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Extract from the Register of European Patents

EP About this file: EP1806611

EP1806611 - IMAGING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD [Right-click to bookmark this link]
Former [2007/28]PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD
[2012/44]
StatusNo opposition filed within time limit
Status updated on  14.02.2014
Database last updated on 24.08.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): HU, LU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
NIKON CORPORATION
12-1, Yurakucho 1-chome
Chiyoda-ku
Tokyo 100-8331 / JP
[N/P]
Former [2010/30]For all designated states
NIKON CORPORATION
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Former [2007/28]For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / IKEZAWA, Hironori, c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8331 / JP
02 / OMURA, Yasuhiro, c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8331 / JP
 [2013/15]
Former [2007/28]01 / IKEZAWA, Hironori, c/o NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8331 / JP
02 / OMURA, Yasuhiro, c/o NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8331 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[N/P]
Former [2013/15]HOFFMANN EITLE
Patent- und Rechtsanwälte
Arabellastrasse 4
81925 München / DE
Former [2008/31]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Former [2007/28]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastraße 4
D-81925 München / DE
Application number, filing date05793148.712.10.2005
[2007/28]
WO2005JP18807
Priority number, dateJP2004030319118.10.2004         Original published format: JP 2004303191
[2007/28]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2006043457
Date:27.04.2006
Language:EN
[2006/17]
Type: A1 Application with search report 
No.:EP1806611
Date:11.07.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 27.04.2006 takes the place of the publication of the European patent application.
[2007/28]
Type: B1 Patent specification 
No.:EP1806611
Date:10.04.2013
Language:EN
[2013/15]
Search report(s)International search report - published on:JP27.04.2006
(Supplementary) European search report - dispatched on:EP02.12.2008
ClassificationIPC:G02B13/24
[2007/28]
CPC:
G03F7/70341 (EP,KR,US); G02B13/143 (EP,KR,US); G03F7/2041 (KR);
G03F7/70983 (EP,KR,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2007/28]
TitleGerman:OPTISCHES ABBILDUNGSSYSTEM, BELICHTUNGSSYSTEM UND BELICHTUNGSVERFAHREN[2012/44]
English:IMAGING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD[2012/44]
French:SYSTEME D'IMAGERIE OPTIQUE, SYSTEME D'EXPOSITION ET PROCEDE D'EXPOSITION[2012/44]
Former [2007/28]OPTISCHES PROJEKTIONSSYSTEM, BELICHTUNGSSYSTEM UND BELICHTUNGSVERFAHREN
Former [2007/28]PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD
Former [2007/28]SYSTEME DE PROJECTION OPTIQUE, SYSTEME D'EXPOSITION ET PROCEDE D' EXPOSITION
Entry into regional phase08.05.2007Translation filed 
08.05.2007National basic fee paid 
08.05.2007Search fee paid 
08.05.2007Designation fee(s) paid 
08.05.2007Examination fee paid 
Examination procedure08.05.2007Examination requested  [2007/28]
06.07.2007Amendment by applicant (claims and/or description)
23.03.2009Despatch of a communication from the examining division (Time limit: M04)
23.07.2009Reply to a communication from the examining division
23.02.2011Despatch of a communication from the examining division (Time limit: M06)
17.08.2011Reply to a communication from the examining division
05.11.2012Communication of intention to grant the patent
26.02.2013Fee for grant paid
26.02.2013Fee for publishing/printing paid
Divisional application(s)EP09166329.4  / EP2108990
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  23.03.2009
Opposition(s)13.01.2014No opposition filed within time limit [2014/12]
Fees paidRenewal fee
25.10.2007Renewal fee patent year 03
27.10.2008Renewal fee patent year 04
30.10.2009Renewal fee patent year 05
22.10.2010Renewal fee patent year 06
25.10.2011Renewal fee patent year 07
18.10.2012Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU12.10.2005
AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
TR10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
GB12.10.2013
IE12.10.2013
LU12.10.2013
CH31.10.2013
FR31.10.2013
LI31.10.2013
[2015/34]
Former [2015/32]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
TR10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
GB12.10.2013
IE12.10.2013
CH31.10.2013
FR31.10.2013
LI31.10.2013
Former [2014/48]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
GB12.10.2013
IE12.10.2013
CH31.10.2013
FR31.10.2013
LI31.10.2013
Former [2014/37]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
GB12.10.2013
CH31.10.2013
FR31.10.2013
LI31.10.2013
Former [2014/34]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
GB12.10.2013
CH31.10.2013
LI31.10.2013
Former [2014/25]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
MC10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2014/11]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
IT10.04.2013
LT10.04.2013
LV10.04.2013
NL10.04.2013
PL10.04.2013
RO10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2014/10]AT10.04.2013
BE10.04.2013
CY10.04.2013
CZ10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
LT10.04.2013
LV10.04.2013
NL10.04.2013
PL10.04.2013
SE10.04.2013
SI10.04.2013
SK10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2014/09]AT10.04.2013
BE10.04.2013
CY10.04.2013
DK10.04.2013
EE10.04.2013
FI10.04.2013
LT10.04.2013
LV10.04.2013
NL10.04.2013
PL10.04.2013
SE10.04.2013
SI10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2013/52]AT10.04.2013
BE10.04.2013
CY10.04.2013
FI10.04.2013
LT10.04.2013
LV10.04.2013
NL10.04.2013
PL10.04.2013
SE10.04.2013
SI10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2013/50]AT10.04.2013
BE10.04.2013
FI10.04.2013
LT10.04.2013
LV10.04.2013
NL10.04.2013
PL10.04.2013
SE10.04.2013
SI10.04.2013
BG10.07.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2013/49]AT10.04.2013
BE10.04.2013
FI10.04.2013
LT10.04.2013
NL10.04.2013
SE10.04.2013
SI10.04.2013
GR11.07.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2013/48]AT10.04.2013
LT10.04.2013
NL10.04.2013
SI10.04.2013
ES21.07.2013
IS10.08.2013
PT12.08.2013
Former [2013/47]LT10.04.2013
SI10.04.2013
PT12.08.2013
Former [2013/37]SI10.04.2013
Documents cited:Search[X]WO2004019128  (NIPPON KOGAKU KK [JP], et al) [X] 1,4-9,12-14,17,18,21-23,25 * abstract * * table 7 * * figure 10 *;
 [X]DD224448  (ZEISS JENA VEB CARL [DD]) [X] 3 * abstract * * figure 1 *;
 [A]  - HEINZ HAFERKORN, Optik, LEIPZIG BERLIN HEIDELBERG, BARTH VERLAGSGESELLSCHAFT, (1994), XP002504890 [A] 3 * page 665 - page 666; figure 6.139 *
International search[X]WO2004019128  (NIPPON KOGAKU KK [JP], et al);
 [Y]JP2004205698  (NIKON CORP);
 [Y]WO2004084281  (NIKON CORP [JP], et al);
 [Y]WO9949504  (NIKON CORP [JP], et al)
by applicantWO2004019128
 DD224448
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.