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Extract from the Register of European Patents

EP About this file: EP1800188

EP1800188 - DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND APPLICATION TO AN EXTREME ULTRAVIOLET RADIATION LITHOGRAPHY SOURCE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  13.03.2009
Database last updated on 27.07.2024
Most recent event   Tooltip03.12.2010Lapse of the patent in a contracting state
New state(s): GR		published on 05.01.2011  [2011/01]
Applicant(s)For all designated states
COMMISSARIAT A L'ENERGIE ATOMIQUE
25, rue Leblanc Immeuble "Le Ponant D"
75015 Paris / FR
For all designated states
Alcatel Vacuum Technology France
12 Rue de la Baume
75008 Paris / FR
[2007/26]
Inventor(s)01 / CHEYMOL, Guy
5 Rue Marguerite
F-91440 BURES SUR YVETTE / FR
02 / CORMONT, Philippe
41, avenue Léon Blum
F-33110 Le Bouscat / FR
03 / THRO, Pierre-Yves
2 Rue Raoul Dautry
F-91190 GIF SUR YVETTE / FR
04 / SUBLEMONTIER, Olivier
11-13 Rue des Roses
F-92260 FONTENAY AUX ROSES / FR
05 / SCHMIDT, Martin
Lieu dit Kermoisan
F-22200 Pommerit le Vicomte / FR
06 / BARTHOD, Benoît
220 Rue des Cyclamens
F-74370 NAVES PARMELAN / FR
 [2007/38]
Former [2007/26]01 / CHEYMOL, Guy
5 Rue Marguerite
F-91440 BURES SUR YVETTE / FR
02 / CORMONT, Philippe
41, avenue Léon Blum
F-33110 Le Bouscat / FR
03 / THRO, Pierre-Yves
2 Rue Raoul Dautry
F-91190 GIF SUR YVETTE / FR
04 / SUBLEMONTIER, Olivier
11-13 Rue des Roses
F-92260 FONTENAY AUX ROSES / FR
05 / SCHMIDT, Martin
16 Avenue Victor Hugo
F-92170 VANVES / FR
06 / BARTHOD, Benoît
220 Rue des Cyclamens
F-74370 NAVES PARMELAN / FR
Representative(s)Thévenet, Jean-Bruno, et al
Cabinet Beau de Loménie
158, rue de l'Université
75340 Paris Cédex 07 / FR
[N/P]
Former [2007/26]Thévenet, Jean-Bruno, et al
Cabinet Beau de Loménie 158, rue de l'Université
75340 Paris Cédex 07 / FR
Application number, filing date05777195.814.06.2005
[2007/26]
WO2005FR01465
Priority number, dateFR2004000642914.06.2004         Original published format: FR 0406429
[2007/26]
Filing languageFR
Procedural languageFR
PublicationType: A1 Application with search report
No.:WO2006000718
Date:05.01.2006
Language:FR
[2006/01]
Type: A1 Application with search report 
No.:EP1800188
Date:27.06.2007
Language:FR
The application published by WIPO in one of the EPO official languages on 05.01.2006 takes the place of the publication of the European patent application.
[2007/26]
Type: B1 Patent specification 
No.:EP1800188
Date:07.05.2008
Language:FR
[2008/19]
Search report(s)International search report - published on:EP05.01.2006
ClassificationIPC:G03F7/20, H05G2/00, G21K1/06
[2007/26]
CPC:
G03F7/70166 (EP,KR,US); G03F7/70033 (EP,KR,US); B82Y10/00 (EP,KR,US);
G03F7/70008 (KR); H05G2/003 (EP,KR,US); H05G2/008 (EP,KR,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2007/26]
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
LVNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:VORRICHTUNG ZUR ERZEUGUNG VON EXTREMEM UV-LICHT UND ANWENDUNG AUF EINE LITHOGRAFIEQUELLE MIT EXTREMER UV-STRAHLUNG[2007/26]
English:DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND APPLICATION TO AN EXTREME ULTRAVIOLET RADIATION LITHOGRAPHY SOURCE[2007/26]
French:DISPOSITIF DE GENERATION DE LUMIERE DANS L' EXTREME ULTRAVIOLET ET APPLICATION A UNE SOURCE DE LITHOGRAPHIE PAR RAYONNEMENT DANS L'EXTREME ULTRAVIOLET[2007/26]
Entry into regional phase09.05.2007National basic fee paid 
09.05.2007Designation fee(s) paid 
09.05.2007Examination fee paid 
Examination procedure05.03.2007Despatch of communication that the application is deemed to be withdrawn, reason: filing fee / search fee not paid in time
09.05.2007Examination requested  [2007/26]
16.11.2007Communication of intention to grant the patent
25.03.2008Fee for grant paid
25.03.2008Fee for publishing/printing paid
Opposition(s)10.02.2009No opposition filed within time limit [2009/16]
Fees paidRenewal fee
26.06.2007Renewal fee patent year 03
Penalty fee
Penalty fee Rule 85a EPC 1973
09.05.2007AT   M01   Fee paid on   09.05.2007
09.05.2007BE   M01   Fee paid on   09.05.2007
09.05.2007BG   M01   Fee paid on   09.05.2007
09.05.2007CH   M01   Fee paid on   09.05.2007
09.05.2007CY   M01   Fee paid on   09.05.2007
09.05.2007CZ   M01   Fee paid on   09.05.2007
09.05.2007DE   M01   Fee paid on   09.05.2007
09.05.2007DK   M01   Fee paid on   09.05.2007
09.05.2007EE   M01   Fee paid on   09.05.2007
09.05.2007ES   M01   Fee paid on   09.05.2007
09.05.2007FI   M01   Fee paid on   09.05.2007
09.05.2007FR   M01   Fee paid on   09.05.2007
09.05.2007GB   M01   Fee paid on   09.05.2007
09.05.2007GR   M01   Fee paid on   09.05.2007
09.05.2007HU   M01   Fee paid on   09.05.2007
09.05.2007IE   M01   Fee paid on   09.05.2007
09.05.2007IS   M01   Fee paid on   09.05.2007
09.05.2007IT   M01   Fee paid on   09.05.2007
09.05.2007LT   M01   Fee paid on   09.05.2007
09.05.2007LU   M01   Fee paid on   09.05.2007
09.05.2007MC   M01   Fee paid on   09.05.2007
09.05.2007NL   M01   Fee paid on   09.05.2007
09.05.2007PL   M01   Fee paid on   09.05.2007
09.05.2007PT   M01   Fee paid on   09.05.2007
09.05.2007RO   M01   Fee paid on   09.05.2007
09.05.2007SE   M01   Fee paid on   09.05.2007
09.05.2007SI   M01   Fee paid on   09.05.2007
09.05.2007SK   M01   Fee paid on   09.05.2007
09.05.2007TR   M01   Fee paid on   09.05.2007
Penalty fee Rule 85b EPC 1973
09.05.2007M01   Fee paid on   09.05.2007
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT07.05.2008
CY07.05.2008
CZ07.05.2008
DK07.05.2008
EE07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
TR07.05.2008
LU14.06.2008
BE30.06.2008
MC30.06.2008
BG07.08.2008
SE07.08.2008
GR08.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
HU08.11.2008
[2011/01]
Former [2010/40]AT07.05.2008
CY07.05.2008
CZ07.05.2008
DK07.05.2008
EE07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
TR07.05.2008
LU14.06.2008
BE30.06.2008
MC30.06.2008
BG07.08.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
HU08.11.2008
Former [2010/33]AT07.05.2008
CZ07.05.2008
DK07.05.2008
EE07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
LU14.06.2008
BE30.06.2008
MC30.06.2008
BG07.08.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
Former [2009/27]AT07.05.2008
CZ07.05.2008
DK07.05.2008
EE07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
BE30.06.2008
MC30.06.2008
BG07.08.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
Former [2009/22]AT07.05.2008
CZ07.05.2008
DK07.05.2008
EE07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
BE30.06.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
Former [2009/19]AT07.05.2008
CZ07.05.2008
DK07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
BE30.06.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
Former [2009/14]AT07.05.2008
CZ07.05.2008
DK07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
RO07.05.2008
SI07.05.2008
SK07.05.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
PT07.10.2008
Former [2009/13]AT07.05.2008
CZ07.05.2008
DK07.05.2008
FI07.05.2008
IE07.05.2008
LT07.05.2008
PL07.05.2008
SI07.05.2008
SK07.05.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
Former [2009/08]AT07.05.2008
DK07.05.2008
FI07.05.2008
IE07.05.2008
PL07.05.2008
SI07.05.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
Former [2009/07]AT07.05.2008
FI07.05.2008
PL07.05.2008
SI07.05.2008
MC30.06.2008
SE07.08.2008
ES18.08.2008
IS07.09.2008
Former [2009/05]AT07.05.2008
FI07.05.2008
PL07.05.2008
SI07.05.2008
ES18.08.2008
IS07.09.2008
Former [2008/50]AT07.05.2008
FI07.05.2008
PL07.05.2008
SI07.05.2008
ES18.08.2008
Former [2008/48]SI07.05.2008
ES18.08.2008
Former [2008/44]SI07.05.2008
Cited inInternational search[DA]US4063088  (DAILEY CARROLL C) [DA] 16-20* the whole document *;
 [DA]WO02085080  (COMMISSARIAT ENERGIE ATOMIQUE [FR], et al) [DA] 1-25 * page 15, line 10 - page 17, line 29; figure 1 *;
 [DA]EP1255163  (TRW INC [US]) [DA] 1-25 * paragraph [0004] * * paragraph [0018]; figure 4 *;
 [A]US2004109151  (BAKKER LEVINUS PIETER [NL], et al) [A] 1-25 * paragraph [0054] - paragraph [0059]; figure 5 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.