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EP1704962
European procedure
Extract from the Register of European Patents
EP About this file: EP1704962
| EP1704962 - Polishing apparatus having interlock function [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 14.08.2009 Database last updated on 16.07.2024 | Most recent event Tooltip | 14.08.2009 | No opposition filed within time limit | published on 16.09.2009 [2009/38] | Applicant(s) | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo / JP | [2006/39] | Inventor(s) | 01 /
Watanabe, Katsuhide c/o Ebara Corporation 11-1 Haneda Asahi-cho Ohta-ku, Tokyo / JP | [2008/41] |
| Former [2006/39] | 01 /
Watanabe, Katsuhide Ebara Corporation 11-1 Haneda Asahi-cho Ohta-ku Tokyo / JP | Representative(s) | Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [N/P] |
| Former [2006/39] | Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | Application number, filing date | 06013931.8 | 28.05.1997 | [2006/39] | Priority number, date | JP19960161146 | 30.05.1996 Original published format: JP 16114696 | [2006/39] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1704962 | Date: | 27.09.2006 | Language: | EN | [2006/39] | Type: | A3 Search report | No.: | EP1704962 | Date: | 01.08.2007 | [2007/31] | Type: | B1 Patent specification | No.: | EP1704962 | Date: | 08.10.2008 | Language: | EN | [2008/41] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 29.06.2007 | Classification | IPC: | B24B1/00, B24B37/04 | [2006/39] | CPC: |
B24B37/005 (EP,US);
H01L21/304 (KR);
B24B49/16 (EP,US);
G05B19/4063 (EP,US);
G05B19/416 (EP,US);
G05B2219/37434 (EP,US);
G05B2219/45199 (EP,US);
G05B2219/50113 (EP,US);
G05B2219/50205 (EP,US);
G05B2219/50276 (EP,US)
(-)
| Designated contracting states | DE, GB [2006/39] | Title | German: | Poliervorrichtung mit Verriegelungsfunktion | [2006/39] | English: | Polishing apparatus having interlock function | [2006/39] | French: | Appareil de polissage ayant une fonction de verrouillage | [2006/39] | Examination procedure | 26.09.2007 | Amendment by applicant (claims and/or description) | 26.09.2007 | Examination requested [2007/46] | 11.04.2008 | Communication of intention to grant the patent | 20.08.2008 | Fee for grant paid | 20.08.2008 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP02004882.3 / EP1213094 | EP97108597.2 / EP0810064 | Opposition(s) | 09.07.2009 | No opposition filed within time limit [2009/38] | Fees paid | Renewal fee | 05.07.2006 | Renewal fee patent year 03 | 05.07.2006 | Renewal fee patent year 04 | 05.07.2006 | Renewal fee patent year 05 | 05.07.2006 | Renewal fee patent year 06 | 05.07.2006 | Renewal fee patent year 07 | 05.07.2006 | Renewal fee patent year 08 | 05.07.2006 | Renewal fee patent year 09 | 05.07.2006 | Renewal fee patent year 10 | 30.05.2007 | Renewal fee patent year 11 | 29.05.2008 | Renewal fee patent year 12 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]EP0616362 (TOSHIBA KK [JP]) [A] 1 * column 8, line 40 - line 50 * * column 13, line 5 - column 18, line 40 *; | [A]US5456627 (JACKSON PAUL D [US], et al) [A] 1 * abstract *; | [A]JPH05277929 ; | [A]EP0658400 (EBARA CORP [JP], et al) [A] * column 7, line 50 - column 8, line 15; figure - *; | [A]US5439551 (MEIKLE SCOTT [US], et al) [A] * abstract *; | [A]JPH07112365 ; | [A]US3813828 (BENNETT A) [A] * abstract * * column 2, line 60 - column 3, line 10 *; | [A]JPH06270054 ; | [A]JPH07112363 ; | [A]JPS63212465 | [A] - PATENT ABSTRACTS OF JAPAN, (19940127), vol. 018, no. 054, Database accession no. (M - 1549), & JP05277929 A 19931026 (MITSUBISHI MATERIALS CORP) [A] * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19950929), vol. 095, no. 008, & JP07112365 A 19950502 (MURATA MFG CO LTD) [A] * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19941221), vol. 018, no. 679, Database accession no. (M - 1728), & JP06270054 A 19940927 (MURATA MFG CO LTD) [A] * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19950929), vol. 095, no. 008, & JP07112363 A 19950502 (MURATA MFG CO LTD) [A] * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19881221), vol. 012, no. 490, Database accession no. (M - 779), & JP63212465 A 19880905 (HOYA CORP) [A] * abstract * |