EP1756854 - GALLIUM NITRIDE-BASED SEMICONDUCTOR STACKED STRUCTURE, PRODUCTION METHOD THEREOF, AND COMPOUND SEMICONDUCTOR AND LIGHT-EMITTING DEVICE EACH USING THE STACKED STRUCTURE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.10.2011 Database last updated on 12.11.2024 | Most recent event Tooltip | 14.10.2011 | Application deemed to be withdrawn | published on 16.11.2011 [2011/46] | Applicant(s) | For all designated states SHOWA DENKO K.K. 13-9, Shibadaimon 1-chome, Minato-ku Tokyo 105-8518 / JP | [N/P] |
Former [2007/09] | For all designated states SHOWA DENKO KABUSHIKI KAISHA 13-9, Shibadaimon 1-chome, Minato-ku Tokyo 105-8518 / JP | Inventor(s) | 01 /
UDAGAWA, Takashi, c/o Showa Denko K.K. 1505, Shimokagemori Chichibu-shi, Saitama 369-1871 / JP | [2007/09] | Representative(s) | Strehl Schübel-Hopf & Partner Maximilianstrasse 54 80538 München / DE | [2007/09] | Application number, filing date | 05745588.3 | 25.05.2005 | [2007/09] | WO2005JP10012 | Priority number, date | JP20040157132 | 27.05.2004 Original published format: JP 2004157132 | [2007/09] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2005117078 | Date: | 08.12.2005 | Language: | EN | [2005/49] | Type: | A1 Application with search report | No.: | EP1756854 | Date: | 28.02.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 08.12.2005 takes the place of the publication of the European patent application. | [2007/09] | Search report(s) | International search report - published on: | JP | 08.12.2005 | (Supplementary) European search report - dispatched on: | EP | 28.07.2010 | Classification | IPC: | H01L21/205, C23C16/34, H01L33/00, H01S5/323, H01L21/02 | [2010/34] | CPC: |
H01L21/02609 (EP,US);
H01L21/0242 (EP,US);
H01L21/02433 (EP,US);
H01L21/02458 (EP,US);
H01L21/02516 (EP,US);
H01L21/0254 (EP,US);
H01L21/0262 (EP,US);
H01L33/007 (EP,US);
H01L33/16 (EP,US);
H01L33/32 (EP,US)
(-)
|
Former IPC [2007/09] | H01L21/205, C23C16/34, H01L33/00, H01S5/323 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/09] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | GESTAPELTE HALBLEITERSTRUKTUR AUF GALLIUMNITRIDBASIS, HERSTELLUNGSVERFAHREN DAFÜR UND VERBUNDHALBLEITER UND LICHTEMITTIERENDES BAUELEMENT JEWEILS MIT DER GESTAPELTEN STRUKTUR | [2007/09] | English: | GALLIUM NITRIDE-BASED SEMICONDUCTOR STACKED STRUCTURE, PRODUCTION METHOD THEREOF, AND COMPOUND SEMICONDUCTOR AND LIGHT-EMITTING DEVICE EACH USING THE STACKED STRUCTURE | [2007/09] | French: | STRUCTURE EMPILÉE DE SEMI-CONDUCTEUR GALLIUM NITRURÉ, MÉTHODE DE PRODUCTION, ET SEMI-CONDUCTEUR COMPOSÉ ET DISPOSITIF D'ÉMISSION DE LUMIÈRE (LED) UTILISANT LA STRUCTURE EMPILÉE<sb> </sb> | [2007/09] | Entry into regional phase | 19.12.2006 | National basic fee paid | 19.12.2006 | Search fee paid | 19.12.2006 | Designation fee(s) paid | 19.12.2006 | Examination fee paid | Examination procedure | 19.12.2006 | Examination requested [2007/09] | 04.01.2011 | Despatch of a communication from the examining division (Time limit: M04) | 17.05.2011 | Application deemed to be withdrawn, date of legal effect [2011/46] | 22.06.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2011/46] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.01.2011 | Fees paid | Renewal fee | 14.05.2007 | Renewal fee patent year 03 | 13.05.2008 | Renewal fee patent year 04 | 25.05.2009 | Renewal fee patent year 05 | 28.05.2010 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.05.2011 | 07   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A] - QIAN W ET AL, "Microstructural characterization of alpha-GaN films grown on sapphire by organometallic vapor phase epitaxy", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US LNKD- DOI:10.1063/1.113253, (19950306), vol. 66, no. 10, ISSN 0003-6951, pages 1252 - 1254, XP012012320 [A] 1-9 * the whole document * DOI: http://dx.doi.org/10.1063/1.113253 | [A] - LIU L ET AL, "Substrates for gallium nitride epitaxy", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, ELSEVIER SEQUOIA S.A., LAUSANNE, CH LNKD- DOI:10.1016/S0927-796X(02)00008-6, (20020430), vol. 37, no. 3, ISSN 0927-796X, pages 61 - 127, XP004349792 [A] 1-9 * pages 67-78, chapter '2. Sapphire' * DOI: http://dx.doi.org/10.1016/S0927-796X(02)00008-6 | [A] - RUFFENACH-CLUR S ET AL, "MOVPE growth and characterization of AlxGa1-xN", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH LNKD- DOI:10.1016/S0921-5107(97)00166-9, (19971218), vol. 50, no. 1-3, ISSN 0921-5107, pages 219 - 222, XP004119138 [A] 1-9 * the whole document * DOI: http://dx.doi.org/10.1016/S0921-5107(97)00166-9 | [A] - YOSHIDA S ET AL, "Epitaxial growth of GaN/AlN heterostructures", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICSPROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, (19830401), vol. 1, no. 2, ISSN 0734-211X, pages 250 - 253, XP009135635 [A] 1-9 * page 250, chapter II. Experimental * * pages 250-251, chapter 'III.A Crystal orientation' * * figure 3(c) * | [A] - SUNDARAVEL B ET AL, "Ion channeling studies on mixed phases formed in metalorganic chemical vapor deposition grown Mg-doped GaN on Al2O3(0001)", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US LNKD- DOI:10.1063/1.371966, (20000115), vol. 87, no. 2, ISSN 0021-8979, pages 955 - 957, XP012049368 [A] 1-9 * the whole document * DOI: http://dx.doi.org/10.1063/1.371966 | [A] - AMBACHER O, "Growth and applications of group III-nitrides", JOURNAL OF PHYSICS D. APPLIED PHYSICS, IOP PUBLISHING, BRISTOL, GB LNKD- DOI:10.1088/0022-3727/31/20/001, (19981021), vol. 31, no. 20, ISSN 0022-3727, pages 2653 - 2710, XP009117690 [A] 1-9 * pages 2661 -2665, chapter 4.1 * * pages 2676 - 2677, chapter 4.5.2 * DOI: http://dx.doi.org/10.1088/0022-3727/31/20/001 | International search | [A]JPH10107319 (SHOWA DENKO KK); | [A]JPH10321905 (SHOWA DENKO KK); | [A]JPH11162848 (SHOWA DENKO KK); | [A]JPH11186603 (SHOWA DENKO KK); | [AE]JP2005223126 (NGK INSULATORS LTD) |