Cited in | Search | Type: | Patent literature | Publication No.: | EP0619505
[A] (NGK INSULATORS LTD [JP]) [A] 1,2 * abstract * * column 7, line 4 - line 24 * * column 1, line 50 - line 57 ** column 5, line 23 - column 6, line 22; figures 3-6 *; | Type: | Patent literature | Publication No.: | EP0695961
[A] (SUMITOMO ELECTRIC INDUSTRIES [JP]) [A] 1,2 * abstract * * column 4, line 31 - line 42; claim 1 *; | Type: | Patent literature | Publication No.: | US5815626
[Y] (KUBA KAZUKI [JP], et al) [Y] 1,2 * column 21, line 24 - column 22, line 36; figure 10 * * column 20, line 48 - line 51 *; | Type: | Non-patent literature | Publication information: | [Y] - HAN H ET AL, "INTEGRATION OF SILICON BENCH WITH MICRO OPTICS", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (199901), vol. 3631, ISSN 0277-786X, pages 234 - 243, XP000995170 [Y] 1,2 * page 240 - page 241; figures 4,11,13 * | DOI: | http://dx.doi.org/10.1117/12.348318 |