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Extract from the Register of European Patents

EP About this file: EP1691588

EP1691588 - Apparatus and method for production of extreme ultraviolet (EUV) radiation [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  21.05.2010
Database last updated on 14.09.2024
Most recent event   Tooltip21.05.2010Application deemed to be withdrawnpublished on 23.06.2010  [2010/25]
Applicant(s)For all designated states
XTREME technologies GmbH
Göschwitzer Strasse 25
07745 Jena / DE
[2006/33]
Inventor(s)01 / Gäbel, Kai, Dr.
Biberweg 22
07749 Jena / DE
02 / Kleinschmidt, Jürgen, Dr.
Kalklage 24
37077 Göttingen / DE
 [2006/33]
Representative(s)Freitag, Joachim, et al
Patentanwälte
Oehmke & Kollegen
Neugasse 13
07743 Jena / DE
[N/P]
Former [2008/29]Freitag, Joachim, et al
Patentanwälte Oehmke & Kollegen Neugasse 13
07743 Jena / DE
Former [2008/27]Oehmke, Volker, et al
Patentanwälte Oehmke & Kollegen, Neugasse 13
07743 Jena / DE
Former [2006/33]Bertram, Helmut, et al
Patentanwälte OEHMKE & KOLLEGEN Neugasse 13
07743 Jena / DE
Application number, filing date06002837.013.02.2006
[2006/33]
Priority number, dateDE2005100788415.02.2005         Original published format: DE102005007884
[2006/33]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP1691588
Date:16.08.2006
Language:DE
[2006/33]
Type: A3 Search report 
No.:EP1691588
Date:27.05.2009
[2009/22]
Search report(s)(Supplementary) European search report - dispatched on:EP24.04.2009
ClassificationIPC:H05G2/00
[2006/33]
CPC:
H05G2/003 (EP,US); H05G2/005 (EP,US)
Designated contracting states(deleted) [2010/05]
Former [2006/33]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung[2006/33]
English:Apparatus and method for production of extreme ultraviolet (EUV) radiation[2006/33]
French:Dispositif et procédé pour la génération de rayonnement ultraviolet extrême (EUV)[2006/33]
Examination procedure29.12.2009Application deemed to be withdrawn, date of legal effect  [2010/25]
28.01.2010Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2010/25]
Fees paidRenewal fee
20.02.2008Renewal fee patent year 03
19.02.2009Renewal fee patent year 04
Penalty fee
Additional fee for renewal fee
28.02.201005   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US3777208  (RYASON P) [A] 1;
 [A]US2002070353  (RICHARDSON MARTIN [US]) [A] 1 * figure 2 *;
 [A]US2003068012  (AHMAD IMTIAZ [DE], et al) [A] 1;
 [A]US2003183787  (IKEUCHI MITSURU [JP]) [A] 1;
 [A]US2004105082  (KOSHELEV KONSTANTIN NIKOLAEVIT [RU], et al) [A] 1* figures 17A-E *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.