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EP1650441
European procedure
Extract from the Register of European Patents
EP Citations: EP1650441
| Cited in | Search | Type: | Patent literature | Publication No.: | DE2249985
[X] (LEYBOLD HERAEUS GMBH & CO KG) [X] 1-4,6,13 * page 1, line 1 * * page 3, line 33 * * page 4, line 7 * * figure 1 *; | Type: | Patent literature | Publication No.: | DE2412584
[Y] (AIRCO INC) [Y] 15 * page 8, line 11 - line 12 * * figure 1 *; | Type: | Patent literature | Publication No.: | DE8608801U
[Y] (LEYBOLD HERAEUS GMBH & CO KG) [Y] 7,8,10,11 * page 5, line 9 - line 19 * * page 5, line 20 * * page 5, line 21 * * page 5, line 26 * * figure 1 *; | Type: | Patent literature | Publication No.: | EP0581966
[Y] (FANUC LTD [JP]) [Y] 9,12 * abstract ** column 5, line 57 - column 6, line 4 *; | Type: | Patent literature | Publication No.: | DE19712711
[XY] (PFEIFFER VACUUM GMBH [DE]) [X] 1-3,5,13 * column 2, line 13 * * column 2, line 23 * * column 2, line 15 - line 16 * * column 2, line 32 - line 34 * * figure 1 * [Y] 7-12,14,15; | Type: | Patent literature | Publication No.: | EP1293682
[Y] (BOC TECHNOLOGIES LTD [JP]) [Y] 14 * paragraph [0053] - paragraph [0056] * * figure 1 * | Cited in | by applicant | Type: | Patent literature | Publication No.: | DE2249985
| Type: | Patent literature | Publication No.: | DE3537822
| Type: | Patent literature | Publication No.: | DE19712711
| Type: | Patent literature | Publication No.: | DE10117075
| Type: | Non-patent literature | Publication information: | - JOUMAL OF VACUUM SCIENCE AND TECHNOLOGY A, (198905), vol. 7, no. 311, pages 2377 - 2380 |