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Extract from the Register of European Patents

EP About this file: EP1828430

EP1828430 - METHOD FOR DEPOSITION OF METAL LAYERS FROM METAL CARBONYL PRECURSORS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.06.2012
Database last updated on 02.11.2024
Most recent event   Tooltip04.10.2013Lapse of the patent in a contracting state
New state(s): HU		published on 06.11.2013  [2013/45]
Applicant(s)For all designated states
Tokyo Electron Ltd.
TBS Broadcast Center 3-6 Akasaka 5-chome, Minato-ku
Tokyo 107-8481 / JP
For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
[N/P]
Former [2007/36]For all designated states
Tokyo Electron Ltd.
TBS Broadcast Center 3-6 Akasaka 5-chome, Minato-ku
Tokyo 107-8481 / JP
For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
Inventor(s)01 / SUZUKI, Kenji
21g Brookedge
Guilderland, NY 12084 / US
02 / GUIDOTTI, Emmanuel
25 rue de Buisson-Rond Le Recamier B
73000 Barbarez / FR
03 / LEUSINK, Gerrit, J.
1117 Netherwood Road
Saltpoint, NY 12578 / US
04 / MCFEELY, Fenton, R.
25 Donald Lane
Ossining, NY 10562 / US
05 / MALHOTRA, Sandra G.
4385 Watson Circle
Santa Clara, CA 95054 / US
 [2008/52]
Former [2007/42]01 / SUZUKI, Kenji
21g Brookedge
Guilderland, NY 12084 / US
02 / GUIDOTTI, Emmanuel
25 rue de Buisson-Rond Le Recamier B
73000 Barbarez / FR
03 / LEUSINK, Gerrit, J.
1117 Netherwood Road
Saltpoint, NY 12578 / US
04 / MCFEELY, Fenton, R.
25 Donald Lane
Ossining, NY 10562 / US
05 / MALHOTRA, Sandra G.
96 Rombout avenue
Beacon NY 12508 / US
Former [2007/36]01 / SUZUKI, Kenji
21g Brookedge
Guilderland, NY 12084 / US
02 / GUIDOTTI, Emmanuel
7 Greenhill Drive, 36C
Fishkill, NY 12524 / US
03 / LEUSINK, Gerrit, J.
1117 Netherwood Road
Saltpoint, NY 12578 / US
04 / MCFEELY, Fenton, R.
25 Donald Lane
Ossining, NY 10562 / US
05 / MALHOTRA, Sandra G.
96 Rombout avenue
Beacon NY 12508 / US
Representative(s)Liesegang, Eva
Boehmert & Boehmert
Anwaltspartnerschaft mbB
Pettenkoferstrasse 22
80336 München / DE
[N/P]
Former [2007/36]Liesegang, Eva
Forrester & Boehmert, Pettenkoferstrasse 20-22
80336 München / DE
Application number, filing date05807544.103.10.2005
[2007/36]
WO2005US35582
Priority number, dateUS2004099614523.11.2004         Original published format: US 996145
[2007/36]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2006057709
Date:01.06.2006
Language:EN
[2006/22]
Type: A2 Application without search report 
No.:EP1828430
Date:05.09.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 01.06.2006 takes the place of the publication of the European patent application.
[2007/36]
Type: B1 Patent specification 
No.:EP1828430
Date:10.08.2011
Language:EN
[2011/32]
Search report(s)International search report - published on:EP31.05.2007
ClassificationIPC:C23C16/16
[2007/36]
CPC:
H01L21/76843 (EP,US); C23C16/16 (EP,KR,US); H01L21/28556 (EP,US);
H01L21/76846 (EP,US); H01L21/76873 (EP,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2007/36]
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:VERFAHREN ZUR ABSCHEIDUNG VON METALLSCHICHTEN AUS METALLCARBONYLVORLÄUFERN[2007/36]
English:METHOD FOR DEPOSITION OF METAL LAYERS FROM METAL CARBONYL PRECURSORS[2007/36]
French:PROCEDE DE DEPOT DE COUCHES METALLIQUES A PARTIR DE PRECURSEURS DE METAL-CARBONYLE[2011/08]
Former [2007/36]PROCEDE DESTINE A AUGMENTER LES VITESSES DE DEPOT DE COUCHES METALLIQUES A PARTIR DE PRECURSEURS DE METAL-CARBONYLE
Entry into regional phase23.05.2007National basic fee paid 
23.05.2007Designation fee(s) paid 
23.05.2007Examination fee paid 
Examination procedure23.05.2007Amendment by applicant (claims and/or description)
23.05.2007Examination requested  [2007/36]
12.06.2008Despatch of a communication from the examining division (Time limit: M06)
03.12.2008Reply to a communication from the examining division
15.02.2011Communication of intention to grant the patent
10.06.2011Fee for grant paid
10.06.2011Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  12.06.2008
Opposition(s)11.05.2012No opposition filed within time limit [2012/29]
Fees paidRenewal fee
15.10.2007Renewal fee patent year 03
28.03.2008Renewal fee patent year 04
07.10.2009Renewal fee patent year 05
23.09.2010Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
HU10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
TR10.08.2011
IE03.10.2011
LU03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
BG10.11.2011
GB10.11.2011
GR11.11.2011
ES21.11.2011
IS10.12.2011
PT12.12.2011
[2013/45]
Former [2013/44]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
TR10.08.2011
IE03.10.2011
LU03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
BG10.11.2011
GB10.11.2011
GR11.11.2011
ES21.11.2011
IS10.12.2011
PT12.12.2011
Former [2013/29]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
IE03.10.2011
LU03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
BG10.11.2011
GB10.11.2011
GR11.11.2011
ES21.11.2011
IS10.12.2011
PT12.12.2011
Former [2013/25]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
IE03.10.2011
LU03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
GB10.11.2011
GR11.11.2011
ES21.11.2011
IS10.12.2011
PT12.12.2011
Former [2013/22]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
IE03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
GB10.11.2011
GR11.11.2011
ES21.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/47]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
IE03.10.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
GB10.11.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/46]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
GB10.11.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/37]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
FR02.11.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/33]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
DK10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
CH31.10.2011
LI31.10.2011
MC31.10.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/25]AT10.08.2011
BE10.08.2011
CY10.08.2011
CZ10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
RO10.08.2011
SE10.08.2011
SI10.08.2011
SK10.08.2011
MC31.10.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/23]AT10.08.2011
BE10.08.2011
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CZ10.08.2011
EE10.08.2011
FI10.08.2011
IT10.08.2011
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LV10.08.2011
NL10.08.2011
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RO10.08.2011
SE10.08.2011
SI10.08.2011
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IS10.12.2011
PT12.12.2011
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SI10.08.2011
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PT12.12.2011
Former [2012/17]AT10.08.2011
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NL10.08.2011
PL10.08.2011
SE10.08.2011
SI10.08.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/12]AT10.08.2011
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FI10.08.2011
LT10.08.2011
LV10.08.2011
NL10.08.2011
PL10.08.2011
SE10.08.2011
SI10.08.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/11]AT10.08.2011
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LV10.08.2011
NL10.08.2011
PL10.08.2011
SE10.08.2011
SI10.08.2011
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IS10.12.2011
PT12.12.2011
Former [2012/10]FI10.08.2011
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NL10.08.2011
SE10.08.2011
GR11.11.2011
IS10.12.2011
PT12.12.2011
Former [2012/09]FI10.08.2011
LT10.08.2011
NL10.08.2011
IS10.12.2011
PT12.12.2011
Former [2012/08]LT10.08.2011
NL10.08.2011
IS10.12.2011
Cited inInternational search[X]US4929468  (MULLENDORE ARTHUR W [US]) [X] 1-6 * examples 4,5 *;
 [XY]US4938999  (JENKIN WILLIAM C [US]) [X] 1,2,7,10-12,19 * column 7, line 11 - line 53 * * column 9, line 4 - line 27 * [Y] 8,9,39;
 [XY]US6444263  (PARANJPE AJIT P [US], et al) [X] 1,13-18 * column 2, line 19 - line 31 * * column 3, line 39 - column 4, line 63 * [Y] 8,9,20-39;
 [PX]US2005081882  (GREER HAROLD F [US], et al) [PX] 1,20* paragraphs [0036] - [0038] *;
 [Y]  - WANG Q ET AL, "Low-temperature chemical vapor deposition and scaling limit of ultrathin Ru films", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, (20040223), vol. 84, no. 8, ISSN 0003-6951, pages 1380 - 1382, XP012062189 [Y] 20-39 * page 1380, column R, line 15 - line 23 *

DOI:   http://dx.doi.org/10.1063/1.1650044
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.