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Extract from the Register of European Patents

EP About this file: EP1936656

EP1936656 - Plasma generator and method for cleaning an object [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  12.06.2009
Database last updated on 02.11.2024
Most recent event   Tooltip12.06.2009Application deemed to be withdrawnpublished on 15.07.2009  [2009/29]
Applicant(s)For all designated states
Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
Anna van Buerenplein 1
2595 DA 's-Gravenhage / NL
[N/P]
Former [2008/26]For all designated states
Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
Schoemakerstraat 97
2628 VK Delft / NL
Inventor(s)01 / Wieringa, Fokko Pieter
Vergezicht 32
6661 RE Elst / NL
02 / Koster, Norbertus Benedictus
Stille Putten 2
2612 KT Delft / NL
03 / van Vliet, Roland
Fuutlaan 41
1431 VN Aalsmeer / NL
04 / van Mierlo, Hubert Adriaan
Jan Woudesteinstraat 9
4144 RA Maassluis / NL
 [2008/26]
Representative(s)van Loon, C.J.J., et al
Vereenigde
Johan de Wittlaan 7
2517 JR Den Haag / NL
[N/P]
Former [2008/26]van Loon, C.J.J., et al
VEREENIGDE Johan de Wittlaan 7
2517 JR Den Haag / NL
Application number, filing date06077298.521.12.2006
[2008/26]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP1936656
Date:25.06.2008
Language:EN
[2008/26]
Search report(s)(Supplementary) European search report - dispatched on:EP03.05.2007
ClassificationIPC:H01J37/32
[2008/26]
CPC:
H01J37/3266 (EP,US); H01J37/32357 (EP,US); H01J37/32623 (EP,US);
H01J2237/335 (EP,US)
Designated contracting states(deleted) [2009/10]
Former [2008/26]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Plasmagenerator und Reinigungsverfahren für ein Objekt[2008/26]
English:Plasma generator and method for cleaning an object[2008/26]
French:Générateur de plasma et procédé de nettoyage d'un objet[2008/26]
Examination procedure30.12.2008Application deemed to be withdrawn, date of legal effect  [2009/29]
05.02.2009Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2009/29]
Fees paidPenalty fee
Additional fee for renewal fee
31.12.200803   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XA]DE4414083  (LEYBOLD AG [DE]) [X] 1,2,5,6 * column 1, line 6 * * column 3, lines 39-43,55,56 * * column 4, lines 27-54; figure 1 * * column 5, lines 25-51; figure 4 * [A] 3,4,7,8;
 [X]US2002185226  (LEA LESLIE MICHAEL [GB], et al) [X] 1,2,5,6,9,10 * paragraphs [0025] - [0027] * * paragraphs [0052] , [0053] , [0056] , [0058] * * paragraphs [0168] , [0171] - [0173] - [0182] , [0187]; figure 18 * * paragraph [0175]; figure 22 *;
 [A]GB2387964  (TRIKON HOLDINGS LTD [GB]) [A] 1-10 * page 4, lines 1-7 * * page 6, line 16 - page 7, line 14 * * page 13, line 26 - page 14, line 21; figure 4 * * page 15, lines 2-15; figures 5,6 * * page 15, line 20 - page 16, line 15; figure 7 *;
 [A]US5273609  (MOSLEHI MEHRDAD M [US]) [A] 1-10 * column 7, lines 42-63; figure 1 *;
 [A]US2003099784  (SCHAEPKENS MARC [US]) [A] 1-10 * paragraphs [0026] , [0027] , [0030]; figure 2 *;
 [A]JPH0855699  (ANERUBA KK) [A] 1-10 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.