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EP1541284
European procedure
Extract from the Register of European Patents
EP About this file: EP1541284
| EP1541284 - Planarization method [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 11.01.2008 Database last updated on 12.07.2024 | Most recent event Tooltip | 11.01.2008 | No opposition filed within time limit | published on 13.02.2008 [2008/07] | Applicant(s) | For all designated states TOKYO SEIMITSU CO., LTD. 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | [N/P] |
| Former [2007/10] | For all designated states TOKYO SEIMITSU CO., LTD. 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | ||
| Former [2005/24] | For all designated states TOKYO SEIMITSU CO., LTD. 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | Inventor(s) | 01 /
Ishikawa, Toshihiko 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | 02 /
Katagiri, Yasushi 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | [2005/24] | Representative(s) | Hering, Hartmut Patentanwälte Berendt, Leyh & Hering Innere Wiener Strasse 20 81667 München / DE | [N/P] |
| Former [2005/24] | Hering, Hartmut, Dipl.-Ing. Patentanwälte Berendt, Leyh & Hering Innere Wiener Strasse 20 81667 München / DE | Application number, filing date | 05005154.9 | 03.01.2000 | [2005/24] | Priority number, date | JP19990001317 | 06.01.1999 Original published format: JP 131799 | JP19990321432 | 11.11.1999 Original published format: JP 32143299 | [2005/24] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1541284 | Date: | 15.06.2005 | Language: | EN | [2005/24] | Type: | B1 Patent specification | No.: | EP1541284 | Date: | 07.03.2007 | Language: | EN | [2007/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.05.2005 | Classification | IPC: | B24B7/22, B24B37/04, B24B53/007, H01L21/304, H01L21/306 | [2005/24] | CPC: |
B24B37/345 (EP,US);
H01L21/304 (KR);
B24B49/04 (EP,US);
B24B7/228 (EP,US);
H01L21/30625 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2005/24] | Title | German: | Vorrichtung und Verfahren zur Planarisierung | [2005/24] | English: | Planarization method | [2005/24] | French: | Procédé et dispositif de planarisation | [2005/24] | Examination procedure | 13.12.2005 | Examination requested [2006/06] | 07.02.2006 | Despatch of a communication from the examining division (Time limit: M04) | 07.06.2006 | Reply to a communication from the examining division | 11.08.2006 | Communication of intention to grant the patent | 13.11.2006 | Fee for grant paid | 13.11.2006 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP00100004.1 / EP1018400 | Opposition(s) | 10.12.2007 | No opposition filed within time limit [2008/07] | Fees paid | Renewal fee | 09.03.2005 | Renewal fee patent year 03 | 09.03.2005 | Renewal fee patent year 04 | 09.03.2005 | Renewal fee patent year 05 | 15.03.2005 | Renewal fee patent year 06 | 13.01.2006 | Renewal fee patent year 07 | 20.01.2007 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]JPH0740239 ; | [Y]DE19641534 (GENAUIGKEITS & MASCHINENBAU NU [DE]) [Y] 1-4 * column 3, line 18 - column 5, line 26 * * figure 1 *; | [Y]US5851924 (NAKAZAWA ATSUO [JP], et al) [Y] 1,2 * abstract * * column 2, line 1 - line 13 * * column 2, line 36 - line 54 * | [Y] - PATENT ABSTRACTS OF JAPAN, (19950630), vol. 1995, no. 05, & JP07040239 A 19950210 (SONY CORP) [Y] 3,4 * abstract * * paragraph [0002] * * paragraph [0007] * * paragraph [0009] * * paragraph [0015] * * paragraph [0038] * * paragraph [0050] - paragraph [0052] * * paragraph [0058] - paragraph [0062] * * figures 1,10 * |