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EP1833081

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Extract from the Register of European Patents

EP About this file: EP1833081

EP1833081 - EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE [Right-click to bookmark this link]
Status	The application has been withdrawn Status updated on 10.12.2010 Database last updated on 28.09.2024
Most recent event Tooltip	10.12.2010	Withdrawal of application	published on 12.01.2011 [2011/02]
	10.12.2010	Change - inventor	published on 12.01.2011 [2011/02]
Applicant(s)	For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP
	[N/P]
Former [2010/30]	For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP
Former [2007/37]	For all designated states NIKON CORPORATION Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8831 / JP
Inventor(s)	01 / NAKAGAWA, Chiaki c/o Nikon Corporation Intellectual Property Department 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 1008331 / JP
	[2011/02]
Former [2007/37]	01 / NAKAGAWA, Chiaki c/o NIKON CORPORATION Intellectual Property Department 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 1008331 / JP
Representative(s)	Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE
	[N/P]
Former [2008/31]	HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE
Former [2007/37]	HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 D-81925 München / DE
Application number, filing date	05814498.1	06.12.2005
	[2007/37]
	WO2005JP22371
Priority number, date	JP20040353948	07.12.2004 Original published format: JP 2004353948
	[2007/37]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2006062096
	Date:	15.06.2006
	Language:	EN
	[2006/24]
	Type:	A1 Application with search report
	No.:	EP1833081
	Date:	12.09.2007
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 15.06.2006 takes the place of the publication of the European patent application.
	[2007/37]
Search report(s)	International search report - published on:	JP	15.06.2006
	(Supplementary) European search report - dispatched on:	EP	26.10.2010
Classification	IPC:	H01L21/027, G03F7/20	[2007/37]
	CPC:	G03F7/70341 (EP,KR,US); G03F7/2041 (KR); G03F7/70525 (EP,KR,US); G03F7/708 (EP,US); G03F7/70808 (KR); G03F7/7085 (KR); (+) G03F7/70858 (KR); H01L21/67253 (KR) (-)
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/37]
Extension states	AL	Not yet paid
	BA	Not yet paid
	HR	Not yet paid
	MK	Not yet paid
	YU	Not yet paid
Title	German:	BELICHTUNGSVORRICHTUNG UND VERFAHREN ZUR BAUELEMENTEHERSTELLUNG	[2007/37]
	English:	EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE	[2007/37]
	French:	APPAREIL D'EXPOSITION ET PROCEDE DE FABRICATION DE DISPOSITIF	[2007/37]
Entry into regional phase	18.06.2007	Translation filed
	18.06.2007	National basic fee paid
	18.06.2007	Search fee paid
	18.06.2007	Designation fee(s) paid
	18.06.2007	Examination fee paid
Examination procedure	18.06.2007	Examination requested [2007/37]
	30.11.2010	Application withdrawn by applicant [2011/02]
Fees paid	Renewal fee
	19.12.2007	Renewal fee patent year 03
	29.12.2008	Renewal fee patent year 04
	23.12.2009	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]EP1420299 (ASML NETHERLANDS BV [NL]);
		[X]US2004103950 (IRIGUCHI CHIHARU [JP]);
		[Y]US2004117056 (ABUKU YUJI [JP]);
		[XP]EP1528431 (NIKON CORP [JP]);
		[E]EP1653501 (NIKON CORP [JP])
	International search	[A]JP2004198430 (ASML HOLDING NV);
		[A]JP2004207696 (NIKON CORP);
		[XP]JP2005159322 (NIKON CORP);
		[AP]JP2005259789 (NIKON CORP);
		[XP]JP2005268742 (NIKON CORP);
		[XE]WO2006013806 (NIKON CORP [JP], et al)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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