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EP1791167

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EP About this file: EP1791167

EP1791167 - SUBSTRATE PROCESSING APPARATUS, USE STATE ASCERTAINING METHOD, AND FALSE USE PREVENTING METHOD [Right-click to bookmark this link]
Status	The application has been refused Status updated on 18.04.2014 Database last updated on 12.07.2024
Most recent event Tooltip	18.04.2014	Refusal of application	published on 21.05.2014 [2014/21]
Applicant(s)	For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP
	For all designated states Nikon Systems Inc. 3-3, Minatomirai 2-chome Nishi-ku Yokohama-shi, Kanagawa 2206116 / JP
	[N/P]
Former [2010/30]	For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP
	For all designated states Nikon Systems Inc. 3-3, Minatomirai 2-chome Nishi-ku Yokohama-shi, Kanagawa 2206116 / JP
Former [2007/22]	For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP
	For all designated states Nikon Systems Inc. 3-3, Minatomirai 2-chome Nishi-ku Yokohama-shi, Kanagawa 2206116 / JP
Inventor(s)	01 / SUZUKI, Hiroyuki, C/O NIKON CORPORATION Intell. Property Dept., 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 1008331 / JP
	02 / OKITA, Shinichi, C/O NIKON CORPORATION Intell. Property Dept., 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 1008331 / JP
	03 / YAMAGUCHI, Tadashi, C/O NIKON CORPORATION Intell. Property Dept., 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 1008331 / JP
	[2007/22]
Representative(s)	Wiebusch, Manfred Ter Meer Steinmeister & Partner Patentanwälte mbB Artur-Ladebeck-Strasse 51 33617 Bielefeld / DE
	[N/P]
Former [2008/48]	Wiebusch, Manfred Ter Meer Steinmeister & Partner GbR Artur-Ladebeck-Strasse 51 33617 Bielefeld / DE
Former [2007/22]	Wiebusch, Manfred TER MEER STEINMEISTER & PARTNER GbR, Patentanwälte, Artur-Ladebeck-Strasse 51 33617 Bielefeld / DE
Application number, filing date	05770468.6	10.08.2005
	[2007/22]
	WO2005JP14685
Priority number, date	JP20040235216	12.08.2004 Original published format: JP 2004235216
	[2007/22]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2006016619
	Date:	16.02.2006
	Language:	EN
	[2006/07]
	Type:	A1 Application with search report
	No.:	EP1791167
	Date:	30.05.2007
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 16.02.2006 takes the place of the publication of the European patent application.
	[2007/22]
Search report(s)	International search report - published on:	JP	16.02.2006
	(Supplementary) European search report - dispatched on:	EP	28.03.2011
Classification	IPC:	H01L21/027, G06F21/00	[2011/17]
	CPC:	G06Q30/06 (EP,KR,US); G03F7/70425 (EP,KR,US); G03F7/70508 (EP,KR,US); G03F7/70533 (KR); G06F21/71 (EP,KR,US); G06Q10/10 (EP,KR,US); (+) H01L21/67253 (EP,KR,US); H01L21/67294 (EP,KR,US); G06F2221/2105 (EP,KR,US); G06F2221/2113 (US); G06F2221/2137 (EP,KR,US); G06F2221/2149 (EP,KR,US); G06Q2220/18 (EP,US); Y04S40/20 (EP) (-)
	Former IPC [2007/22]	H01L21/027
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/22]
Extension states	AL	Not yet paid
	BA	Not yet paid
	HR	Not yet paid
	MK	Not yet paid
	YU	Not yet paid
Title	German:	SUBSTRATVERARBEITUNGSVORRICHTUNG, BENUTZUNGSZUSTANDS-BESTIMMUNGSVERFAHREN UND FALSCHBENUTZUNGS-VERHINDERUNGSVERFAHREN	[2007/22]
	English:	SUBSTRATE PROCESSING APPARATUS, USE STATE ASCERTAINING METHOD, AND FALSE USE PREVENTING METHOD	[2007/22]
	French:	APPAREIL DE TRAITEMENT DE SUBSTRAT, PROCEDE D'IDENTIFICATION D'UTILISATION, ET PROCEDE DE PREVENTION DE MAUVAISE UTILISATION	[2007/22]
Entry into regional phase	12.02.2007	Translation filed
	12.02.2007	National basic fee paid
	12.02.2007	Search fee paid
	12.02.2007	Designation fee(s) paid
	12.02.2007	Examination fee paid
Examination procedure	12.02.2007	Examination requested [2007/22]
	20.09.2011	Amendment by applicant (claims and/or description)
	13.01.2012	Despatch of a communication from the examining division (Time limit: M06)
	12.07.2012	Reply to a communication from the examining division
	10.10.2013	Application refused, date of legal effect [2014/21]
	10.10.2013	Date of oral proceedings
	20.12.2013	Minutes of oral proceedings despatched
	02.01.2014	Despatch of communication that the application is refused, reason: substantive examination [2014/21]
Divisional application(s)	EP13185393.9 / EP2688090
	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 13.01.2012
Fees paid	Renewal fee
	12.02.2007	Renewal fee patent year 03
	20.08.2008	Renewal fee patent year 04
	17.08.2009	Renewal fee patent year 05
	23.08.2010	Renewal fee patent year 06
	26.08.2011	Renewal fee patent year 07
	27.08.2012	Renewal fee patent year 08
	21.08.2013	Renewal fee patent year 09
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]US5406261 (GLENN JAMES T [US]) [Y] 3 * abstract * * columns 2-6 * * figures 1-9b *;
		[X]US6618810 (DIRIE HERZI [US]) [X] 1,2,17,18,22,24 * abstract * * column 1, line 44 - column 3, line 20 * * column 5, line 38 - column 8 ** figures 1-4 *;
		[XY]EP1378810 (MICROSOFT CORP [US]) [X] 1,2,17,18,22,24 * abstract * * paragraph [0004] * * paragraphs [0009] - [0023] * * paragraphs [0035] - [0037] - [0 45] , [0049] , [0050] * * figures 1-3 * [Y] 3
	International search	[A]JPH11161486 (COMPAQ COMPUTER CORP);
		[Y]JP2001265581 (CANON KK);
		[Y]JP2001282526 (CANON KK);
		[Y]JP2002091922 (FUJITSU GENERAL LTD);
		[A]JP2002189590 (UENO HIROYUKI);
		[Y]JP2002251225 (AMBITION INC);
		[Y]JP2004038247 (FUJITSU FIP CORP)
	by applicant	US5406261
		US6618810
		EP1378810

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