EP1640481 - rotatable substrate holder [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 09.11.2007 Database last updated on 08.10.2024 | Most recent event Tooltip | 02.10.2009 | Lapse of the patent in a contracting state New state(s): CY, HU, LU, TR | published on 04.11.2009 [2009/45] | Applicant(s) | For all designated states Forschungszentrum Karlsruhe GmbH Weberstrasse 5 76133 Karlsruhe / DE | [2006/13] | Inventor(s) | 01 /
Geerk, Jochen, Dr. Neue Bahnhofstrasse 4 76356 Weingarten / DE | 02 /
Ratzel, Fritz Zum Erlich 6 76351 Linkenheim-Hochstetten / DE | 03 /
Schneider, Rudolf, Dr. Wendelinusstrasse 35 76676 Graben-Neudorf / DE | [2006/13] | Application number, filing date | 05018979.4 | 01.09.2005 | [2006/13] | Priority number, date | DE20041046280 | 23.09.2004 Original published format: DE102004046280 | [2006/13] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP1640481 | Date: | 29.03.2006 | Language: | DE | [2006/13] | Type: | B1 Patent specification | No.: | EP1640481 | Date: | 03.01.2007 | Language: | DE | [2007/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 17.01.2006 | Classification | IPC: | C30B25/12, C23C14/50, C23C16/458 | [2006/13] | CPC: |
C30B25/12 (EP);
C23C14/067 (EP);
C23C14/243 (EP);
C23C14/505 (EP);
C23C14/541 (EP)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/13] | Title | German: | Drehbarer Substrathalter | [2006/13] | English: | rotatable substrate holder | [2006/13] | French: | porte-substrat rotative | [2006/13] | Examination procedure | 15.04.2006 | Examination requested [2006/24] | 22.05.2006 | Despatch of a communication from the examining division (Time limit: M04) | 29.06.2006 | Reply to a communication from the examining division | 18.08.2006 | Communication of intention to grant the patent | 04.11.2006 | Fee for grant paid | 04.11.2006 | Fee for publishing/printing paid | Opposition(s) | 05.10.2007 | No opposition filed within time limit [2007/50] |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CY | 03.01.2007 | CZ | 03.01.2007 | DK | 03.01.2007 | EE | 03.01.2007 | FI | 03.01.2007 | FR | 03.01.2007 | GB | 03.01.2007 | IE | 03.01.2007 | IT | 03.01.2007 | LT | 03.01.2007 | LV | 03.01.2007 | NL | 03.01.2007 | PL | 03.01.2007 | RO | 03.01.2007 | SI | 03.01.2007 | SK | 03.01.2007 | TR | 03.01.2007 | BG | 03.04.2007 | SE | 03.04.2007 | GR | 04.04.2007 | ES | 14.04.2007 | IS | 03.05.2007 | PT | 04.06.2007 | HU | 04.07.2007 | AT | 01.09.2007 | LU | 01.09.2007 | BE | 30.09.2007 | MC | 30.09.2007 | [2009/45] |
Former [2009/11] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
EE | 03.01.2007 | ||
FI | 03.01.2007 | ||
FR | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
AT | 01.09.2007 | ||
BE | 30.09.2007 | ||
MC | 30.09.2007 | ||
Former [2008/52] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
FR | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
AT | 01.09.2007 | ||
BE | 30.09.2007 | ||
MC | 30.09.2007 | ||
Former [2008/50] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
FR | 24.08.2007 | ||
AT | 01.09.2007 | ||
BE | 30.09.2007 | ||
MC | 30.09.2007 | ||
Former [2008/40] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
FR | 24.08.2007 | ||
BE | 30.09.2007 | ||
MC | 30.09.2007 | ||
Former [2008/22] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
IT | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
GR | 04.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
FR | 24.08.2007 | ||
MC | 30.09.2007 | ||
Former [2008/15] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
LT | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
Former [2008/11] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
LV | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
Former [2008/05] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
RO | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
Former [2008/02] | CZ | 03.01.2007 | |
DK | 03.01.2007 | ||
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
Former [2007/51] | DK | 03.01.2007 | |
FI | 03.01.2007 | ||
GB | 03.01.2007 | ||
IE | 03.01.2007 | ||
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
SI | 03.01.2007 | ||
SK | 03.01.2007 | ||
BG | 03.04.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | ||
Former [2007/44] | FI | 03.01.2007 | |
NL | 03.01.2007 | ||
PL | 03.01.2007 | ||
SI | 03.01.2007 | ||
SE | 03.04.2007 | ||
ES | 14.04.2007 | ||
IS | 03.05.2007 | ||
PT | 04.06.2007 | Documents cited: | Search | [A]JPH06122972 ; | [A]US5618388 (SEESER JAMES W [US], et al) [A] 1-4 * figure 1 *; | [A]US2003096711 (SAITO ATSUSHI [JP], et al)[A] 1-4; | [A]US6572936 (DOMOTO YOICHI [JP], et al) [A] 1-4 * column 6, line 14 - column 7, line 41; figure 5 * | [A] - PATENT ABSTRACTS OF JAPAN, (19940804), vol. 018, no. 415, Database accession no. (C - 1233), & JP06122972 A 19940506 (NIKON CORP) [A] 1-4 * abstract * | by applicant | DE10341914 |