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Extract from the Register of European Patents

EP About this file: EP1756854

EP1756854 - GALLIUM NITRIDE-BASED SEMICONDUCTOR STACKED STRUCTURE, PRODUCTION METHOD THEREOF, AND COMPOUND SEMICONDUCTOR AND LIGHT-EMITTING DEVICE EACH USING THE STACKED STRUCTURE [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  14.10.2011
Database last updated on 12.11.2024
Most recent event   Tooltip14.10.2011Application deemed to be withdrawnpublished on 16.11.2011  [2011/46]
Applicant(s)For all designated states
SHOWA DENKO K.K.
13-9, Shibadaimon 1-chome, Minato-ku
Tokyo 105-8518 / JP
[N/P]
Former [2007/09]For all designated states
SHOWA DENKO KABUSHIKI KAISHA
13-9, Shibadaimon 1-chome, Minato-ku
Tokyo 105-8518 / JP
Inventor(s)01 / UDAGAWA, Takashi, c/o Showa Denko K.K.
1505, Shimokagemori
Chichibu-shi, Saitama 369-1871 / JP
 [2007/09]
Representative(s)Strehl Schübel-Hopf & Partner
Maximilianstrasse 54
80538 München / DE
[2007/09]
Application number, filing date05745588.325.05.2005
[2007/09]
WO2005JP10012
Priority number, dateJP2004015713227.05.2004         Original published format: JP 2004157132
[2007/09]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2005117078
Date:08.12.2005
Language:EN
[2005/49]
Type: A1 Application with search report 
No.:EP1756854
Date:28.02.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 08.12.2005 takes the place of the publication of the European patent application.
[2007/09]
Search report(s)International search report - published on:JP08.12.2005
(Supplementary) European search report - dispatched on:EP28.07.2010
ClassificationIPC:H01L21/205, C23C16/34, H01L33/00, H01S5/323, H01L21/02
[2010/34]
CPC:
H01L21/02609 (EP,US); H01L21/0242 (EP,US); H01L21/02433 (EP,US);
H01L21/02458 (EP,US); H01L21/02516 (EP,US); H01L21/0254 (EP,US);
H01L21/0262 (EP,US); H01L33/007 (EP,US); H01L33/16 (EP,US);
H01L33/32 (EP,US) (-)
Former IPC [2007/09]H01L21/205, C23C16/34, H01L33/00, H01S5/323
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2007/09]
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
LVNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:GESTAPELTE HALBLEITERSTRUKTUR AUF GALLIUMNITRIDBASIS, HERSTELLUNGSVERFAHREN DAFÜR UND VERBUNDHALBLEITER UND LICHTEMITTIERENDES BAUELEMENT JEWEILS MIT DER GESTAPELTEN STRUKTUR[2007/09]
English:GALLIUM NITRIDE-BASED SEMICONDUCTOR STACKED STRUCTURE, PRODUCTION METHOD THEREOF, AND COMPOUND SEMICONDUCTOR AND LIGHT-EMITTING DEVICE EACH USING THE STACKED STRUCTURE[2007/09]
French:STRUCTURE EMPILÉE DE SEMI-CONDUCTEUR GALLIUM NITRURÉ, MÉTHODE DE PRODUCTION, ET SEMI-CONDUCTEUR COMPOSÉ ET DISPOSITIF D'ÉMISSION DE LUMIÈRE (LED) UTILISANT LA STRUCTURE EMPILÉE<sb> </sb>[2007/09]
Entry into regional phase19.12.2006National basic fee paid 
19.12.2006Search fee paid 
19.12.2006Designation fee(s) paid 
19.12.2006Examination fee paid 
Examination procedure19.12.2006Examination requested  [2007/09]
04.01.2011Despatch of a communication from the examining division (Time limit: M04)
17.05.2011Application deemed to be withdrawn, date of legal effect  [2011/46]
22.06.2011Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2011/46]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  04.01.2011
Fees paidRenewal fee
14.05.2007Renewal fee patent year 03
13.05.2008Renewal fee patent year 04
25.05.2009Renewal fee patent year 05
28.05.2010Renewal fee patent year 06
Penalty fee
Additional fee for renewal fee
31.05.201107   M06   Not yet paid
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Documents cited:Search[A]  - QIAN W ET AL, "Microstructural characterization of alpha-GaN films grown on sapphire by organometallic vapor phase epitaxy", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US LNKD- DOI:10.1063/1.113253, (19950306), vol. 66, no. 10, ISSN 0003-6951, pages 1252 - 1254, XP012012320 [A] 1-9 * the whole document *

DOI:   http://dx.doi.org/10.1063/1.113253
 [A]  - LIU L ET AL, "Substrates for gallium nitride epitaxy", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, ELSEVIER SEQUOIA S.A., LAUSANNE, CH LNKD- DOI:10.1016/S0927-796X(02)00008-6, (20020430), vol. 37, no. 3, ISSN 0927-796X, pages 61 - 127, XP004349792 [A] 1-9 * pages 67-78, chapter '2. Sapphire' *

DOI:   http://dx.doi.org/10.1016/S0927-796X(02)00008-6
 [A]  - RUFFENACH-CLUR S ET AL, "MOVPE growth and characterization of AlxGa1-xN", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH LNKD- DOI:10.1016/S0921-5107(97)00166-9, (19971218), vol. 50, no. 1-3, ISSN 0921-5107, pages 219 - 222, XP004119138 [A] 1-9 * the whole document *

DOI:   http://dx.doi.org/10.1016/S0921-5107(97)00166-9
 [A]  - YOSHIDA S ET AL, "Epitaxial growth of GaN/AlN heterostructures", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICSPROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, (19830401), vol. 1, no. 2, ISSN 0734-211X, pages 250 - 253, XP009135635 [A] 1-9 * page 250, chapter II. Experimental * * pages 250-251, chapter 'III.A Crystal orientation' * * figure 3(c) *
 [A]  - SUNDARAVEL B ET AL, "Ion channeling studies on mixed phases formed in metalorganic chemical vapor deposition grown Mg-doped GaN on Al2O3(0001)", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US LNKD- DOI:10.1063/1.371966, (20000115), vol. 87, no. 2, ISSN 0021-8979, pages 955 - 957, XP012049368 [A] 1-9 * the whole document *

DOI:   http://dx.doi.org/10.1063/1.371966
 [A]  - AMBACHER O, "Growth and applications of group III-nitrides", JOURNAL OF PHYSICS D. APPLIED PHYSICS, IOP PUBLISHING, BRISTOL, GB LNKD- DOI:10.1088/0022-3727/31/20/001, (19981021), vol. 31, no. 20, ISSN 0022-3727, pages 2653 - 2710, XP009117690 [A] 1-9 * pages 2661 -2665, chapter 4.1 * * pages 2676 - 2677, chapter 4.5.2 *

DOI:   http://dx.doi.org/10.1088/0022-3727/31/20/001
International search[A]JPH10107319  (SHOWA DENKO KK);
 [A]JPH10321905  (SHOWA DENKO KK);
 [A]JPH11162848  (SHOWA DENKO KK);
 [A]JPH11186603  (SHOWA DENKO KK);
 [AE]JP2005223126  (NGK INSULATORS LTD)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.