRICIAL L et al.) [A] 30,31 * the whole document *
 [A] US4818801  (RICE DAVID E et al.) [A] 27,44 * the whole document *
 [Y]   XIA Y ET AL: "SOFT LITHOGRAPHY", ANGEWANDTE CHEMIE. INTERNATIONAL EDITION, WILEY VCH VERLAG, WEINHEIM LNKD- DOI:10.1002/(SICI)1521-3773(19980316)37:5<,550::AID-ANIE550>,3.0. CO,2-G, vol. 37, 1 January 1998 (1998-01-01), pages 551 - 575, XP000985399, ISSN: 1433-7851 [Y] 27-29,44,45,47,49,51,55,69-71 * page 562, column 2 - page 563, column 2 *

DOI:   http://dx.doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
 [Y]   HIRAI Y ET AL: "MOLD SURFACE TREATMENT FOR IMPRINT LITHOGRAPHY", JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, TECHNICAL ASSOCIATION OF PHOTOPOLYMERS JAPAN, JP, vol. 14, no. 3, 1 January 2001 (2001-01-01), pages 457 - 462, XP009052742, ISSN: 0914-9244 [Y] 30,31 * the whole document *
 [A]   BAILEY T ET AL: "Step and flash imprint lithography: Template surface treatment and defect analysis", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICSPROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US LNKD- DOI:10.1116/1.1324618, vol. 18, no. 6, 1 November 2000 (2000-11-01), pages 3572 - 3577, XP012008619, ISSN: 0734-211X [A] 30,31 * page 3574 *

DOI:   http://dx.doi.org/10.1116/1.1324618
Examination  CHAUDHURY M K ET AL: "CORRELATION BETWEEN SURFACE FREE ENERGY AND SURFACE CONSTITUTION", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE, US, vol. 255, 1 January 1992 (1992-01-01), pages 1230 - 1232, XP000570431, ISSN: 0036-8075, DOI: 10.1126/SCIENCE.255.5049.1230 [Y] 27-29,44,45,47,49,51,55,69-71 * page 562, column 2 - page 563, column 2 *

DOI:   http://dx.doi.org/10.1126/science.255.5049.1230
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.