EP1806611 - IMAGING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD [Right-click to bookmark this link] | |||
Former [2007/28] | PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD | ||
[2012/44] | Status | No opposition filed within time limit Status updated on 14.02.2014 Database last updated on 24.08.2024 | Most recent event Tooltip | 17.07.2015 | Lapse of the patent in a contracting state New state(s): HU, LU | published on 19.08.2015 [2015/34] | Applicant(s) | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
Former [2010/30] | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
Former [2007/28] | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
IKEZAWA, Hironori, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | 02 /
OMURA, Yasuhiro, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | [2013/15] |
Former [2007/28] | 01 /
IKEZAWA, Hironori, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | ||
02 /
OMURA, Yasuhiro, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [N/P] |
Former [2013/15] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | ||
Former [2008/31] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | ||
Former [2007/28] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastraße 4 D-81925 München / DE | Application number, filing date | 05793148.7 | 12.10.2005 | [2007/28] | WO2005JP18807 | Priority number, date | JP20040303191 | 18.10.2004 Original published format: JP 2004303191 | [2007/28] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006043457 | Date: | 27.04.2006 | Language: | EN | [2006/17] | Type: | A1 Application with search report | No.: | EP1806611 | Date: | 11.07.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.04.2006 takes the place of the publication of the European patent application. | [2007/28] | Type: | B1 Patent specification | No.: | EP1806611 | Date: | 10.04.2013 | Language: | EN | [2013/15] | Search report(s) | International search report - published on: | JP | 27.04.2006 | (Supplementary) European search report - dispatched on: | EP | 02.12.2008 | Classification | IPC: | G02B13/24 | [2007/28] | CPC: |
G03F7/70341 (EP,KR,US);
G02B13/143 (EP,KR,US);
G03F7/2041 (KR);
G03F7/70983 (EP,KR,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/28] | Title | German: | OPTISCHES ABBILDUNGSSYSTEM, BELICHTUNGSSYSTEM UND BELICHTUNGSVERFAHREN | [2012/44] | English: | IMAGING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD | [2012/44] | French: | SYSTEME D'IMAGERIE OPTIQUE, SYSTEME D'EXPOSITION ET PROCEDE D'EXPOSITION | [2012/44] |
Former [2007/28] | OPTISCHES PROJEKTIONSSYSTEM, BELICHTUNGSSYSTEM UND BELICHTUNGSVERFAHREN | ||
Former [2007/28] | PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD | ||
Former [2007/28] | SYSTEME DE PROJECTION OPTIQUE, SYSTEME D'EXPOSITION ET PROCEDE D' EXPOSITION | Entry into regional phase | 08.05.2007 | Translation filed | 08.05.2007 | National basic fee paid | 08.05.2007 | Search fee paid | 08.05.2007 | Designation fee(s) paid | 08.05.2007 | Examination fee paid | Examination procedure | 08.05.2007 | Examination requested [2007/28] | 06.07.2007 | Amendment by applicant (claims and/or description) | 23.03.2009 | Despatch of a communication from the examining division (Time limit: M04) | 23.07.2009 | Reply to a communication from the examining division | 23.02.2011 | Despatch of a communication from the examining division (Time limit: M06) | 17.08.2011 | Reply to a communication from the examining division | 05.11.2012 | Communication of intention to grant the patent | 26.02.2013 | Fee for grant paid | 26.02.2013 | Fee for publishing/printing paid | Divisional application(s) | EP09166329.4 / EP2108990 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 23.03.2009 | Opposition(s) | 13.01.2014 | No opposition filed within time limit [2014/12] | Fees paid | Renewal fee | 25.10.2007 | Renewal fee patent year 03 | 27.10.2008 | Renewal fee patent year 04 | 30.10.2009 | Renewal fee patent year 05 | 22.10.2010 | Renewal fee patent year 06 | 25.10.2011 | Renewal fee patent year 07 | 18.10.2012 | Renewal fee patent year 08 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 12.10.2005 | AT | 10.04.2013 | BE | 10.04.2013 | CY | 10.04.2013 | CZ | 10.04.2013 | DK | 10.04.2013 | EE | 10.04.2013 | FI | 10.04.2013 | IT | 10.04.2013 | LT | 10.04.2013 | LV | 10.04.2013 | MC | 10.04.2013 | NL | 10.04.2013 | PL | 10.04.2013 | RO | 10.04.2013 | SE | 10.04.2013 | SI | 10.04.2013 | SK | 10.04.2013 | TR | 10.04.2013 | BG | 10.07.2013 | GR | 11.07.2013 | ES | 21.07.2013 | IS | 10.08.2013 | PT | 12.08.2013 | GB | 12.10.2013 | IE | 12.10.2013 | LU | 12.10.2013 | CH | 31.10.2013 | FR | 31.10.2013 | LI | 31.10.2013 | [2015/34] |
Former [2015/32] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
MC | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
TR | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
GB | 12.10.2013 | ||
IE | 12.10.2013 | ||
CH | 31.10.2013 | ||
FR | 31.10.2013 | ||
LI | 31.10.2013 | ||
Former [2014/48] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
MC | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
GB | 12.10.2013 | ||
IE | 12.10.2013 | ||
CH | 31.10.2013 | ||
FR | 31.10.2013 | ||
LI | 31.10.2013 | ||
Former [2014/37] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
MC | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
GB | 12.10.2013 | ||
CH | 31.10.2013 | ||
FR | 31.10.2013 | ||
LI | 31.10.2013 | ||
Former [2014/34] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
MC | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
GB | 12.10.2013 | ||
CH | 31.10.2013 | ||
LI | 31.10.2013 | ||
Former [2014/25] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
MC | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2014/11] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
IT | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
RO | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2014/10] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
CZ | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
SK | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2014/09] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
DK | 10.04.2013 | ||
EE | 10.04.2013 | ||
FI | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2013/52] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
CY | 10.04.2013 | ||
FI | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2013/50] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
FI | 10.04.2013 | ||
LT | 10.04.2013 | ||
LV | 10.04.2013 | ||
NL | 10.04.2013 | ||
PL | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
BG | 10.07.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2013/49] | AT | 10.04.2013 | |
BE | 10.04.2013 | ||
FI | 10.04.2013 | ||
LT | 10.04.2013 | ||
NL | 10.04.2013 | ||
SE | 10.04.2013 | ||
SI | 10.04.2013 | ||
GR | 11.07.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2013/48] | AT | 10.04.2013 | |
LT | 10.04.2013 | ||
NL | 10.04.2013 | ||
SI | 10.04.2013 | ||
ES | 21.07.2013 | ||
IS | 10.08.2013 | ||
PT | 12.08.2013 | ||
Former [2013/47] | LT | 10.04.2013 | |
SI | 10.04.2013 | ||
PT | 12.08.2013 | ||
Former [2013/37] | SI | 10.04.2013 | Documents cited: | Search | [X]WO2004019128 (NIPPON KOGAKU KK [JP], et al) [X] 1,4-9,12-14,17,18,21-23,25 * abstract * * table 7 * * figure 10 *; | [X]DD224448 (ZEISS JENA VEB CARL [DD]) [X] 3 * abstract * * figure 1 *; | [A] - HEINZ HAFERKORN, Optik, LEIPZIG BERLIN HEIDELBERG, BARTH VERLAGSGESELLSCHAFT, (1994), XP002504890 [A] 3 * page 665 - page 666; figure 6.139 * | International search | [X]WO2004019128 (NIPPON KOGAKU KK [JP], et al); | [Y]JP2004205698 (NIKON CORP); | [Y]WO2004084281 (NIKON CORP [JP], et al); | [Y]WO9949504 (NIKON CORP [JP], et al) | by applicant | WO2004019128 | DD224448 |