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EP1790756
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EP About this file: EP1790756
| EP1790756 - THIN-FILM FORMING APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.07.2015 Database last updated on 31.08.2024 | Most recent event Tooltip | 03.07.2015 | Application deemed to be withdrawn | published on 05.08.2015 [2015/32] | Applicant(s) | For all designated states SHINCRON CO., LTD. 2-6 Minami-ohi, 3-chome Shinagawa-ku Tokyo 140-8540 / JP | [2007/22] | Inventor(s) | 01 /
SONG, Yizhou Motogo 1-1-21-1203 Kawaguchi-shi, Saitama 332-0011 / JP | 02 /
ARAI, Tetsuji 1670-72, Nara-cho, Aoba-ku Yokohama-shi, Kanagawa 2270036 / JP | 03 /
CHIBA, Koki 102, 13-17, Izumi 2-chome Suginami-ku, Tokyo 1680063 / JP | 04 /
SAKURAI, Takeshi 11-14-204, Tsunashima-higashi, 4-chome, Kouhoku-ku Yokohama-shi, Kanagawa 2230052 / JP | 05 /
JIANG, Yousong 5-15, Kita-machi 1-chome Nerima-ku, Tokyo 1790081 / JP | [2007/28] |
| Former [2007/22] | 01 /
SONG, Yizhou, 603 Hills Kawaguchi Minami-machi 1-38, Minami-machi 1-chome Kawaguchi-shi, Saitama 3320026 / JP | ||
| 02 /
ARAI, Tetsuji 1670-72, Nara-cho, Aoba-ku Yokohama-shi, Kanagawa 2270036 / JP | |||
| 03 /
CHIBA, Koki 102, 13-17, Izumi 2-chome Suginami-ku, Tokyo 1680063 / JP | |||
| 04 /
SAKURAI, Takeshi 11-14-204, Tsunashima-higashi, 4-chome, Kouhoku-ku Yokohama-shi, Kanagawa 2230052 / JP | |||
| 05 /
JIANG, Yousong 5-15, Kita-machi 1-chome Nerima-ku, Tokyo 1790081 / JP | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE | [N/P] |
| Former [2007/22] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 05768945.7 | 05.08.2005 | [2007/22] | WO2005JP14413 | Priority number, date | JP20040229892 | 05.08.2004 Original published format: JP 2004229892 | [2007/22] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006013968 | Date: | 09.02.2006 | Language: | EN | [2006/06] | Type: | A1 Application with search report | No.: | EP1790756 | Date: | 30.05.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 09.02.2006 takes the place of the publication of the European patent application. | [2007/22] | Search report(s) | International search report - published on: | JP | 09.02.2006 | (Supplementary) European search report - dispatched on: | EP | 14.11.2011 | Classification | IPC: | C23C14/34, H01L21/31, C23C14/35, C23C14/56 | [2011/50] | CPC: |
C23C14/00 (KR);
C23C14/34 (EP,KR,US);
C23C14/35 (EP,US);
C23C14/564 (EP,US)
|
| Former IPC [2007/22] | C23C14/34, H01L21/31 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/22] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | VORRICHTUNG ZUR AUSBILDUNG VON DÜNNEN FILMEN | [2007/22] | English: | THIN-FILM FORMING APPARATUS | [2007/22] | French: | APPAREIL DE FORMATION DE FILM MINCE | [2007/22] | Entry into regional phase | 16.02.2007 | Translation filed | 16.02.2007 | National basic fee paid | 16.02.2007 | Search fee paid | 16.02.2007 | Designation fee(s) paid | 16.02.2007 | Examination fee paid | Examination procedure | 16.02.2007 | Examination requested [2007/22] | 08.06.2012 | Amendment by applicant (claims and/or description) | 03.03.2015 | Application deemed to be withdrawn, date of legal effect [2015/32] | 27.03.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2015/32] | Fees paid | Renewal fee | 30.08.2007 | Renewal fee patent year 03 | 28.03.2008 | Renewal fee patent year 04 | 28.08.2009 | Renewal fee patent year 05 | 27.08.2010 | Renewal fee patent year 06 | 30.08.2011 | Renewal fee patent year 07 | 27.06.2012 | Renewal fee patent year 08 | 27.06.2013 | Renewal fee patent year 09 | Penalty fee | Additional fee for renewal fee | 31.08.2014 | 10 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XD]JP2001234338 (SHINCRON KK) [XD] 1-7 * abstract *; | [X]JP2004204304 (SHINCRON KK) [X] 1-7 * abstract *; | [A]JPH111771 (CANON KK) [A] 1-7 * abstract *; | [A]JP2000068227 (NISSIN ELECTRIC CO LTD) [A] 1-7 * abstract * | International search | [Y]JP2001234338 (SHINCRON KK); | [Y]JPH0111771 ; | [A]JPH0471123 (MITSUBISHI ELECTRIC CORP) |